• 제목/요약/키워드: Vapor Fraction

검색결과 173건 처리시간 0.026초

Study on the Coupled Effects of Process Parameters on Silicon Growth Using Chemical Vapor Deposition

  • Ramadan, Zaher;Ko, Dong Kuk;Im, Ik-Tae
    • 반도체디스플레이기술학회지
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    • 제18권3호
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    • pp.115-121
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    • 2019
  • Response surface methodology (RSM) is used to investigate the complex coupling effects of different operating parameters on silicon growth rate in planetary CVD reactor. Based on the computational fluid dynamics (CFD) model, an accurate RSM model is obtained to predict the growth rate with different parameters, including temperature, pressure, rotation speed of the wafer, and the mole fraction of dichlorosilane (DCS). Analysis of variance is used to estimate the contributions of process parameters and their interactions. Among the four operating parameters that have been studied, the influences of susceptor temperature and the operating pressure were the most significant factors that affect silicon growth rate, followed by the mole fraction of DCS. The influence of wafer rotation is the least. The validation tests show that the results of silicon deposition rate obtained from the regression model are in good agreement with those from CFD model and the maximum deviations is 2.15%.

Two-Phase Flow Field Simulation of Horizontal Steam Generators

  • Rabiee, Ataollah;Kamalinia, Amir Hossein;Hadad, Kamal
    • Nuclear Engineering and Technology
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    • 제49권1호
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    • pp.92-102
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    • 2017
  • The analysis of steam generators as an interface between primary and secondary circuits in light water nuclear power plants is crucial in terms of safety and design issues. VVER-1000 nuclear power plants use horizontal steam generators which demand a detailed thermal hydraulics investigation in order to predict their behavior during normal and transient operational conditions. Two phase flow field simulation on adjacent tube bundles is important in obtaining logical numerical results. However, the complexity of the tube bundles, due to geometry and arrangement, makes it complicated. Employment of porous media is suggested to simplify numerical modeling. This study presents the use of porous media to simulate the tube bundles within a general-purpose computational fluid dynamics code. Solved governing equations are generalized phase continuity, momentum, and energy equations. Boundary conditions, as one of the main challenges in this numerical analysis, are optimized. The model has been verified and tuned by simple two-dimensional geometry. It is shown that the obtained vapor volume fraction near the cold and hot collectors predict the experimental results more accurately than in previous studies.

다단 원심펌프의 공동현상 유동해석 (Cavitating Flow Analysis of Multistage Centrifugal Pump)

  • 라키부자만;서상호;김형호;조민태;신병록
    • 한국유체기계학회 논문집
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    • 제18권1호
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    • pp.65-71
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    • 2015
  • The purpose of this study is to investigate cavitating flow of the multistage centrifugal pump. Cavitation is observed in the impeller leading edge and trailing edge of the suction area. Head coefficients are measured under different flow operating conditions. The Rayleigh-Plesset cavitation model is adapted to predict the occurrence of cavitation in the pump. The two-phase gas-liquid homogeneous CFD method is used to analyze the centrifugal pump performances with two equation transport turbulence model. The simulations are carried out with three different flow coefficients such as 0.103, 0.128 and 0.154. The occurrence of cavitation described according to water vapor volume fraction. The head versus NPSH (Net Positive Suction Head) also measured using different flow coefficients. Development of cavitation in the centrifugal pump impellerI is discussed. It is showed that the simulation represents the head drop about 3%.

Improvement of the MARS subcooled boiling model for a vertical upward flow

  • Ha, Tae-Wook;Jeong, Jae Jun;Yun, Byong-Jo
    • Nuclear Engineering and Technology
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    • 제51권4호
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    • pp.977-986
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    • 2019
  • In the thermal-hydraulic system codes, such as MARS and RELAP5/MOD3, the Savannah River Laboratory (SRL) model has been adopted as a subcooled boiling model. It, however, has been shown that the SRL model cannot take into account appropriately the effects of inlet liquid velocity and hydraulic diameter on axial void fraction development. To overcome the problems, Ha et al. (2018) proposed a modified SRL model, which is applicable to low-pressure and low-Pe conditions (P < 9.83 bar and $Pe{\leq}70,000$) only. In this work, the authors extended the modified SRL model by proposing a new net vapor generation (NVG) model and a wall evaporation model so that the new subcooled boiling model can cover a wide range of thermal-hydraulic conditions with pressures ranging from 1.1 to 69 bar, heat fluxes of $97-1186kW/m^2$, Pe of 3600 to 329,000, and hydraulic diameters of 5-25.5 mm. The new model was implemented in the MARS code and has been assessed using various subcooled boiling experimental data. The results of the new model showed better agreements with measured void fraction data, especially at low-pressure conditions.

Degradation analysis of horizontal steam generator tube bundles through crack growth due to two-phase flow induced vibration

  • Amir Hossein Kamalinia;Ataollah Rabiee
    • Nuclear Engineering and Technology
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    • 제55권12호
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    • pp.4561-4569
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    • 2023
  • A correct understanding of vibration-based degradation is crucial from the standpoint of maintenance for Steam Generators (SG) as crucial mechanical equipment in nuclear power plants. This study has established a novel approach to developing a model for investigating tube bundle degradation according to crack growth caused by two-phase Flow-Induced Vibration (FIV). An important step in the approach is to calculate the two-phase flow field parameters between the SG tube bundles in various zones using the porous media model to determine the velocity and vapor volume fraction. Afterward, to determine the vibration properties of the tube bundles, the Fluid-Solid Interaction (FSI) analysis is performed in eighteen thermal-hydraulic zones. Tube bundle degradation based on crack growth using the sixteen most probable initial cracks and within each SG thermal-hydraulic zone is performed to calculate useful lifetime. Large Eddy Simulation (LES) model, Paris law, and Wiener process model are considered to model the turbulent crossflow around the tube bundles, simulation of elliptical crack growth due to the vibration characteristics, and estimation of SG tube bundles degradation, respectively. The analysis shows that the tube deforms most noticeably in the zone with the highest velocity. As a result, cracks propagate more quickly in the tube with a higher height. In all simulations based on different initial crack sizes, it was observed that zone 16 experiences the greatest deformation and, subsequently, the fastest degradation, with a velocity and vapor volume fraction of 0.5 m/s and 0.4, respectively.

과냉수에서의 증기응축제트에 대한 해석적 연구 (An Analytical Study on the Condensation of Submerged Vapor Jets in Subcooled Liquids)

  • 김기웅;이계복;김환열
    • 에너지공학
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    • 제8권2호
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    • pp.333-340
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    • 1999
  • 과냉수에서의 난류 증기응축 제트에 대한 수치해석 연구가 수행되었다. 증기와 과냉수 사이에 국부 균질유동을 가정하고 난류 특성은 난류 확산화염에서 사용되는 $textsc{k}$-$\varepsilon$-g 모델을 사용하여 증기응축 유동 현상에 대한 물리적 모델을 제안하였다. 즉, 난류는 난류 운동 에너지와 운동 에너지 소멸률로 모사되고 증기와 과냉수의 혼합률비에 대한 평균값과 변동량에 대한 미분 방정식을 추가하여 직접 풀고 혼합률비에 확률분포 함수를 적용하여 열역학 변수의 평균값을 구한다. 증기 질량 유속, 과냉수 온도와 노즐 직경을 변화시키며 증기응축제트의 특성을 해석하였다. 본 해석에 사용된 모델을 평가하기 위해 기존의 실험 데이터를 사용해서 수치해석 결과와 실험치를 비교하여 만족할 만한 결과를 얻었다.

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플라즈마 아크 방전법에서 Fe 나노 분말 형성에 미치는 공정변수의 영향 (Effect of the Process Parameters on the Fe Nano Powder Formation in the Plasma Arc Discharge Process)

  • 이길근;김성규
    • 한국분말재료학회지
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    • 제10권1호
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    • pp.51-56
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    • 2003
  • To investigate the effect of the parameters of the plasma arc discharge process on the particle formation and particle characteristics of the iron nano powder, the chamber pressure, input current and the hydrogen volume fraction in the powder synthesis atmosphere were changed. The particle size and phase structure of the synthesized iron powder were studied using the FE-SEM, FE-TEM and XRD. The synthesized iron powder particle had a core-shell structure composed of the crystalline $\alpha$-Fe in the core and the crystalline $Fe_3O_4$ in the shell. The powder generation rate and particle size mainly depended on the hydrogen volume fraction in the powder synthesis atmosphere. The particle size increased simultaneously with increasing the hydrogen volume fraction from 10% to 50%, and it ranged from about 45nm to 130 nm.

수평 및 수직형 CVD 증착로의 실리콘 부착에 관한 수치해석 (Numerical Analysis of Silicon Deposition in Horizontal & Vertical CVD Reactor)

  • 김인;백병준
    • 대한기계학회논문집B
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    • 제26권3호
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    • pp.410-416
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    • 2002
  • The fluid flow, heat transfer and the local mass fraction of chemical species in the chemical vapor deposition(CVD) manufacturing process are studied numerically. Flow with a dilute precursor concentration of silane in hydrogen as the carrier gas enters to the reactor and deposits silicon onto the heated surface. The silicon deposition rate using silane is calculated in the horizontal or vertical, axisymmetric reactor. The effects of inlet carrier gas velocity, mass fraction of silane, susceptor angle and rotation of surface on the deposition rate are described.

The Effect of Non-condensable Gas on Direct Contact Condensation of Steam/Air Mixture

  • Lee, Hanchoon;Kim, Moohwan;Park, Suki
    • Nuclear Engineering and Technology
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    • 제33권6호
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    • pp.585-595
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    • 2001
  • A series of experiments have been carried out to investigate the effects of non-condensable gas on the direct contact film condensation of vapor mixture under an adiabatic wall condition. The average heat transfer coefficient of the direct contact condensation was obtained at the atmospheric pressure with four main parameters ; air-mass fraction, mixture velocity, film Reynolds number, and the degree of water film subcooling having an influence on the condensation heat transfer coefficient. With the analysis of 88 experiments, a correlation of the average Nusselt number for direct contact film condensation of steam/air mixture at an adiabatic vertical wall was proposed as functions of film Reynolds number, mixture Reynolds number, air mass fraction, and Jacob number. The average heat transfer coefficient for steam/air mixture condensation decreased significantly while air mass fraction increased. The average heat transfer coefficients also decreased as the Jacob number increased, and were scarcely affected by the film Reynolds number below a mixture Reynolds number of about 245,000.

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핀-튜브 열교환기에서 PVE오일이 증발/응축 열전달 성능에 미치는 영향 (The Effect of PVE Oil on the Evaporation/Condensation Heat Transfer Performance of Fin-tube Heat Exchanger)

  • 이현우;정영만;이재근;박내현
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2009년도 하계학술발표대회 논문집
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    • pp.1067-1072
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    • 2009
  • In vapor compression systems which use refrigerant as a working fluid, the oil is commonly used for compressor lubrication. Since the presence of lubrication oil can change the characteristics properties of refrigerant, the oil affects the heat transfer performance of heat exchanger to a large extent. In this paper, we focus on the effect of PVE oil experimentally on heat transfer performance of the fin-tube heat exchangers which use R410A as a refrigerant. To evaluate the heat transfer performance, the refrigerant to air type test facility chamber has been used. Fin-tube heat exchanger with grooved has been tested while according to the oil mass fraction variation from nearly zero to 1.7 wt%. It was found that the low level of oil mass fraction has an obvious effect on heat transfer performance, while the high level seems no significant influence. The influence of the oil mass fraction to heat transfer performance, however, is different between evaporation and condensation.

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