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Properties of ITO thin films fabricated by R.F magnetron sputtering (R.F. magnetron sputtering 법으로 제작한 ITO 박막의 특성)

  • Jeong, W.J.;Park, G.C.;Yoo, Y.T.
    • Journal of Sensor Science and Technology
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    • v.4 no.2
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    • pp.51-57
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    • 1995
  • Indium Tin Oxide (ITO) thin films have been fabricated by the rf magnetron sputtering technique with a target of a mixture $In_{2}O_{3}$ (90mol%) and $SnO_{2}$ (10mol%). We prepared ITO thin films with substrate temperature 100, 200, 300, 400, $500^{\circ}C$ and post-annealing temperature 300, 400, $500^{\circ}C$. And we analyzed X -ray diffraction patterns, electrical properties, transmission spectra and SEM photographs. As a result, the crystallinity, electrical conductivity and transmittance of ITO thin films were improved with increasing substrate temperature. But, as increasing post-annealing temperature in air, conductivity of the film was decreased. When the ITO thin film was fabricated with substrate temperature of $500^{\circ}C$ and thickness of $3000{\AA}$, its resistivity and transmittance were about $2{\times}10^{-4}{\Omega}cm$ and 85% or more, respectively.

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A simulation study on the structural optimization of a 800V 4H-SiC Power DMOSFET (800V급 4H-SiC DMOSFET 전력 소자 구조 최적화 시뮬레이션)

  • Choi, Chang-Yong;Gang, Min-Seok;Bang, Wook;Kim, Sang-Chul;Kim, Nam-Kyun;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.35-36
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    • 2009
  • In this work, we demonstrate 800V 4H-SiC power DMOSFETs with several structural alterations to obtain a low threshold voltage ($V_{TH}$) and a high figure of merit ($V_B^2/R_{SP,ON}$). To optimize the device performance, we consider four design parameters; (a) the doping concentration ($N_{CSL}$) of current spreading layer (CSL) beneath the p-base region, (b) the thickness of p-base ($t_{BASE}$), (c) the doping concentration ($N_J$) and width ($W_J$) of a JFET region, (d) the doping concentration ($N_{EPI}$) and thickness ($t_{EPI}$) of epi-layer. These parameters are optimized using 2D numerical simulation and the 4H-SiC DMOSFET structure results in a threshold voltage ($V_{TH}$) below ~3.8V, and high figure of merit ($V_B^2/R_{SP,ON}$>${\sim}200MW/cm^2$) for a power MOSFET in $V_B$-800V range.

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Thermoacoustic Refrigerating System, Part II : Implementation and Experiment (열음향 냉장시스템 (II) : 제작 및 실험)

  • Hah, Zae-Gyoo;Ahn, Chul-Yong;Sung, Keong-Mo
    • The Journal of the Acoustical Society of Korea
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    • v.14 no.6
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    • pp.13-20
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    • 1995
  • In this paper, the thermoacoustic refrigerating system was implemented and its operation was experimentally verified. The system is composed of several parts ,4 inch midrange speaker, speaker housing, chamber, stack housing, stack of plates, heat exchangers, thin pipe and cavity. The system is filled with He gas at 10 bar and contains T-type thermocouples and condenser microphone for measuring the temperature and pressure inside, respectively. In addition, cooling water is used for protecting speaker from thermal destruction and cooling down the hot heat exchanger. For the experimental verification of the implemented refigerating system, electrical impedance and resonance characteristics were measured. The results showed that it was most efficient to drive the system at 340 Hz. When operated at 340 Hz, $30^\circ{C}$ environments and 50 electical watts, the temperature of the cold region decreased by $16^\circ{C}$. The dissatisfaction mainly comes from the incomplete thermal insulation of the cold region. We also pointed out some guidelines to improve the performance for later study.

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Characteristics of Fe-Mn Mineralization in Ugii Nuur and Tamir Gol, Mongolia (몽골 우기누르와 타미르골의 철-망간 부존 특성)

  • Lee, Bum Han;Park, Gye Soon;Kim, In Joon;Lee, Gilljae;Heo, Chul-Ho;Koh, Sang-Mo
    • Journal of the Mineralogical Society of Korea
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    • v.25 no.4
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    • pp.313-322
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    • 2012
  • 몽골 우기누르 지역 철-망간 광상과 타미르골 지역 철 광상의 광체는 먼곤체지 층 내에 렌즈상으로 협재되는 특성을 갖는다. 이러한 광상은 캠브리아 기에서 실루리아기에 이르는 화산 기원의 퇴적형 광상인 타미르골-요루골 광상구에 해당된다. 우기누르 지역의 철-망간 광체와 타미르골 지역의 철광체는 주로 규암과 편암을 모암으로 하여 먼곤체지 층 내에 렌즈상으로 협재되어 있다. 우기누르지역의 편암이 주로 세리사이트 편암인 데 비해 타미르골 지역은 주로 백운모 편암이 나타나는 차이를 갖는다. 또한 우기누르 지역의 광석은 망간이10에서 12% 함유되나 타미르골 지역의 광석은 망간이 1% 이하로 함량이 낮은 특성을 갖는다. 우기누르 철 망간 광상의 철 광물은 주로 자철석, 적철석이 우세하게 나타나고 기타 철 산화물과 황철석이 미량으로 수반되어 나타나며, 망간 광물은 주로스페사틴, 버네사이트가 우세하게 나타나고 기타망간 산화물이 수반되어 나타난다. 타미르골 지역의 철 광석은 자철석이 우세하게 나타나고 적철석이 수반되며 황철석, 철 산화물, 탄산질 철 등이 미량으로 수반되어 나타난다. 우기누르 철-망간 광상에 대한 육상 자력탐사 결과 높은 자기 이상값을보이는 영역이 지표에서 확인된 광체의 방향과 같은 약 $N30^{\circ}W$ 방향으로 나타나며 지표에서 확인된 광체 이외에 지표에 드러나지 않은 부분에서도 연장되는 것이 확인되었다.

Nitrogen Permeation Treatment of Duplex and Austenitic Stainless Steels

  • Yoo, D.K.;Joo, D.W.;Kim, Insoo;Kang, C.Y.;Sung, J.H.
    • Journal of the Korean Society for Heat Treatment
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    • v.15 no.2
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    • pp.57-64
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    • 2002
  • The 22%Cr-5%Ni-3%Mo duplex and 18%Cr-8%Ni austenitic stainless steels have been nitrogen permeated under the $1Kg/cm^2$ nitrogen gas atmosphere at the temperature range of $1050^{\circ}C{\sim}1150^{\circ}C$. The nitrogen-permeated duplex and austenitic stainless steels showed the gradual decrease in hardness with increasing depth below surface. The duplex stainless steel showed nitrogen pearlite at the outmost surface and austenite single phase in the center after nitrogen permeation treatment, while the obvious microstructural change was not observed for the nitrogen-permeated austenitic stainless steel. After solution annealing the nitrogen-permeated stainless steels(NPSA treatment) at $1200^{\circ}C$ for 10 hours, the hardness of the duplex and austenitic stainless steels was constant through the 2 mm thickness of the specimen, and the ${\alpha}+{\gamma}$ phase of duplex stainless steel changed to austenite single phase. Tensile strengths and elongations of the NPSA-treated duplex stainless steel remarkably increased compared to those of solution annealed (SA) duplex stainless steel due to the solution strengthening effect of nitrogen and the phase change from a mixture of ferrite and austenite to austenite single phase, while the NP-treated austenitic stainless steel displayed the lowest value in elongation due to inhomogeneous deformation by the hardness difference between surface and interior.

Transparent Oxide Thin Film Transistors with Transparent ZTO Channel and ZTO/Ag/ZTO Source/Drain Electrodes

  • Choi, Yoon-Young;Choi, Kwang-Hyuk;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.127-127
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    • 2011
  • We investigate the transparent TFTs using a transparent ZnSnO3 (ZTO)/Ag/ZTO multilayer electrode as S/D electrodes with low resistivity of $3.24{\times}10^{-5}$ ohm-cm, and high transparency of 86.29% in ZTO based TFTs. The Transparent TFTs (TTFTs) are prepared on glass substrate coated 100 nm of ITO thin film. On atomic layer deposited $Al_2\;O_3$, 50 nm ZTO layer is deposited by RF magnetron sputtering through a shadow mask for channel layer using ZTO target with 1 : 1 molar ratio of ZnO : $SnO_2$. The power of 100W, the working pressure of 2mTorr, and the gas flow of Ar 20 sccm during the ZTO deposition. After channel layer deposition, a ZTO (35 nm)/Ag (12 nm)/ZTO(35 nm) multilayer is deposited by DC/RF magnetron sputtering to form transparent S/D electrodes which are patterned through the shadow mask. Devices are annealed in air at 300$^{\circ}C$ for 30 min following ZTO deposition. Using UV/Visible spectrometer, the optical transmittances of the TTFT using ZTO/Ag/ ZTO multilayer electrodes are compared with TFT using Mo electrode. The structural properties of ZTO based TTFT with ZTO/Ag/ZTO multilayer electrodes are analyzed by high resolution transmission electron microscopy (HREM) and X-ray photoelectron spectroscopy (XPS). The transfer and output characterization of ZTO TTFTs are examined by a customized probe station with HP4145B system in are.

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Fabrication of thick film type catalytic combustible gas sensor using parallel resistance heat source (병열형가열부를 이용한 후막형 접촉연소식 가스센서 제조)

  • Park, Jun-Sik;Lee, Jae-Suk;Hong, Sung-Jei;Park, Hyo-Derk;Shin, Sang-Mo
    • Journal of Sensor Science and Technology
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    • v.5 no.1
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    • pp.23-29
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    • 1996
  • Thick film type gas sensors with parallel Pt heaters were fabricated by screen printing process and investigated sensitivities for methane gas. The TR7905 was selected as Pt paste for heater by characterization the properties of TCRs and thick film microstructures. The average resistance of parallel Pt heaters was $1.8{\Omega}$, and the best TCR obtained was $3685\;ppm/^{\circ}C$. On the top of the Pt heaters, a sensing layer added with Pt and Pd as catalyst paste was screen printed and heat treated. The sensitivity of the sensor was 4.3mV/1000ppm for methane. The power consumption of the sensors was 2.12watts.

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A Study on the Recent Sediments of Han River -Grain Size, Heavy Minerals and Trace Elements- (한강유역(漢江流域)의 현생퇴적물(現生堆積物)에 관한 연구(硏究) -입도(粒度), 중광물(重鑛物) 및 유용원소(有用元素)를 중심(中心)으로-)

  • So, Chil Sup;Lee, Ki Hyung
    • Economic and Environmental Geology
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    • v.7 no.3
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    • pp.87-100
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    • 1974
  • This paper deals with grain size analysis, heavy mineral analysis and trace element analysis of the recent sediments of Han River basin between Cheongpyong, Gyeonggi province and Seoul. For each location the samples are taken at river shoreline, river berm and river dune. The size analysis discloses that the mean values range from $-1.37{\phi}$ to $-1.60{\phi}$, sorting values range from 0.25 to 1.84, skewness values range from -0.44 to 0.51 and kurtosis values range from -0.1 to 1.75. Based on the textural parameters, the dune sand can be distinguished from the shoreline-berm sand. The content of heavy minerals of each sample ranges from 0.04 to 4.7%. The principal heavy minerals are ilmenite, magnetite, leucoxene, garnet, amphibole, pyroxene, kyanite, zircon, monazite, tourmaline, epidote, limonite, and minor minerals are apatite, sillimanite, andalusite and olivine. In general, dune sand samples contain more heavy minerals than the samples of shoreline or berm sand. This suggests that the heavy mineral concentration is affected by wind action more than by any other causes. The content of ilmenite and leucoxene decreases, whereas the content of zircon and epidote increases as it approaches the downstream region. The differences result from the variance of geological occurrences. The emission spectrochemical analysis and colorimetry analysis revealed that the content of Ni and V in the heavy minerals of the study area are higher than those of other stream sediments in Korea. On the other hand the content of Cu, Ph, Zn, Mo, W, P, Mn, Cr, Ag and Sn are lower in the study area. It has been observed also that the contents of all the elements except for Bi are higher in this area than the samples of marine sediments of Yellow Sea.

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Radiation Characteristics of Cross Monopole Antennas with Folded Short Stub (폴디드 단락 스터브를 갖는 십자형 모노폴 안테나의 복사 특성)

  • Lim, Seong-Bin;Seong, Won-Mo;Park, Yong-Uk;Choi, Hak-Keun
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.3 s.118
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    • pp.233-240
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    • 2007
  • In this paper, the broadband cross monopole antenna is presented and the radiation characteristics are investigated. The presented broadband cross monopole antenna is composed of the cross monopole element and the folded short stub, which has a excellent band characteristics more than the existing cross monopole antenna. To conform the broadband characteristics of the presented antenna, the experimental antenna is designed, fabricated, and its radiation characteristics are measured in $1.75\sim2.655\;GHz$. It is shown that the designed antenna has the nondirectional pattern in the horizontal plane, the directional pattern in the vertical plane, VSWR less than 1.5, and gain in $2.17\sim4.87\;dBi$. From these results, the presented antenna is conformed as a broadband indoor antenna which can be used for PCS, WCDMA, Wibro, and satellite DMB band.

COMMISSIONING RESULT OF THE KSTAR HELIUM REFRIGERATION SYSTEM

  • Park, Dong-Seong;Chang, Hyun-Sik;Joo, Jae-Joon;Moon, Kyung-Mo;Cho, Kwang-Woon;Kim, Yang-Soo;Bak, Joo-Shik;Cho, Myeon-Chul;Kwon, Il-Keun;Andrieu, Frederic;Beauvisage, Jerome;Desambrois, Stephane;Fauve, Eric
    • Nuclear Engineering and Technology
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    • v.40 no.6
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    • pp.467-476
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    • 2008
  • To keep the superconducting (SC) magnet coils of KSTAR at proper operating conditions, not only the coils but also other cold components, such as thermal shields (TS), magnet structures, SC bus-lines (BL), and current leads (CL) must be maintained at their respective cryogenic temperatures. A helium refrigeration system (RRS) with an exergetic equivalent cooling power of 9 kW at 4.5 K without liquid nitrogen ($LN_2$) pre-cooling has been manufactured and installed. The main components of the KST AR helium refrigeration system (HRS) can be classified into the warm compression system (WCS) and the cryogenic devices according to the operating temperature levels. The process helium is compressed from 1 bar to 22 bar passing through the WCS and is supplied to cryogenic devices. The main components of cryogenic devices are consist of cold box (C/B) and distribution box (D/B). The C/B cool-down and make the various cryogenic helium for the KSTAR Tokamak and the various cryogenic helium is distributed by the D/B as per the KSTAR requirement. In this proceeding, we will present the commissioning results of the KSTAR HRS. Circuits which can simulate the thermal loads and pressure drops corresponding to the cooling channels of each cold component of KSTAR have been integrated into the helium distribution system of the HRS. Using those circuits, the performance and the capability of the HRS, to fulfill the mission of establishing the appropriate operating condition for the KSTAR SC magnet coils, have been successfully demonstrated.