• Proceedings of the Korean Institute of Surface Engineering Conference
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.111-112
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• 2009

Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.

• Membrane Journal
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• 제16권1호
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• pp.25-30
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• 2006

The NaA zeolite membrane was synthesized on the surface of a porous ${\alpha}$-alumina support from the reaction solution composed of 1Si : 1Na : 4Na $6H_{2}O$. The pervaporation performance of the synthesized NaA zeolite membrane was investigated for the iso-propyl alcohol (IPA) aqueous solution according to the different feed concentration and the different operating temperature. The total flux decreases by increasing the feed IPA concentration and increases by increasing the temperature. The total flux was about $4.0{\times}10^3g/m^2\;hr\;at\;60^{\circ}C$ and 0.6 mole fraction of IPA and the separation factor was $1.8{\times}10^7\;at\;60^{\circ}C$ and 0.8 mole fraction of IPA. The separation performance of water through the NaA membrane was found to be superior to that obtainable with a distillation process just by comparison of the vapor-liquid equilibrium data.

• Transactions of the Korean Society of Mechanical Engineers
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• 제17권9호
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• pp.2339-2358
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• 1993

Since the rate and completeness of combustion in direct injection engines were controlled by the characteristics of gas flow fields and sprays, an understanding of those was essential to the design of the direct injection engines. In this study the numerical simulations of injection pressure effects on the characteristics of gas flow fields and sprays were preformed using the spray model that could predict the interactions between gas fields and spray droplets. The governing equations were discretized by the finite volume method and the modified k-.epsilon. model which included the compressibility effects due to the compression/expansion of piston was used. The results of the numerical calculation of the spray characteristics in the quiescent environment were compared with the experimental data. There were good agreements between the results of calculation and the experimental data, except in the early stages of the spray. In the motoring condition, the results showed that a substantial air entrainment into the spray volume was emerged and hence the squish motion was relatively unimportant during the fuel injection periods. It was found that as the injection pressure increased, the evaporation rate of droplets was decreased due to the narrow width of spray and the increased number of droplets impinged on the bottom of the piston bowl.

• Journal of Advanced Marine Engineering and Technology
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• 제18권5호
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• pp.12-23
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• 1994

The two-phase flow is observed in power plants, chemical process plants, and refrigeration systems etc., and it is very important to solve the heat transfer mechanism of a boiler, an automic reactor, a condenser and various types of evaporators. Recently, the problem of two phase heat transfer is braught up in many regions with development of energy saving technique. In flow boiling system it is necessary to store data in each condition because the heat transfer characteristics of flow boiling region vary by the change of flow pattern and the magnetude of heat flux to tube length, and be subtly affected by the flow and heating condition. So basic study for knowing flow pattern in heat transfer region and the relation between heat transfer characteristic and flow condition is desired to accumulate data in wide variety of liquid and flow system in the study of heat transfer of two phase flow. In this study R-113 was selected as working fluid whose properties were programmed by least square method, and experiment was conducted in the region of mass flow $1.628{\times}10^6$~$4.884{\times}10^6$/kg/$m^2$hr with inlet subcooling 10~3$0^{\circ}C$, sustaining test section inlet pressure to 1.5kg$_f$/$cm^2$abs.

• Proceedings of the Materials Research Society of Korea Conference
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.60-60
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• 2003

디자인 룰에 의해 Gate Length 가 100nm 이하로 줄어듦에 따라 Gate delay 감소와 Switch speed 향상을 위해 보다 더 큰 drive current 를 요구하게 되었다. 본 연구는 dirve current 를 증가시키기 위해 고안된 Strained Si substrate 를 만들기 위한 SiGe layer 성장에 관한 연구이다. SiGe layer를 성장시킬 때 SiH$_4$ gas와 GeH$_4$ gas를 furnace에 flow시켜 Chemical 반응에 의해 Si Substrate를 성장시키는 LPCVD(low pressure chemical vapor depositio)법을 사용하였고 SIMS와 nanospec을 이용하여 박막 두께 및 Ge concentration을 측정하였고, AFM으로 surface의 roughness를 측정하였다. 본 연구에서 우리는 10,20,30,40%의 Ge concentration을 갖는 10nm 이하의 SiGe layer를 얻기 위하여 l0nm 이하의 fixed 된 두께로 SiGe layer를 성장시킬 때 temperature, GeH$_4$ gas pre-flow, SiH$_4$ 와 GeH$_4$의 gas ratio를 변화시켜 성장시킨 후 Ge 의 concentration과 실제 형성된 두께를 측정하였고, SiGe의 mole fraction의 변화에 따른 surface의 roughness 를 측정하였다. 그 결과 10 nm의 두께에서 temperature, GeH$_4$ gas pre-flow, SiH$_4$ 와 GeH$_4$ 의 gas ratio의 변화와 Ge concentration 과의 의존성을 확인 할 수 있었고, SiGe 의 mole traction이 증가하였을 때 surfcace의 roughness 가 증가함을 알 수 있었다. 이 연구 결과는 strained Si 가 가지고 있는 strained Si 내에서 n-FET 와 P-FET사이의 불균형에 대한 해결과 좀 더 발전된 형태인 fully Depleted Strained Si 제작에 기여할 것으로 보인다.

• Journal of Advanced Marine Engineering and Technology
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• 제36권2호
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• pp.286-293
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• 2012

In this investigation, flow analysis with single phase has been performed for a centrifugal impeller with a design efficiency of 90%, head of 20m and rotational speed of 3500 rpm at a design flow rate of 16m3. The impeller was designed based on an empirical formula suggested by A.J. Stepanoff. In a case of the single phase analysis, the hydraulic efficiency and head is 88.8% and 19.4m, respectively, which showed a good agreement with the values designed. The flow analysis with two phases was carried out under the various NPSH, at whose 8.79m the cavitation on the suction side of the blade was observed. The required NPSH of the designed impeller is approximately 6.5m and above this value, the designed centrifugal pump impeller needs to be operated under inlet pressure condition.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• Economic and Environmental Geology
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• 제25권3호
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• pp.283-296
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• 1992

The Keumryeong deposits is a low grade copper deposits in which copper minerals form disseminated grains and thin veinlets in felsic volcanics seem to be dacite. Alteration of the volcanics consists mainly pervasive propylitization and silicification. Potassic alteration characterized by biotite developed locally adjacent to southwestern contact of granodiorite body. Principal sulfide minerals in altered zone are mainly pyrite and lesser chalcopyrite. Chalcopyrite content in potassic zone is relatively higher than that of surrounding propylitized zone. Pyrite and chalcopyrite accompanies magnetite, molybdenite, sphalerite, pyrrhotite, arsenopyrite, pentlandite, marcasite, hematite, ilmenite, rutile, bismuthinite and native Bi as disseminations, veinlets and knots. Granodiorite body is propylitized and contains veinlets of pyrite, chalcopyrite and molybdenite. Fluid inclusions in sulfide-bearing quartz veinlets and quartz grains of felsic volcanics and granodiorite in altered zone consist of liquid-rich, vapor-rich, $CO_2-bearing$ and halite-bearing inclusions. These four types of inclusion intimately associated on a microscopic scale and indicate condensing or boiling of ore fluid during mineralization. Homogenization temperature of coexisting fluid inclusions are mostly in the range of 350 to $450^{\circ}C$. High salinity fluid contains 28.6 to 48.4 weight percent NaCI equivalent and moderate salinity fluid cotains 0.5 to 12.5 weight percent NaCl equivalent. Pressure estimated from $CO_2$ mole fraction of $CO_2-bearing$ inclusion range 160 to 375 bars. The Kigu copper deposits is a fissure filling copper vein developed 500 m south from the Keumryong deposits. Mineralogy and fluid inclusion data of the Kigu deposits are similar to that of the Keumryeong deposits. Homogenization temperature of fluid inclusions from the Kigu deposits are reasonable agreement with temperature estimated from sulfidation curve of cubanite-chalcopyrite-pyrite-pyrrhotite and pyrite-pyrrhotite mineral assemblages. Not only mineral occurrence and wall rock alteration in the Keumryeong deposits but also fluid inclusion data such as temperature, salinity, pressure and boiling evidences are similar to those of porphyry copper deposits.

• Korean Journal of Food Science and Technology
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• 제27권6호
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• pp.921-927
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• 1995

Peach pulp was separated into serum and insoluble pulp by centrifugation at 11,000 rpm for 10 min. The serum portion was concentrated at $50{\sim}55^{\circ}C$ and $30{\sim}50\;mmHg$ with aroma recovery. Vapor generated at the early stage of vacuum evaporation was condensed and taken as aroma fractions: AR-1($0{\sim}5%$), AR-2($5{\sim}10$), AR-3($10{\sim}15%$), AR-4($15{\sim}20%$). Dynamic headspace concentration method was used to trap volatile compounds in aroma fractions and identification of aroma compounds was made by GC/MS. The yield of serum separated from peach pulp was 70.5% and the serum fraction contained the most of aroma compounds. Thirty-one aroma compounds, including ethylene, benzaldehyde, l-limonene and ${\gamma}-dodecalactone$ were identified. The efficiency of aroma recovery was reduced, as the recovery time was extended, as indicated by less peak numbers and peach areas of aroma fractions.

• Korean Journal of Food Science and Technology
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• 제31권2호
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• pp.342-347
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• 1999

Kiwifruit pulp was separated into insoluble pulp and serum by centrifugation at 14,000 rpm for 10 min. The serum portion was concentrated at $30{\sim}50mmHg\;and\;50{\sim}55^{\circ}C$ with aroma recovery. Vapor generated at the early stage of vacuum evaporation was condensed and taken as aroma fractions: $E-I\;(0{\sim}10%),\;E-II,\;(10{\sim}20%)$. The volatile flavor compounds in kiwifruit pulp were collected by dynamic headspace technique and analyzed by GC and GC/MSD. The yield of serum separated from kiwifruit pulp was 70.1% and insoluble pulp fraction contained aroma compounds more than that of the serum. Twenty-six aroma compounds, including (E)-2-hexanal and ethyl butanoate were detected. The efficiency of the aroma recovery was reduced as the recovery time was extended, as indicated by the less peak numbers and kiwifruit areas of aroma fractions.