• 제목/요약/키워드: Vapor line

검색결과 137건 처리시간 0.029초

EML-PVD를 이용한 고속 Zn 코팅 (High Speed Zinc Coating by EML-PVD Process)

  • 정우성;남경훈;엄문종;김태엽
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.277-277
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    • 2012
  • New concept of coating process, which is called Electro Magnetic Levitation-Physical Vapour deposition (EML-PVD) was developed and investigated. Zinc coating was performed and succeeded for the first time on the steel strip (Cold-rolled Steel) in a continuos pilot line using the EML-PVD process which is specialized in the high deposition rate and high vapor yield. EML-PVD will be expected to be the next generation coating technology to be applied to the steel industry.

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환경대기 중 유해성 VOC에 대한 자동연속 측정방법의 성능 최적화에 관한 연구 (A Study on the Performance Optimization of a Continuous Monitoring Method for Hazardous VOCs in the Ambient Atmosphere)

  • 손은성;서영교;이동현;이민도;한진석;백성옥
    • 한국대기환경학회지
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    • 제25권6호
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    • pp.523-538
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    • 2009
  • Recently, there has been a keen demand for real-time automatic monitoring of VOCs not only in Korea but other developed countries. We carried out this study to evaluate and to optimize the performance of a continuous automatic monitoring system for hazardous VOCs (HVOCs) in the ambient atmosphere, using an on-line GC system. The online system normally consisted of a Nafion dryer prior to a cold trap of an automatic thermal desorption apparatus and a GC system equipped with two detectors, i.e. PID and ECD. Preliminary tests conducted to check out any contamination of the system revealed an evidence of significant artifact formation of benzene, and it was found that the Nafion dryer (even brand new one) is the source of the benzene artifact. Thus, all the subsequent experiments in this study was carried out inevitably by removing the Nafion dryer. The on-line GC method was investigated with a variety of QC/QA performance criteria such as repeatability, linearity, lower detection limits, and accuracy. In order to find out the best operating condition for the on-line GC system, three different types (in terms of adsorption strength) of cold trap combinations were tested, i.e. (i) Tenax-TA and Carbopack-B combination (weak and hydrophobic); (ii) Tenax-TA, Carbopack-X and Carboxen-1000 combination (strong and hydrophilic); and (iii) Tenax-TA and Carbopack-X combination (medium and hydrophobic/hydrophilic). The USEPA TO-17 manual method was selected as a reference method to evaluate the performance of the on-line method. A series of experiments revealed that the system performance was superior to others when a cold trap packed with hydrophilic adsorbents (Tenax-TA/Carbopack-X/Carboxen-1000 combination) was used and operated at $25^{\circ}C$. However, the system with a cold trap packed with a combination of Tenax-TA and Carbopack-X is more recommended for field applications since the carboxen-1000 adsorbent is too sensitive to water vapor, and hence the performance of the system might be very unstable to humid samples or during rainy days. Furthermore, the precision and accuracy criteria of the Tenax-TA/ Carbopack-X combination were generally compatible with the triple adsorbents cold trap. The continuous automatic monitoring method is, thus, considered very useful to real-time monitoring to understand the variations of VOCs concentrations in ambient air, as it adopts much simpler procedures in sampling, analysis, and data integration steps than manual monitoring methods. However, it should be noted that there is a high possibility of benzene artifacts formation through the Nafion dryer, which is often installed to remove water vapor in air samples before being adsorbed onto the cold trap. Therefore, if a Nafion dryer is used in any studies of monitoring VOCs, the benzene contamination should be carefully examined before carrying out obtaining the data.

유체배관 오염 검출장치 개발에 관한 연구 (A Study of the Device Development for the Contamination Detection in the Delivery Line)

  • 정이하;김병한;홍주표
    • 반도체디스플레이기술학회지
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    • 제14권1호
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    • pp.45-49
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    • 2015
  • Process gases with vapor or liquid phase as well as gas phase may experience alteration in itself or be contaminated in the fluid pipe to the process chamber. And thus it result in as particles or defects on the substrates in semiconductor, LCD, LED manufacturing. Purifiers and filters are used for control of contamination. However, none of detection device is available in the delivery line. In this paper, we propose simple device with lighting and sensing in order to predict contamination of the fluid or the tube wall. For some general purpose gases, it showed constant voltage output regardless of the flow rates. But, the smoke and the moisture in the air lowered the figure due to its concentration. Numerical values for several solid and liquid media were obtained. And, the operating temperature tendency was investigated.

세슘원자에서의 전자기-유도-흡수 (Electromagnetically induced absorption in Cs vapor)

  • 김중복
    • 한국광학회지
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    • 제11권5호
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    • pp.301-305
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    • 2000
  • 세슘 $D_2$의 F=4$\longrightarrow$ F'=5 전이선에서 전자기-유도-흡수(EIA) 현상을 조사하였다. 축퇴된 2준위 원자계의 공명 주파수에서 발진하는 두 레이저광과 원자매질에서 결맞음 상호작용에 기인한 원자흡수의 급격한 증가를 보았다. 세슘원자에서 EIA가 가능한 조건을 조사하였으며 이러한 흡수 신호의 크기는 레이저 선폭이 좁을수록, 결합광의 세기가 클수록 현저하였다. 또한, 결안맞는 레이저에 의한 펌핑이 있는 경우에 흡수 신호가 증폭되는 것을 볼수 있었다.

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Fabrication of low-stress silicon nitride film for application to biochemical sensor array

  • 손영수
    • 센서학회지
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    • 제14권5호
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    • pp.357-361
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    • 2005
  • Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

수은 원자에서의 공명 다광자 이온화 과정의 레이저 강도 의존성 (Laser Intensity Dependence in Resonant Multiphoton Ionization of Hg Atoms)

  • 한재민;정도영;차형기;김철중;이종민
    • 한국광학회지
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    • 제1권1호
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    • pp.7-11
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    • 1990
  • 수은 원자 증기에 강한 레이저 광$(10-120GW/\textrm{cm}^2)$을 조사하여 수은 원자의 공명 다광자 이온화 과정을 연구하였다. 파장 560.7nm의 광자 4개를 흡수할 때 공명준위는 $6d ^1D_2$이다. 수은 증기압(0.1-3.0 Torr)과 레이저 파장(559-569nm)을 변화시키면서 큰 강도의 광원과 원자가 상호작용하여 생기는 AC Stark 이동과 line broadening의 변화를 조사하였고, 원자 밀도의 증가에 따라 이온화율의 증가가 둔화되다가 감소되는 것도 관측되었다. 이동계수 $\alpha$=0.6cm-1/GW/$\textrm{cm}^2$로 측정되었다. 특히, 이온화율의 레이저 강도 의존성을 나타내는 비선형 차수를 공명파장에서 측정한 결과 k=3을 얻었으며, 이론적인 결과와 비교하였다.

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비단열 모세관의 영향을 고려한 냉동 사이클 시뮬레이션 (Simulation of the effects of a non-adiabatic capillary tube on refrigeration cycle)

  • 박상구;손기동;정지환;김윤수
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2008년도 하계학술발표대회 논문집
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    • pp.255-262
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    • 2008
  • The simulation of refrigeration cycle is important since the experimental approach is too costly and time-consuming. The present simulation focuses on the effect of capillary tube-suction line heat exchangers (CT-SLHX), which are widely used in small vapor compression refrigeration systems. The simulation of steady states is based on fundamental conservation equations of mass and energy. These equations are solved simultaneously through iterative process. The non-adiabatic capillary tube model is based on homogeneous two-phase model. This model is used to understand the refrigerant flow behavior inside the non-adiabatic capillary tubes. The simulation results show that both of the location and length of heat exchange section influence the coefficient of performance (COP). These results can be used in either design calculation of capillary tube length for refrigeration cycle or effect of suction line heat exchanging on refrigeration cycle.

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마이크로스트립 선로에서 Sn-O 박막의 전도노이즈 흡수 특성 (Conduction Noise Absorption by Sn-O Thin Films on Microstrip Lines)

  • 김성수
    • 대한금속재료학회지
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    • 제49권4호
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    • pp.329-333
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    • 2011
  • To develop wide-band noise absorbers with a special design for low-frequency performance, this study proposes a tin oxide (Sn-O) thin films as the noise absorbing materials in a microstrip line. Sn-O thin films were deposited on polyimide film substrates by reactive sputtering of the Sn target under flowing $O_{2}$ gas, exhibiting a wide variation of surface resistance (in the range of $10^{0}-10^{5}{\Omega}$) depending on the oxygen partial pressure during deposition. The microstrip line with characteristic impedance of $50\Omega$ was used for the measurement of noise absorption by the Sn-O films. The reflection parameter $(S_{11})$ increased with a decrease of surface resistance due to an impedance mismatch at the boundary between the film and the microstrip line. Meanwhile, the transmission parameter $(S_{21})$ diminished with a decrease of surface resistance resulting from an Ohmic loss of the Sn-O films. The maximum noise absorption predicted at an optimum surface resistance of the Sn-O films was about $150{\Omega}$. For this film, greater power absorption is predicted in the lower frequency region (about 70% at 1 GHz) than in conventional magnetic sheets of high magnetic loss, indicating that Ohmic loss is the predominant loss parameter for the conduction noise absorption in the low frequency band.

나노 구조가 형성된 열전달 표면에서의 임계 열유속 증진 메커니즘 (Critical Heat Flux Enhancement Mechanism on a Surface with Nano-Structures)

  • 김동억
    • 대한기계학회논문집B
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    • 제38권7호
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    • pp.619-624
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    • 2014
  • 나노 구조가 형성된 열전달 표면에서 유체의 비등 시 임계 열유속 값이 나노 구조가 없는 표면보다 현저히 증가한다는 것은 잘 알려진 사실이다. 다수의 물리적 메커니즘들이 이러한 나노 구조에서의 임계 열유속 증진 현상을 설명하기 위해 제안되어 왔다. 하지만 지금까지 대부분의 연구들은 정성적인 결과를 제시해 왔으며, 이러한 현상을 일반적으로 설명할 수 있는 이론은 아직 확립되지 않았다. 본 연구에서는 나노 구조가 형성된 표면에서의 임계 열유속 증진에 관한 정량적인 메커니즘을 증기 반동력 및 표면 접착력에 기초하여 제안하고자 한다. 특히, 본 연구에서는 임계 열유속 증진 현상을 표면에 형성된 나노 구조로 인한 액체, 증기, 고체의 삼중선 길이의 증가 및 나노 구조와 액체 사이의 접착력에 근거하여 설명하였다.

대기 중 유기염소계 살충제의 가스-입자 분배 (Gas-particle Partitioning of Organochlorine Pesticides in Atmosphere)

  • 최민규;천만영
    • 한국대기환경학회지
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    • 제23권4호
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    • pp.457-465
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    • 2007
  • This study was performed to estimate the gas-particle partitioning of organochlorine pesticides (OCPs) in atmosphere, the samples were collected by PUF high volume air sampler for two years from June, 2000 to June, 2002. The gas phase fraction of ${\alpha/\gamma}-HCH$, heptachlor epoxide, ${\alpha/\gamma}-chlordane$ and trans-nonachlor was over 90%. But the gas phase fraction of ${\beta}-HCH$, p,p'-DDE, endosulfan sulfate, p,p'-DDD and p,p'-DDT was range of 20% through 80%, which means the gas phase fraction of OCPs components described above is sensitive to temperature. The correlation between the gas phase fraction and molecular weight of each OCPs component was not found in this research. The slope of regression line between gas-particle partitioning coefficient(${\log}K_p$) and subcooled liquid vapor(${\log}{P^o}_L$), gal-particle partitioning coefficient(${\log}K_p$) and octanol-air partitioning coefficient(${\log}K_{oa}$) which show -0.54 and 0.43 was not steep. So the equilibrium state between gas and particle was not reached and in this state the particulate fraction was low.