• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• 대한치과교정학회지
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• 제22권1호
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• pp.123-131
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• 1992

This study was done to evaluate the changes of enamel surface by interproximal stripping and recovery of it by polishing. The number of 34 1st premolars which had extracted for orthodontic treatment were selected as samples. Interproximal stripping was performed by hand with metal strip and strip placer (Dentaurum Co., Germany) and low speed handpiece with diamond disk (Superdiaflex, Germany). Polishing was performed by hand with plastic strip (3M Col) and low speed handpiece with whip-mix, DCPA (Dicalcium Phosphate, Anhydrous, $CaHPO_4$) powder and Sof-lex (3M Co. U.S.A.) polishing kit. Each groups were examined under the scanning electron microscope (JEOL Co., JSM-840A, Japan) and the following results were obtained: 1. The stripped group performed by metal strip and diamond disk altogether showed deep furrow on the enamel surface as wide as about $10{{\mu}m}$. 2. There could be seen more irregular scratched line in the group stripped by metal strip than that by diamond disk. 3. The polished group performed by plastic strip and DCPA powder showed slight smoothening of the edge of stripped furrow on the enamel surface without relation to the stripping method. 4. The polished group performed by Sof-lex progressive polishing kit could not avoid the formation of the furrows on the enamel surface according to the particle size without relation to the stripping method. 5. The polished group performed by the superfine polishing wheel, the final stage of Sof-lex polishing method showed shallow scratched line as wide as within about $2{{\mu}m}$ on the enamel surface without relation to the stripping method. 6. The interproximal stripped enamel surface could not recover its original surface texture by any kind of polishing methods.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.298-303
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• 2004

parameters in surface grinding. Taguchi method which is one of the design of experiments has been introduced in achieving the aims. The process parameters were the grain size, the wheel speed, the depth of cut and the table speed. The effect of the process parameters on the geometric error was examined and an optimal set of the parameters was selected to minimize the geometric error within the controllable range of the used grinding machine. The reliability of the results was evaluated by the ANOVA.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.20-23
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• 2002

In silicon wafer manufacturing process, the grinding process has been adopted to improve the quality of wafer such as flatness, roughness and so on. This paper describes the effect of grinding process on the surface quality of wafer. The experiments are carried out by high precision in fred grinder with air bearing spindle. The relationship between the inclination of chuck table and the flatness of wafer is investigated, and the effect of grinding conditions including wheel speed, table speed, and feed rate on damage depth and roughness of wafer is also investigated. The experimental results show that there is close relationship between the inclination of the chuck table and the flatness of wafer, and the grinding conditions within this paper little affect the flatness of wafer and relatively high affect the damage depth of wafer.

• 한국기계가공학회지
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• 제19권3호
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• pp.105-110
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• 2020

Alumina, a typical ceramic material used for semiconductors and display parts, is the subject of research and development efforts for mineral material processing. Alumina is extremely difficult to process since it is brittleness to either fine ceramics material. We have studied the shape of diamond particles and their use in machinability for alumina processing. Our study was carried out under various processing conditions, including cutting speed, table speed, and the surface roughness of the work piece. We also analyzed the wear characteristics of the tool by total cutting.

• 한국정밀공학회지
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• 제13권6호
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• pp.59-65
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• 1996

There are many difficulties in automatic polishing for die & mold surfaces. Even though the process has been studied in the past 15 years, it has not been achieved yet, but by the process of actual hand work of well-skilled workers. A new magentic assisted polishing process, which is one of the potential methods for automation of surface finishing has been studied in the past 10 years by colleagues. The process has many merits, but on the other hand also has demerits, one being low efficiency of grindability by comparision with wheel polish. Therefore, some attempts were tried to improve the grindability by adopting electropolishing, ultra-high speed milling, 5-axis controlled machine etc... most recently by colleagues. This paper also aims to improve the efficiency of polishing by introducing the easily-polished shape surface cutting method equalizing the tool feed per revolution to the pick feed. This cutting method was experimentally confirmed to have sufficient grindability to polish milled surface (with $10{{\mu}m}$Rmax surface roughness) into mirror surface (with $0.4{{\mu}m}$Rmax surface roughness).

• 대한기계학회논문집A
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• 제27권5호
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• pp.681-687
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• 2003

Terrain surfaces have to be modeled in very detail and wheel-surface contacting geometry must be well defined in order to obtain proper ground-reaction and friction forces fur realistic simulation of off-road vehicles. Delaunay triangulation is one of the most widely used methods in modeling 3-dimensional terrain surfaces, and the T-search is a relevant algorithm for searching resulting triangular polygons. The T-search method searches polygons in a successive order and may not allow real-time computation of off-road vehicle dynamics if the terrain is modeled with many polygons, depending on the computer performance used in the simulation. The dynamic T-search, which is proposed in this paper, combines conventional T-search and the concept of the dynmaic-window search which uses reduced searching windows or sets of triangular surface polygons at each frame by taking advantage of the information regarding dynamic charactereistics of a simulated vehicle. Numerical tests show improvement of searching speeds by about 5% for randomly distributed triangles. For continuous search following a vehicle path, which occurs in actual vehicle simulation, the searching speed becomes 4 times faster.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2003년도 한국우주과학회보 제12권2호
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• pp.26-26
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• 2003

During fabrication process for the large space optical surfaces, the traditional bound abrasive grinding with bronze bond cupped diamond wheel tools leaves the machine marks and the subsurface damage to be removed by subsequent loose abrasive lapping. We explored a new grinding technique for efficient quantitative control of precision CNC grinding for space optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of resin bond diamond tools. The machining parameters such as grit number, tool rotation speed, work-piece rotation speed, depth of cut and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis methods. The effectiveness of the grinding prediction model was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment details, the results and implications are presented.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1986년도 한국자동제어학술회의논문집; 한국과학기술대학, 충남; 17-18 Oct. 1986
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• pp.596-600
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• 1986

This paper describes a capacitively reading apparatus for determining the angular orientation, speed and/or direction of rotary objects such as shaft, dial hand, counter wheel and the like. The apparatus consists of sensing device and circuit accompanying with said sensing device. The sensing device is provided by arranging many stationary electrodes lying substantially on a surface of a stationary plane member and by arranging rotary electrode lying substantially on a surface of rotary objects to be monitored, in which said rotary electrode is in confronting relationship to some stationary electrodes so as to construct unique capacitors according to the angular position of rotary objects. The angular position of said rotary electrode is determined by sets of stationary electrodes which are in confronting relationship to rotary electrode. A carrier signal is generated by scanning device while scanning said stationarelectrodes, whose periods are in corresponding relationship to said stationary electrodes, respectively. The periods of carrier corresponding to the angular position of said rotary electrode is modulated by a modulation signal generated by detecting device according to said rotary electrode. This apparatus is applied to automatically monitor any kind of storage tank, as well as to automatically read the conventional utility meters such as Watthour meters, Gas meters, Water meters, etc..

• 한국시뮬레이션학회:학술대회논문집
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• 한국시뮬레이션학회 2002년도 추계학술대회 논문집
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• pp.163-170
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• 2002

Terrain surfaces have to be modeled in very detail and wheel-surface contacting geometry must be well defined in order to obtain proper ground-reaction and friction forces for realistic simulation of off-road vehicles. Delaunay triangulation is one of the most widely used methods in modeling 3-dimensional terrain surfaces, and T-search is a relevant algorithm for searching resulting triangular polygons. The T-search method searches polygons in successive order and may not allow real-time computation of off-road vehicle dynamics if the terrain is modeled with many polygons, depending on the computer performance used in the simulation. In order to accelerate the searching speed of T-search, a terrain database of triangular polygons is modeled in multi-levels by adopting the LOD (Level of Detail) method used in realtime computer graphics. Simulation results show that the new LOD search is effective in shortening the required computing time. The LOD search can be even further accelerated by introducing an NN (Neural Network) algorithm, in the cases where a appropriate range of moving paths can be predicted by cultual information of the simulated terrain, such as lakes, houses, etc.. Numerical tests show that LOD-NN search almost double the speed of the original T-search.