• Title/Summary/Keyword: Wet electrostatic precipitation

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Optimization of an Ozone-based Advanced Oxidation Process for the Simultaneous Removal of Particulate Matters and Nitrogen Oxides in a Semiconductor Fabrication Process (반도체 제조공정 미세먼지-질소산화물 동시 저감을 위한 오존 고속산화공정 최적화 연구)

  • Uhm, Sunghyun;Lee, Seung Jun;Ko, Eun Ha;Hong, Gi Hoon;Hwang, Sangyeon
    • Applied Chemistry for Engineering
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    • v.32 no.6
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    • pp.659-663
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    • 2021
  • 10 m3/min (CMM) multi-pollutants abatement system was successfully developed by effectively integrating ozone oxidation, wet scrubbing, and wet electrostatic precipitation for the simultaneous removal of particulate matters (PMs) and NOx in a semiconductor fabrication process. The sophisticated control and optimization of operating parameters were conducted to maximize the destruction and removal efficiency of NOx. In particular, the stability test of a wet electrostatic precipitator was carried out in parallel for 30 days to validate the reliability of core parts including a power supply. An O3/NO ratio, which is the most important operating parameter, was optimized to be about 1.5 and the optimization of wet scrubbing with a reducing agent made it possible to analyze the contribution of neutralization reaction.

Study on Wet Electric Precipitation with Electrospray for Removal of PM1.0 in Exhaust Gas (배가스 내 PM1.0 미세먼지 제거를 위한 정전분무 습식 전기집진기에 대한 연구)

  • Cho, Yeonjoo;Lim, Hyunjeong;Kim, Soyeon;Choi, Sangmi;Jeong, Min Kyu;Kim, Minsung
    • Plant Journal
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    • v.16 no.1
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    • pp.34-37
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    • 2020
  • The need to improve the performance of the dust collector by increasing the fine dust pollution in Korea is eminent. In this study, electrostatic spray wet electrostatic precipitator is used to remove Particulate Matter (PM). In order to enter the Cone-jet mode, which is the most stable spray mode among the various modes of electrostatic spraying, an appropriate voltage-flow condition must be satisfied, and a voltage-flow interval enabling this can be expressed as Stability Island. The voltage at which the conduit mode starts in the Stability Island section is referred to as the electrostatic spray minimum voltage (Onset Voltage). However, the conventional electrostatic spray is uses a very low flowrate, at most few millilitres per minute. The use of much higher flowrates has introduced different patterns of electrospray modes. In this study, the different spray modes will be studied in detail.

An Ozone-based Advanced Oxidation Process for an Integrated Air Pollution Control System (복합대기오염 저감 시스템을 위한 오존 고속산화 기반 고도산화공정)

  • Uhm, Sunghyun;Hong, Gi Hoon;Hwang, Sangyeon
    • Applied Chemistry for Engineering
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    • v.32 no.3
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    • pp.237-242
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    • 2021
  • Simultaneous removal technologies of multi-pollutants such as particulate matters (PMs), NOx, SOx, VOCs and ammonia have received consistent attention due to the enhancement of pollutant abatement efficiency in addition to the stringent environmental regulation and emission standard. Pretreatment of insoluble NO by an ozone oxidation can be considered to be more effective route for saving space occupation as well as operation cost in comparison with that of traditional selective catalytic reduction (SCR) process. Moreover the primary advantage of ozone oxidation process is that the simultaneous removal with acidic gas including SOx is also available. Herein, we highlight recent studies of multi-pollutant abatement via ozone oxidation process and the promising research topics for better application in industrial sectors.