• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.399-399
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• 2008

Synthesis and characterization of ZnO structure such as nanowires, nanorods, nanotube, nanowall, etc. have been studied to multifunctional application such as optical, nanoscale electronic and chemical devices because it has a room-temperature wide band gap of 3.37eV, large exiton binding energy(60meV) and various properties. Various synthesis methods including chemical vapor deposition (CVD), physical vapor deposition, electrochemical deposition, micro-emulsion, and hydrothermal approach have been reported to fabricate various kinds of ZnO nanostructures. But some of these synthesis methods are expensive and difficult of mass production. Wet chemical method has several advantage such as simple process, mass production, low temperature process, and low cost. In the present work, ZnO nanorods are deposited on ITO/glass substrate by simple wet chemical method. The process is perfomed by two steps. One-step is deposition of ZnO seeds and two-step is growth of ZnO nanorods on substrates. In order to form ZnO seeds on substrates, mixture solution of Zn acetate and Methanol was prepared.(one-step) Seed layers were deposited for control of morpholgy of ZnO seed layers by spin coating process because ZnO seeds is deposited uniformly by centrifugal force of spin coating. The seed-deposited samples were pre-annealed for 30min at $180^{\circ}C$ to enhance adhesion and crystallinnity of ZnO seed layer on substrate. Vertically well-aligned ZnO nanorods were grown by the "dipping-and-holding" process of the substrates into the mixture solution consisting of the mixture solution of DI water, Zinc nitrate and hexamethylenetetramine for 4 hours at $90^{\circ}C$.(two-step) It was found that density and morphology of ZnO nanorods were controlled by manipulation of ZnO seeds through rpm of spin coating. The morphology, crystallinity, optical properties of the grown ZnO nanostructures were carried out by field-emission scanning electron microscopy, high-resolution electron microscopy, photoluminescence, respectively. We are convinced that this method is complementing problems of main techniques of existing reports.

• Korean Journal of Materials Research
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• v.26 no.8
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• pp.430-437
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• 2016

Aluminum oxide ($Al_2O_3$) thin films were grown by atomic layer deposition (ALD) using a new Al metalorganic precursor, dimethyl aluminum sec-butoxide ($C_{12}H_{30}Al_2O_2$), and water vapor ($H_2O$) as the reactant at deposition temperatures ranging from 150 to $300^{\circ}C$. The ALD process showed typical self-limited film growth with precursor and reactant pulsing time at $250^{\circ}C$; the growth rate was 0.095 nm/cycle, with no incubation cycle. This is relatively lower and more controllable than the growth rate in the typical $ALD-Al_2O_3$ process, which uses trimethyl aluminum (TMA) and shows a growth rate of 0.11 nm/cycle. The as-deposited $ALD-Al_2O_3$ film was amorphous; X-ray diffraction and transmission electron microscopy confirmed that its amorphous state was maintained even after annealing at $1000^{\circ}C$. The refractive index of the $ALD-Al_2O_3$ films ranged from 1.45 to 1.67; these values were dependent on the deposition temperature. X-ray photoelectron spectroscopy showed that the $ALD-Al_2O_3$ films deposited at $250^{\circ}C$ were stoichiometric, with no carbon impurity. The step coverage of the $ALD-Al_2O_3$ film was perfect, at approximately 100%, at the dual trench structure, with an aspect ratio of approximately 6.3 (top opening size of 40 nm). With capacitance-voltage measurements of the $Al/ALD-Al_2O_3/p-Si$ structure, the dielectric constant of the $ALD-Al_2O_3$ films deposited at $250^{\circ}C$ was determined to be ~8.1, with a leakage current density on the order of $10^{-8}A/cm^2$ at 1 V.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.5
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• pp.275-281
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• 2016

In this study, we investigate the pool boiling enhancement caused by perforated plates on top of a smooth surface. We conduct tests using R-123 at atmospheric pressure. It was shown that perforated plates significantly enhanced the pool boiling of the smooth surface. The reason may be attributed to the increased bubble contact area between the plates. The results showed that the enhancement ratio was dependent on the heat flux. At high heat flux, the enhancement ratio increased as the porosity increased. However, at low heat flux, the enhancement ratio decreased as the porosity increased. For the present investigation, the optimum configuration had a pore diameter of 2.0 mm, pore pitch of $2.5mm{\times}5.0mm$ or $5.0mm{\times}5.0mm$, and a gap width of 0.5 mm, which yielded heat-transfer coefficients that are close to those of GEWA-T. The optimum porosity for R-123 was significantly larger than that of water or ethanol. The reason for this may be the large liquid-to-vapor density ratio along with the small latent heat of vaporization of R-123. The perforated plates yielded smaller boiling hysteresis compared with that of the smooth surface.

• Journal of Plant Biotechnology
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• v.7 no.1
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• pp.67-74
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• 2005

To overcome various disadvantages of conventional cul-ture vessels for micropropagation, a novel disposable vessel, the 'Vitron', made of a multi-layered $OTP^{(R)}$ film and supported by a polypropylene frame, was developed. The film possesses superior properties such as: high light transmittance, low water vapor transmittance and thermal stability and in particular, high gas-permeability. Single nodal explants, which were excised from the multiple shoots derived from shoot-tip culture, were cultured in Vitron and polycarbonate vessels on $3\%$ sugar-containing agar on MS medium and placed at 3000 ppm $CO_2$-enrichment at a low photosynthetic photon flux density (PPFD) ($45{\mu}mol\;m^{-2}\;s^{-1}$). The in vitro and ex vitro growth, and the net photosynthetic rate of in vitro and ex vitro plantlets were significantly enhanced in the Vitron compared to those cultured in a polycarbonate vessel. Explants that were cultured on the same MS medium under low PPFD at various $CO_2$ concentrations were also cultured at 3000 ppm $CO_2$- enrichment at various PPFD: 30, 45, 60, 75 and $90{\mu}mol\;m^{-2}\;s^{-1}$. The best in vitro and ex vitro growth obtained for 3000 ppm $CO_2$-enrichment at $75{\mu}mol\;m^{-2}\;s^{-1}$ PPFD. The novel Vitron vessel, when placed under the two conditions, may replace conventional culture vessels for the successful micropropagation of sweetpotato.

• Proceedings of the KSRS Conference
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• 1998.09a
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• pp.409-414
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• 1998

To examine the detectability of the aerosol and/or Yellow dust from China crossing over the Yellow sea, three works carried out as follows , Firstly, a comparison was made of the visible(VIS), water vapor(WV), and Infrared(IR) images of the GMS-5 and NOAA/AVHRR on the cases of yellow sand event over Korea. Secondly, the spectral radiance and reflectance(%) was observed during the yellow sand phenomena on April, 1998 in Seoul using the GER-2600 spectroradiometer, which observed the reflected radiance from 350 to 2500 nm in the atmosphere. We selected the optimum wavelength for detecting of the yellow sand from this observation, considering the effects of atmospheric absorption. Finally, the atmospheric radiance emerging from the LOWTRAN-7 radiative transfer model was simulated with and without yellow sand, where we used the estimated aerosol column optical depth ($\tau$ 673 nm) in the Meteorological Research Institute and the d'Almeida's statistical atmospheric aerosol radiative characteristics. The image analysis showed that it was very difficult to detect the yellow sand region only by the image processing because the albedo characteristics of the sand vary irregularly according to the density, size, components and depth of the yellow sand clouds. We found that the 670-680 nm band was useful to simulate aerosol characteristics considering the absorption band from the radiance observation. We are now processing the simulation of atmospheric radiance distribution in the range of 400-900 nm. The purpose of this study is to present the preliminary results of the aerosol and/or Yellow dust detectability using the Ocean Scanning Multispectral Imager(OSMI), which will be mounted on KOMPSAT-1 as the ocean color monitoring sensor with the range of 400-900 nm wavelength.

• Journal of the Korean Ceramic Society
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• v.41 no.7
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• pp.555-559
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• 2004

Ceramic foams were prepared by a self-blowing process of a polysiloxane with A1$_2$O$_3$ as a filler. The release of water and ethanol vapor during the condensation reaction of the polymer triggered the pores in the polymer melt. The size. interconnectivity and shape of the pores in the ceramic foams were strongly dependent on the viscosity of the polymer melt, which could be varied by the content and size oi the filler. When the content of the filler inceased and the size of the filler decreased. the size of the pores were decreased and the thickness between the pores were increased. In the addition, the viscosity of polymer melt increased by the pretreatment at 130$^{\circ}C$ for Ire intermolecular cross linking thereby stabilizing the foam structure. The density and compressive strength of the ceramic foams were affected by the heating rate during the blowing process.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.9 no.1
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• pp.33-54
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• 2003

The aim of this study was to develop a model that could be used in the design of modified atmosphere packaging (MAP) for peaches. Respiratory data at 5, 10, $20^{\circ}C$ for peaches were gathered and altered for create useful respiration model. Packaging materials were conventional low density polyethylene and polypropylene with anti-fog, and anti-fungi treatments, and thickness was $30{\mu}m$ and $50{\mu}m$ each. Permeability tests were performed to find their oxygen, carbon dioxide, water vapor transmission rate as increases in temperature. Test results were then converted to logarithm format for MAP modeling. The maximum rate of oxygen uptake increased with increasing temperature. Optimum gas composition in the package system for fruits were set according to literature and upper or lower limits of oxygen and dioxide established. To predict gas composition at certain storage time, weight of fruits, film thickness, film type, and other variables, respiration rate was studied at various storage conditions. The results of tests were used to calculate Cameron's model and converted to a cubic estimation equation. The validity of the model was tested experimentally by observing actual atmospheric changes inside packages. This result of study may be useful for designing dynamic gas exchange MAP systems for similar agricultural products.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.267-273
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• 2019

Hierarchically porous $Fe_2O_3$ nanofibers with meso- and macro- pores are designed and synthesized by electrospinning and subsequent heat-treatment. The macro pores are generated by selectively decomposition of polystyrene as a dispersed phase in the as-spun fibers containing $Fe(acac)_3$/polyacrylonitrile continuous phases during heat-treatment. Additionally, meso-pores formed by evaporation of infiltrated water vapor during electrospinning process interconnected the macro-pores and results in the formation of hierarchically porous $Fe_2O_3$ nanofibers. The initial discharge capacity and Coulombic efficiency of the hierarchically porous $Fe_2O_3$ nanofibers at a current density of $1.0A\;g^{-1}$ are $1190mA\;h\;g^{-1}$ and 79.2%. Additionally, the discharge capacity of the nanofibers is $792mA\;h\;g^{-1}$ after 1,000 cycles. The high structural stability and morphological benefits of the hierarchically porous $Fe_2O_3$ nanofibers resulted in superior lithium ion storage performance.

• Journal of the Korean Society of Marine Environment & Safety
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• v.28 no.7
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• pp.1209-1215
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• 2022

The selective catalytic reduction (SCR) is known as a very efficient method to reduce nitrogen oxides (NOx) and the catalyst performs reduction from nitrogen oxides (NOx) to nitrogen (N₂) and water vapor (H2O). The catalyst, which is one of the factors determining the performance of the nitrogen oxide (NOx) ruduction method, is known to increase catalyst efficiency as cell density increases. In this study, the reduction characteristics of nitrogen oxides (NOx) under various engine loads investigated. A 100CPSI(60Cell) catalysts was studied through a laboratory-sized simulating device that can simulate the exhaust gas conditions from the power generation engine installed in the training ship SEGERO. The effect of 100CPSI(60Cell) cell density was compared with that of 25.8CPSI(30Cell) cell density that already had NOx reduction data from the SCR manufacturing. The experimental catalysts were honeycomb type and its compositions and materials of V₂O₅-WO₃-TiO₂ were retained, with only change on cell density. As a result, the NOx concentration reduction rate from 100CPSI(60Cell) catalyst was 88.5%, and IMO specific NOx emission was 0.99g/kwh satisfying the IMO Tier III NOx emission requirement. The NOx concentration reduction rate from 25.8CPSI(30Cell) was 78%, and IMO specific NOx emission was 2.00g/kwh. Comparing the NOx concentration reduction rate and emission of 100CPSI(60Cell) and 25.8CPSI(30Cell) catalysts, notably, the NOx concentration reduction rate of 100CPSI(60Cell) catalyst was 10.5% higher and its IMO specific NOx emission was about twice less than that of the 25.8CPSI(30Cell) catalysts. Therefore, an efficient NOx reduction effect can be expected by increasing the cell density of catalysts. In other words, effects to production cost reduction, efficient arrangement of engine room and cargo space can be estimated from the reduced catalyst volume.