• Title/Summary/Keyword: W-plug

Search Result 85, Processing Time 0.024 seconds

Role of Oxidants for Metal CMP Applications (금속 CMP 적용을 위한 산화제의 역할)

  • 서용진;김상용;이우선
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.17 no.4
    • /
    • pp.378-383
    • /
    • 2004
  • Tungsten is widely used as a plug for the multi-level interconnection structures. However, due to the poor adhesive properties of tungsten(W) on SiO$_2$ layer, the Ti/TiN barrier layer is usually deposited onto SiO$_2$ for increasing adhesion ability with W film. Generally, for the W-CMP(chemical mechanical polishing) process, the passivation layer on the tungsten surface during CMP plays an important role. In this paper, the effect of oxidant on the polishing selectivity of W/Ti/TiN layer was investigated. The alumina(A1$_2$O$_3$)-based slurry with $H_2O$$_2$ as the oxidizer was used for CMP applications. As an experimental result, for the case of 5 wt% oxidizer added, the removal rates were improved and polishing selectivity of 1.4:1 was obtained. It was also found that the CMP characteristics of W and Ti metal layer including surface roughness were strongly dependent on the amounts of $H_2O$$_2$ oxidizer.

Development of Rotary Tube Piercing Machine and Parametric Study on Design Variables using Finite Element Analysis (중공 튜브 성형을 위한 만네스만 천공기의 개발 및 유한요소법을 이용한 공정변수 설계)

  • Lee, H.W.;Lee, G.A.;Kim, E.Z.;Choi, S.;Jang, B.L.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2007.05a
    • /
    • pp.364-367
    • /
    • 2007
  • Typical seamless tube production methods are an extrusion and a rotary tube piercing. The rotary piercing process is more competitive than the extrusion process form view point of productivity, quality, and flexibility. It consists of twin rolling mills, a pair of disc or flat guides, and a plug. Twin rolling mills are skewed with proper angles in two directions. A round billet is progressively fed forward and rotated due to the rotation of twin rolling mills. Internal crack initiation and growth at central area of the billet are gradually progress because of the repeating actions of tension and rotation. Design variables in the rotary piercing rolling process are the feed angle, the cross angle, the reduction ratio, and the position of plug. In this work, a rotary tube piercing machine was developed and parametric studies on design variables were carried out using finite element analysis. The Brozzo ductile fracture criterion was utilized to determine an internal crack initiation.

  • PDF

A Study on the corrosion property by post treatment in the metal dry etch (Metal 건식각 후처리에 따른 부식 특성에 관한 연구)

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2007.10a
    • /
    • pp.747-750
    • /
    • 2007
  • This study proposes that chlorine residue after metal etch as the source of metal corrosion, and charges should be removed by optimizing etch, PR strip and cleaning condition. Charges distributed along the metal line acts as a source of tungsten (W) plug corrosion when associated with following cleaning solution. In cleaning process after metal etch and PR strip, chemical selection is significantly important in terms of metal corrosion. Optimal corrosion preventive PH, no metal attack (choice of optimal inhibitants), high by product removal efficiency and optimal de ionized water treatment condition is critical to the metal corrosion prevention.

  • PDF

A study on the implementation of door control unit for railway trains operable at low and high platforms

  • Young-Seok Cho
    • Journal of the Korea Society of Computer and Information
    • /
    • v.28 no.7
    • /
    • pp.1-9
    • /
    • 2023
  • Currently, as the demand for stops in the urban increases resulting from an increase in the supply of express trains, the development of trains capable of operating both high-floor platforms in the urban and low-floor platforms in the suburbs is required. In this paper, we studied the design and fabrication of a controller for train doors that consists of low and high steps as a plug-in type door mechanism and thus can be used on low and high platforms. This DCU H/W was designed and implemented using 32 bit MCU to control 4 motors, 33 digital inputs and 16 digital outputs. In addition, based on the software life cycle of EN50128, 2 items of operation requirements and 12 items of control requirements were derived, and then they were designed and implemented as operation SW. The implemented SW was tested for each requirement. As a result, we performed tests on 13 items that could be tested in the mock-up out of 14 total requirement items and showed that the requirements were satisfied.

Design and Implementation of High Efficiency 3.3kW On-Board Battery Charger for Electric Vehicle (전기자동차용 고효율 3.3kW On-Board 배터리 충전기 설계 및 제작)

  • Kim, Jong-Soo;Choe, Gyu-Yeong;Jung, Hye-Man;Lee, Byoung-Kuk;Cho, Young-Jin
    • Proceedings of the KIPE Conference
    • /
    • 2010.07a
    • /
    • pp.190-191
    • /
    • 2010
  • 본 논문은 전기자동차 (Electric Vehicles, EVs) 및 플러그인 하이브리드 자동차 (Plug-In Hybrid Electric Vehicles, PHEVs)용 리튬 이온 (Li-Ion) 배터리 충전을 위한 3.3 kW급 차량 탑재형 (On-Board) 충전기 하드웨어의 설계 및 제작에 대하여 기술한다. 차량 실장 특성을 고려하여 부하직렬공진형 dc-dc 컨버터를 적용하고, 80-130kHz의 고주파 스위칭 및 ZVS (Sero-Voltage Switching) 기법을 통해 수동소자의 크기를 최적화하여 5.84L, 5.8kg의 저부피, 경량을 달성한다. 전자부하를 대상으로 정전류 (Continuous Current, CC) 및 정전압 (Continuous Voltage, CV) 제어를 수행하여 93%의 고효율 획득 및 성능을 검증한다.

  • PDF

300kV DC Charging system for Synthetic Testing Facility (합성 차단 시험용 DC300kV 충전장치 개발)

  • Rim, G.H.;Choi, Y.W.;Park, J.M.;Park, K.Y.;Lee, W.Y.;Chung, J.K.
    • Proceedings of the KIEE Conference
    • /
    • 2000.07b
    • /
    • pp.1354-1356
    • /
    • 2000
  • This paper deals with a 300kV dc charging system to be used ?s a voltage source in a circuit breaker synthetic short-circuit-test facility. Cockcroft-walton circuit is used to step up the rectified voltage from a single phase transformer of which primary winding is hooked up to an ac220 wall plug. Two systems with the same ratings have been designed and manufactured. The two system have been made of different supporting structure with different insulating materials. The paper describes a couple of charging schemes, system configurations and the synthetic test circuit in which the developed system is to be used.

  • PDF

Analysis on the Luminous Efficiency of Phosphor-Conversion White Light-Emitting Diode

  • Ryu, Han-Youl
    • Journal of the Optical Society of Korea
    • /
    • v.17 no.1
    • /
    • pp.22-26
    • /
    • 2013
  • The author analyzes the luminous efficiency of the phosphor-conversion white light-emitting diode (LED) that consists of a blue LED chip and a yellow phosphor. A theoretical model is derived to find the relation between luminous efficiency (LE) of a white LED, wall-plug efficiency (WPE) of a blue LED chip, and the phosphor absorption ratio of blue light. The presented model enables to obtain the theoretical limit of LE and the lower bound of WPE. When the efficiency model is applied to the measured results of a phosphor-conversion white LED, the limit theoretical value of LE is obtained to be 261 lm/W. In addition, for LE of 88 lm/W at 350 mA, the lower bound of WPE in the blue LED chip is found to be ~34%. The phosphor absorption ratio of blue light was found to have an important role in optimizing the luminous efficiency and colorimetric properties of phosphor-conversion white LEDs.

Propose a Static Web Standard Check Model

  • Hee-Yeon Won;Jae-Woong Kim;Young-Suk Chung
    • Journal of the Korea Society of Computer and Information
    • /
    • v.29 no.4
    • /
    • pp.83-89
    • /
    • 2024
  • After the end of the service of Internet Explorer, the use of ActiveX ended, and the Non-ActiveX policy spread. HTML5 is used as a standard protocol for web pages established based on the Non-ActiveX policy. HTML5, developed in the W3C(World Wide Web Consortium), provides a better web application experience through API, with various elements and properties added to the browser without plug-in. However, new security vulnerabilities have been discovered from newly added technologies, and these vulnerabilities have widened the scope of attacks. There is a lack of research to find possible security vulnerabilities in HTML5-applied websites. This paper proposes a model for detecting tags and attributes with web vulnerabilities by detecting and analyzing security vulnerabilities in web pages of public institutions where plug-ins have been removed within the last five years. If the proposed model is applied to the web page, it can analyze the compliance and vulnerabilities of the web page to date even after the plug-in is removed, providing reliable web services. And it is expected to help prevent financial and physical problems caused by hacking damage.

A Study on the Strategy of Smart Charging System to Charge the PHEV in the House Which has a 1 kW Fuel Cell Cogeneration System (1 kW 급 가정용 연료전지 코제너레이션 시스템이 설치된 주택 내 플러그인 하이브리드 자동차의 스마트 충전전략 연구)

  • Roh, Chul-Woo;Kim, Min-Soo
    • Proceedings of the SAREK Conference
    • /
    • 2008.06a
    • /
    • pp.838-843
    • /
    • 2008
  • Cause of struggling to escape from dependency of fossil fuels, the fuel cell and the Plug-in Hybrid Electric Vehicle (PHEV) draw attention in the all of the world. Especially, the Polymer Electrolyte Membrane Fuel Cell (PEMFC) systems have been anticipated for next generation's energy supplying system, and we can predict the PHEV will enlarge the market share in the next few years to reduce not only the air pollution in the metropolis but the fuel-expenses of commuters. This paper presents simulation results about the strategy of smart charging system for PHEV in the residential house which has 1 kW PEMFC cogeneration system. The smart charging system has a function of recommending the best time to charge the battery of PHEV by the lowest energy cost. The simulated energy cost for charging the battery based on the electricity demand data pattern in the house. The house which floor area is $132\;m^2$ (40 pyeong.). In these conditions, the annual gasoline, electricity, and total energy cost to fuel the PHEV versus Conventional Vehicle (CV) have been simulated in terms of cars' average life span in Korea.

  • PDF

Role of oxidant on polishing selectivity in the chemical mechanical planarization of W/Ti/TiN layers (W/Ti/TiN막의 연마 선택비 개선을 위한 산화제의 역할)

  • Lee, Kyoung-Jin;Seo, Yong-Jin;Park, Chang-Jun;Kim, Gi-Uk;Kim, Sang-Yong;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2003.05c
    • /
    • pp.33-36
    • /
    • 2003
  • Tungsten is widely used as a plug for the multi-level interconnection structures. However, due to the poor adhesive properties of tungsten (W) on $SiO_2$ layer, the Ti/TiN barrier layer is usually deposited onto $SiO_2$ for increasing adhesion ability with W film. Generally, for the W-CMP (chemical mechanical polishing) process, the passivation layer on the tungsten surface during CMP plays an important role. In this paper, the effect of oxidants controlling the polishing selectivity of W/Ti/TiN layer were investigated. The alumina $(Al_2O_3)$ abrasive containing slurry with 5 % $H_2O_2$ as the oxidizer, was studied. As our preliminary experimental results, very low removal rates were observed for the case of no-oxidant slurry. This low removal rate is only due to the mechanical abrasive force. However, for Ti and TiN with 5 % $H_2O_2$ oxidizer, different removal rate was observed. The removal mechanism of Ti during CMP is mainly due to mechanical abrasive, whereas for TiN, it is due to the formation of metastable soluble peroxide complex.

  • PDF