• Title/Summary/Keyword: Weak layer

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Fabrication of Two-dimensional MoS2 Films-based Field Effect Transistor for High Mobility Electronic Device Application

  • Joung, DaeHwa;Park, Hyeji;Mun, Jihun;Park, Jonghoo;Kang, Sang-Woo;Kim, TaeWan
    • Applied Science and Convergence Technology
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    • v.26 no.5
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    • pp.110-113
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    • 2017
  • The two-dimensional layered $MoS_2$ has high mobility and excellent optical properties, and there has been much research on the methods for using this for next generation electronics. $MoS_2$ is similar to graphene in that there is comparatively weak bonding through Van der Waals covalent bonding in the substrate-$MoS_2$ and $MoS_2-MoS_2$ heteromaterial as well in the layer-by-layer structure. So, on the monatomic level, $MoS_2$ can easily be exfoliated physically or chemically. During the $MoS_2$ field-effect transistor fabrication process of photolithography, when using water, the water infiltrates into the substrate-$MoS_2$ gap, and leads to the problem of a rapid decline in the material's yield. To solve this problem, an epoxy-based, as opposed to a water-based photoresist, was used in the photolithography process. In this research, a hydrophobic $MoS_2$ field effect transistor (FET) was fabricated on a hydrophilic $SiO_2$ substrate via chemical vapor deposition CVD. To solve the problem of $MoS_2$ exfoliation that occurs in water-based photolithography, a PPMA sacrificial layer and SU-8 2002 were used, and a $MoS_2$ film FET was successfully created. To minimize Ohmic contact resistance, rapid thermal annealing was used, and then electronic properties were measured.

Effects of Consumable on STI-CMP Process (STI-CMP 공정에서 Consumable의 영향)

  • Kim, Sang-Yong;Park, Sung-Woo;Jeong, So-Young;Lee, Woo-Sun;Kim, Chang-Il;Chang, Eui-Goo;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.185-188
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    • 2001
  • Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2 \; (PN_2)$ gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and $PN_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

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A Study on Spatial and Temporal Patterns of Water Quality in the Middle Area of the Nakdong River, Korea (낙동강 중류 보 구간에서의 시 · 공간적 수질 분포 특성 연구)

  • Na, Eun Hye;Park, Suyoung;Kim, Jongha;Im, Seongsoo;Kim, Kyunghyun
    • Journal of Korean Society on Water Environment
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    • v.31 no.6
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    • pp.723-731
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    • 2015
  • We investigated the spatial and temporal patterns of water quality in the Gangjung-Goryoung weir that is located in the middle area of the Nakdong river, Korea. The monitoring results indicated that there are discernible vertical differences in water quality during the pre- and post-monsoon periods (May to September). During this period, it was observed that the weak thermal stratification formed at the maximum level, and pH, Chl-a, and DO concentrations in the surface layer were higher than those in the bottom layer. This vertical difference was especially noticeable for DO concentrations: there were DO depletions at the bottom layer in late June to early August. During the summer monsoon period with heavy rainfall, there was a decline in vertical differences in water quality. From this study, it was suggested that continuous monitoring of vertical profiles could become a useful tool for identifying the spatial and temporal distributions of water quality and for developing the best management policy for water quality in the Nakdong river.

Conservation for Wooden Objects and Lacquer Wares Excavated From Sinchang-dong, Gwangju (광주 신창동 저습지 유적 목제 및 칠기의 보존)

  • Kim, Soochul;Park, Youngman
    • Conservation Science in Museum
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    • v.7
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    • pp.43-51
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    • 2006
  • From the low swamp remains in Sinchang-dong, Gwangju, a number of wooden lacquerware along with various wooden artifacts were excavated. These excavated lacquerware have deteriorated and weak wooden parts and the lacquer layer come off from the wooden parts; they are very likely to peel off and crack. Therefore, we impregnated the lacquerware in PEG#4000 40% solution that was effective for vacuum freeze drying and finished freeze-drying below 0°…. We compared the weight of wood and lacquerware right after the freeze-drying with the weight after leaving them in a airtight space with 60% RH (relative humidity). The comparison results showed no change in weight; thereby we confirmed controlling the finishing temperature during freeze-drying could control the moisture in wood after drying and it could stabilize wood against the change in moisture in the atmosphere. according to the analysis of the lacquer fragment, the base layer was pasted on the wooden surface with mixed black pigment and the upper layer was pasted three or four times with the mixture of lacquer and black pigment; or it was pasted without the black base coating.

A Study on the Engineering Properties of Alluvial clay in the Daebul Reclaimed Tideland (대불간척지 충적점토의 공학적 특성에 관한 연구)

  • 김홍일;진병익;유기송
    • Magazine of the Korean Society of Agricultural Engineers
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    • v.26 no.1
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    • pp.29-37
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    • 1984
  • This study was made to find several significant relations among various physical and mechanical properties including cone penetration resistance. The alluvial clay samples were taken at the Daebul Reclaimed Tideland in Samhomyeon, Yeongamgun, Jeonranamdo. The results of the study are summarized as follows; 1.Most samples belong to medium or high plastic, inorganic, silty clay(clay contents;32-64%, silt contents; 36-68%, sand contents; 0-3%). The specific gravities range from 2.70 to 2.73, the unit weights from 1.45 to 1. 75g/cm$^3$, the natural moisture contents from 45 to 77%, the liquid limits from 32 to 56%. It is certain that the foundation is weak because the natural moisture contents are much higher than the liquid limits. 2.It is known from the shear tests that the unconfined compression strenghs vary from 0.09 to 0. 38kg/cm2, the cohesions from 0.05 to 0. 21kg/cm2, the internal friction angles from 0 to 3˚. 3.The consolidation tests show that the initial void ratios range from 1.25 to 2.28, the compression indeices from 0.43 to 0.84, the preconsolidation loads from 0.21 to 0.74kg/cm$^2$. 4.Cone penetration resistances are usually less than 5kg/cm$^2$ from ground surface to the depth of about 8m, and from S to l0kg/cm$^2$ in the layer below about 8m to hard layer. 5.The cohesion and cone penetration resistance are in proportion to the depth of soil layer. 6.The correlations between various physical and mechanical properties including cone penetration resistance for the alluvial clay samples are as follows; a) Wn=0.944C+ l2.733 (r=0.829) b) LL=0. 728Cy+6. 991 (r=0. 873) c) PI=0.659Cy-8.168 (r=0.860) d) rt=0. 0077(272-Wn) =2.092-0. 0077Wn (r=0. 859) e) 60=0. 035wn-0 447 (r=0. 893) f) C=0.380qw+0.031 (r=0.816) g) qu=0.0707qc+0.029 (r=0.810) h) C=0.018Z+0.055 (r=O.802) I) qc=0. 415Z+1, 438 (r=0. 943)

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AN IMMUNOHISTOCHEMICAL STUDY ON MANDIBULAR CONDYLE IN WEANLING RAT AFTER MASSETER MUSCLE RESECTION (이유백서에서 교근절제후 하악과두의 면역조직화학적 연구)

  • Choi, Nam-Ki;Choi, Hong-Ran;Yang, Kyu-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.23 no.2
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    • pp.559-574
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    • 1996
  • The purpose of this study was to determine whether there was any correlation between temporomandibular joint dysfunction and structure of the mandibular condyle. Weanling rats had their masseter muscles resected and immunohistochemical findings were observed with a light microscope. The results obtained were as follows : 1. The condylar cartilage region was divided into articular, proliferating, cartilage cell and hypertrophic cell layers according to cell morphology. 2. In light microscopic views, the proliferating and cartilage cell layers of the experimental group decreased gradually and at the 8th week significantly. 3. In immunohistochemical staining for type I and II collagen, a reaction was detected in the lower part of proliferating cell and cartilage cell layers. In the cartilage cell layers, a stronger cellular reaction was present. Immunohistochemical staining for type II collagen reacted more strongly than that of type I collagen. 4. In immunohistochemical staining for proteoglycan, the staining of the experimental group resembled the control group and gradually showed a weak reaction. The proliferating and cartilage cell layers reacted more strongly than the hypertrophic cell layer. 5. In immunohistochemical staining for proliferating cell nuclear antigen(PCNA), the strong reaction was detected in the nucleus of the proliferating cell layer both in control and experimental groups. But the thickness of the proliferating layer decreased in experimental group, consequently the reaction of the experimental group was reduced more than that of the control group.

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A Direction of Convergence and Security of Smart Grid and Information Communication Network (스마트그리드(Smart Grid) 전력망과 정보통신망 융합 보안 방향)

  • Seo, Woo-Seok;Jun, Moon-Seog
    • The Journal of the Korea institute of electronic communication sciences
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    • v.5 no.5
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    • pp.477-486
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    • 2010
  • This Study suggests security directions to reconstruct separate network of Smart Grid and information communication network as one communications system and implement Smart Grid integrated information communication network. In addition, it suggests prevention directions to prevent future cyber attacks by reorganizing network as the key three-stage network and separating TCP/IP four layers that consist of existing information communication network from Smart Grid. Moreover, it suggests the foundation for the study and the test by providing current problems of Smart Grid, weak points, and three security models. This study is meaningful to suggest development directions and situations as a technology of future-oriented electric industries, integrate attacks and preventions of TCP/IP Layers with Smart Grid, and seek for a new technology of Smart Grid and future tasks for Smart Grid information security.

Effects of Various Facility Factors on CMP Process Defects (CMP 공정의 설비요소가 공정 결함에 미치는 영향)

  • Park, Seong-U;Jeong, So-Yeong;Park, Chang-Jun;Lee, Gyeong-Jin;Kim, Gi-Uk;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.5
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    • pp.191-195
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    • 2002
  • Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

Adsorption Mechanism of Alkyl Ketones on Cation Supported by Layer Silicate. Link Formation of Hydroxyl Group (Layer Silicate에 지지된 양이온상에서 일어나는 Alkyl Ketones의 흡착기구. 水酸基의 Link 形成理論)

  • Jong Taik Kim;Jong Rack Sohn
    • Journal of the Korean Chemical Society
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    • v.17 no.4
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    • pp.247-255
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    • 1973
  • The self supported film specimen of Wyoming montmorillonite as a layer silicate saturated by cations,$Li^{+},\;Na^{+},\;K^{+},\;Ca^{2+},\;Ni^{2+},\;Al^{3+}$and$F^{3+}$ were allowed to contact acetone, methyl-ethyl ketone and diethyl ketone within the heatable gas cell. The i.r. spectra between $4000{\sim}1200cm^{-1}$ at different pressures of adsorbates indicated bond formation through carbonyl oxygen. Two types of carbonyl bond shift with maxima at $1713cm^{-1}$ and $1690cm^{-1}$ are attributed as coordinate bond formation of carbonyl with either surface hydroxyl or cationic hydroxyl group. The intensity of the vOH was analyzed and resonance form of cationic hydroxyl was proposed as an adsorption site. The tendency to form coordinate bond was in good agreement with calculated formal charge of carbonyl oxygen in an increasing order, acetone < methyl-ethyl ketone < diethyl ketone. As an additional mechanism of adsorption, weak hydrogen bonding of methyl hydrogen with surface oxygen was observed.

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Fabrication of Ferroelectric BaTiO3Thin Film on Ti Substrate and Formation of Calcium Phosphate in Eagle’s MEM Solution (티타늄 기판 위에 강유전성 BaTiO3박막 형성과 분극처리에 의한 Eagle’s MEM 용액에서의 Calcium Phosphate 생성)

  • Lee, Yong-Ryeol;Jeong, Young-Hwa;Hwang, Kyu-Seog;Song, Ho-Jun;Park, Yeong-Joon
    • Korean Journal of Materials Research
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    • v.12 no.7
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    • pp.560-567
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    • 2002
  • Titanium (Ti) is a bioinert material and has lower elastic coefficient and better strength/volume property than other metals. Ferroelectric materials show alignment of positive and negative charges by poling treatment. This study was purposed to develop a new implant system by combining the advantages of Ti and ferroelectric property of $BaTiO_3$ (BTO). It was performed with the assumption that the $Ca^{2+ }$ ions would be easily attracted on negatively charged surface and the attracted cation might behave as nuclei for bone-like crystal growth in biological solutions. A ferroelectric BTO thin film on Ti was fabricated and the effect of poling treatment on the improvement of calcium phosphate (Ca-P) formation in biological solutions was evaluated. After immersion in Eagle’s minimum essential media (MEM) solution, NaCl was formed on Ti, and Ca-P layer containing NaCl was formed on Ti-O. Weak and sparse Ca-P layers were formed on BTO, while thick, homogeneous, and dense Ca-P layer was formed on negatively polarized BTO (N-BTO), which was confirmed by FE-SEM and EDX. In summary, these results demonstrate that poling the ferroelectric BTO surface negatively is effective for the formation of Ca-P layer in MEM solution, and that N-BTO coating on Ti could be used as a possible alternative method for enhancing the osseointegration of the implants.