• Title/Summary/Keyword: Vapor growth

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Synthesis of TiO2 Nanowires by Metallorganic Chemical Vapor Deposition (유기금속 화학기상증착법을 이용한 TiO2 나노선 제조)

  • Heo, Hun-Hoe;Nguyen, Thi Quynh Hoa;Lim, Jae-Kyun;Kim, Gil-Moo;Kim, Eui-Tae
    • Korean Journal of Materials Research
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    • v.20 no.12
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    • pp.686-690
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    • 2010
  • $TiO_2$ nanowires were self-catalytically synthesized on bare Si(100) substrates using metallorganic chemical vapor deposition. The nanowire formation was critically affected by growth temperature. The $TiO_2$ nanowires were grown at a high density on Si(100) at $510^{\circ}C$, which is near the complete decomposition temperature ($527^{\circ}C$) of the Ti precursor $(Ti(O-iPr)_2(dpm)_2)$. At $470^{\circ}C$, only very thin (< $0.1{\mu}m$) $TiO_2$ film was formed because the Ti precursor was not completely decomposed. When growth temperature was increased to $550^{\circ}C$ and $670^{\circ}C$, the nanowire formation was also significantly suppressed. A vaporsolid (V-S) growth mechanism excluding a liquid phase appeared to control the nanowire formation. The $TiO_2$ nanowire growth seemed to be activated by carbon, which was supplied by decomposition of the Ti precursor. The $TiO_2$ nanowire density was increased with increased growth pressure in the range of 1.2 to 10 torr. In addition, the nanowire formation was enhanced by using Au and Pt catalysts, which seem to act as catalysts for oxidation. The nanowires consisted of well-aligned ~20-30 nm size rutile and anatase nanocrystallines. This MOCVD synthesis technique is unique and efficient to self-catalytically grow $TiO_2$ nanowires, which hold significant promise for various photocatalysis and solar cell applications.

Distance between source and substrate and growth mode control in GaN nanowires synthesis (Source와 기판 거리에 따른 GaN nanowires의 합성 mode 변화 제어)

  • Shin, T.I.;Lee, H.J.;Kang, S.M.;Yoon, D.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.18 no.1
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    • pp.10-14
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    • 2008
  • We synthesized GaN nanowires with high quality using the vapor phase epitaxy technique. The GaN nanowires were obtained at a temperature of $950^{\circ}C$. The Ar and $NH_3$ flow rates were 1000 sccm and 50 sccm, respectively. The shape of the GaN nanowires was confirmed through FESEM analysis. We were able to conclude that the GaN nanowires synthesized via vapor-solid (VLS) mechanism when the source was closed to the substrate. On the other side, the VS mechanism changed to vapor-liquid-solid (VLS) as the source and the substrate became more distant. Therefore, we can suggest that the large amount of Ga source from initial growth interrupt the role of catalyst on the substrate.

Essence of thermal convection for physical vapor transport of mercurous chloride in regions of high vapor pressures

  • Kim, Geug-Tae;Lee, Kyong-Hwan;Choi, Jeong-Gil
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.17 no.6
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    • pp.231-237
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    • 2007
  • For an aspect ratio (transport length-to-width) of 5, Pr=3.34, Le=0.078, Pe=4.16, Cv=1.01, $P_B=50$ Torr, only thermally buoyancy-driven convection ($Gr=4.83{\times}10^5$) is considered in this study in spite of the disparity in the molecular weights of the component A ($Hg_2Cl_2$) and B which would cause thermally and/or solutally buoyancy-driven convection. The crystal growth rate and the maximum velocity vector magnitude are decreased exponentially for $3{\le}Ar{\le}5$, for (1) adiabatic walls and (2) the linear temperature profile, with a fixed source temperature. This is related to the finding that the effects of side walls tend to stabilize convection in the growth reactor. The rate for the linear temperature profiles walls is slightly greater than for the adiabatic walls far varied temperature differences and aspect ratios. With the imposed thermal profile, a fixed source region, both the rate and the maximum velocity vector magnitude increase linearly with increasing the temperature difference for $10{\le}{\Delta}T{\le}50K$.

Growth of Nano- and Microstructured Indium Nitride Crystals by the Reaction of Indium Oxide with Ammonia

  • Jung, Woo-Sik;Ra, Choon-Sup;Min, Bong-Ki
    • Bulletin of the Korean Chemical Society
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    • v.26 no.9
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    • pp.1354-1358
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    • 2005
  • Nano- and microstructured indium nitride crystals were synthesized by the reaction of indium oxide ($In_2O_3$) powder and its pellet with ammonia in the temperature range 580-700 ${^{\circ}C}$. The degree of nitridation of $In_2O_3$ to InN was very sensitive to the nitridation temperature. The formation of zero- to three-dimensional structured InN crystals demonstrated that $In_2O_3$ is nitridated to InN via two dominant parallel routes (solid ($In_2O_3$)-to-solid (InN) and gas ($In_2O$)-to-solid (InN)). The growth of InN crystals with such various morphologies was explained by the vapor-solid (VS) mechanism where the degree of supersaturation of In vapor determines the growth morphology and the vapor was mainly by the reaction of $In_2O$ with ammonia and partially by sublimation of solid InN. The pellet method was proven to be useful to obtain homogeneous InN nanowires.

Effects of thermal boundary conditions and microgravity environments on physical vapor transport of $Hg_2Cl_2-Xe$ system

  • Kim, Geug-Tae;Kwon, Moo-Hyun;Lee, Kyong-Hwan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.4
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    • pp.172-183
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    • 2009
  • For the effects of the nonlinear temperature profiles and reduced-gravity conditions we conduct a two-dimensional numerical modeling and simulations on the physical vapor transport processes of $Hg_2Cl_2-Xe$ system in the horizontal orientation position. Our results reveal that: (1) A decrease in aspect ratio from 5 to 2 leads to an increasingly nonuniform interfacial distribution and enhances the growth rate by one-order magnitude for normal gravity and linear wall temperature conditions. (2) Increasing the molecular weight of component B, Xenon results in a reduction in the effect of solutal convection. (3) The effect of aspect ratio affects the interfacial growth rates significantly under normal gravity condition rather than under reduced gravitational environments. (4) The transition from the convection-dominated regime to the diffusion-dominated regime ranges arises near at 0.1g$_0$ for operation conditions under consideration in this study.

Graphene synthesis by chemical vapor deposition on Cu foil

  • Kim, Sung-Jin;Yoo, Kwon-Jae;Seo, E.K.;Boo, Doo-Wan;Hwang, Chan-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.351-351
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    • 2011
  • Graphene has drawn great interests because of its distinctive band structure and physical properties[1]. A few of the practical applications envisioned for graphene include semiconductor applications, optoelectronics (sola cell, touch screens, liquid crystal displays), and graphene based batteries/super-capacitors [2-3]. Recent work has shown that excellent electronic properties are exhibited by large-scale ultrathin graphite films, grown by chemical vapor deposition on a polycrystalline metal and transferred to a device-compatible surface[4]. In this paper, we focussed our scope for the understanding the graphene growth at different conditions, which enables to control the growth towards the application aimed. The graphene was grown using chemical vapor deposition (CVD) with methane and hydrogen gas in vacuum furnace system. The grown graphene was characterized using a scanning electron microscope(SEM) and Raman spectroscopy. We changed the growth temperature from 900 to $1050^{\circ}C$ with various gas flow rate and composition rate. The growth condition for larger domain will be discussed.

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GaN Thin Flims Grown by CVPE(Chloride Vapor Phase Epitaxy) Method (CVPE(Chloride Vapor Phase Epitaxy)법에 의한 GaN 박막성장 연구)

  • 오태효;박범진
    • Korean Journal of Crystallography
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    • v.8 no.2
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    • pp.81-88
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    • 1997
  • We investigated the CVPE grown of GaN thin films on (0001) sapphire using the $GaCl_3$ and $NH_3$ as source gases. The growth temperatures are ranged 970 to $1040^{\circ}C$ with the various flow rate ratio of source gases. The nitridation treatment was performed using the $NH_3$ gas before the GaN deposition. The optimal growth conditions were determined to be; growth temperature of $1040^{\circ}C$, III/V flow rate ratio of 2, nitridation time of 3 min. The FWHM at the (0002) peak from the XRD analysis was shown to be 0.32 deg. for the sample grown under those conditions. The growth rate was about $40{\mu}m/hr$ at $1040^{\circ}C$.

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Deposition properties of $Al_{2}O_{3}$ thin films by LP-MOCVD (LP-MOCVD로 제조한 알루미나 박막의 증착 특성)

  • 김종국;박병옥;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.3
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    • pp.309-317
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    • 1996
  • Al2O3 thin films were deposited on Si-wafer (100) using organo-aluminum compounds at low pressure by chemical vapor deposition (CVD) method. The vapor of the organo-metallic precursor was carried by pure N2 gas. The deposition rate increased and then saturated as Tsub increased with increasing the AIP flow rate. The main contamination didn't found in deposited films except carbon. The H-O(H2O) IR absorption band decreased in intensity as the deposition temperature increased, and completely disappeared through annealing.

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The Growth Kinetics of Tin Oxide Films from Tetramethyltin

  • 이상운;윤천호
    • Bulletin of the Korean Chemical Society
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    • v.20 no.9
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    • pp.1031-1034
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    • 1999
  • Tin oxide films have been grown employing the chemical vapor deposition technique under reduced pressure conditions using tetramethyltin as the precursor and oxygen as the oxidant. An activation energy derived for the deposition reaction under representative deposition conditions has a value of 89±3 kJ mol-1, suggesting a typical kinetic control. Deposition rates of tin oxide films exhibit a near first order dependence on tetramethyltin partial pressure and a zeroth order dependence on oxygen partial pressure. This study provides the first quantitative information about the growth kinetics of tin oxide films from tetramethyltin by the cold-wall low-pressure chemical vapor deposition.

Study on the growth of vapor bubble in devolatilization of polymers

  • Kim, Chongyoup
    • Korea-Australia Rheology Journal
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    • v.11 no.3
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    • pp.247-253
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    • 1999
  • The growth of a spherical vapor bubble contained in a large body of upper convected Maxwell fluid is theoretically analyzed under the devolatilization condition of polymer by using a Galerkin FEM in the Lagrangian frame. Using the finite element technique, a fully explicit numerical scheme is developed both for the calculation of pressure distribution and for the tracking of bubble surface. Oscillatory behavior in bubble radius is observed during growth and the oscillatory behavior is found to be due to the interaction of mass transfer resistance and elasticity. It is found that the elasticity of fluid accelerates the growth and removal of volatile component. It is also found that the bubble growth in the devolatilization of polymers is affected by both mass transfer resistance and viscoelasticity of fluids.

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