• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1763-1765
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• 2000

This paper presents deposition and characterizations of microcrystalline silicon ($\mu$ c-Si:H) films prepared by hot wire chemical vapor deposition at substrate temperature at 300$^{\circ}C$. The flow rates of $SiH_4$ gas are critical parameter for the formation of Si films with microcrystalline phase. We could obtain $\mu$ c-Si:H with columnar grain structure and volume fraction of 75% without H2 dilution. The electronic properties, hydrogen bonding configurations, and $H_2$ concentration inside the films are also strongly affected by $SiH_4$ flow rate, which is provided in this paper.

• Corrosion Science and Technology
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• v.6 no.1
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• pp.18-23
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• 2007

DLC coatings have been deposited onto substrate of STS 316L and Ti alloy using r.f. PACVD (plasma-assisted chemical vapor deposition) with a mixture of $C_{6}H_{6}$ and $SiH_{4}$ as the process gases. Corrosion performance of DLC coatings was investigated by electrochemical techniques (potentiodynamic polarization test and electrochemical impedance spectroscopy) and surface analysis (scanning electron microscopy). The electrolyte used in this test was a 0.89% NaCl solution of pH 7.4 at temperature $37^{\circ}C$. The porosity and protective efficiency of DLC coatings were obtained using potentiodynamic polarization test. Moreover, the delamination area and volume fraction of water uptake of DLC coatings as a function of immersion time were calculated using electrochemical impedance spectroscopy. This study provides the reliable and quantitative data for assessment of the effect of substrate on corrosion performance of Si-DLC coatings. The results showed that Si-DLC coating on Ti alloy could improve corrosion resistance more than that on STS 316L in the simulated body fluid environment. This could be attributed to the formation of a dense and low-porosity coating, which impedes the penetration of water and ions.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.41-46
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• 2016

In this study, gas flow and temperature distribution in the multi-wafer planetary CVD reactor for the Si epitaxial growth were analyzed. Although the structure of the reactor was simplified as the first step of the study, the three-dimensional analysis was performed taking all these considerations of the revolution of the susceptor and the rotation of satellites into account. From the analyses, a reasonable velocity field and temperature field were obtained. However, it was found that analyses including the upper structure of the reactor were required in order to obtain more realistic temperature results. DCS mole fraction above the satellite surface and the susceptor surface without satellite was compared in order to check the gas species mixing. We found that satellite rotation helped gases to mix in the reactor.

• Transactions of the Korean hydrogen and new energy society
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• v.30 no.6
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• pp.585-592
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• 2019

In this study, a flashing boiling phenomenon of pressurized water jet was numerically studied and validated against an experimental data in the literatures. The volume of fluid (VOF) technique was used to consider two-phase behavior of water, while the homogeneous relaxation model (HRM) model was used to provide the velocity of phase change. During the flashing boiling through a nozzle, a mach disk was observed near nozzle exit because of pressure drop resulting from two-phase under-expansion. The flashing jet structure, local distributions of temperature/vapor volume fraction/velocity, and position of the mach disk were examined as nozzle inlet temperature changed.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.12 no.3
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• pp.258-266
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• 2000

Experimental investigation and cycle simulation of a capacity modulation of a heat pump system using a hydrofluorocarbon (HFC) refrigerant mixture, R32/134a as an alternative to R22, have been done. In the cycle simulation, the refrigeration system was operated by assigning the temperatures of the external heat transfer fluids with the heat exchangers generalized by an average effective temperature difference. Heating capacity, cooling capacity, and coefficient of performance (COP) of the system were investigated at several operating conditions. Experimental apparatus which had a refrigeration part and a composition changing part was built, and the performance of the heat pump system filled with R32/134a mixture was investigated. A gas-liquid separator was used in the experiment to change the composition by collecting the vapor and the liquid Phase separately, The mass fraction of the charged refrigerant in the heat pump system was 40/60 and 70/30 by weight percentage. The composition of the refrigerant with initial composition of 40/60 varied from 29/71 to 41/59 in the refrigeration cycle. For the refrigerant with initial composition of 70/30, the composition varied from 65/35 to 75/25.

• Current Photovoltaic Research
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• v.7 no.1
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• pp.15-20
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• 2019

Most high-efficiency n-type silicon solar cells are based on the high quality surface passivation and ohmic contact between the emitter and the metal. Currently, various metalization methods such as screen printing using metal paste and physical vapor deposition are being used in forming electrodes of n-type silicon solar cell. In this paper, we analyzed the degradation factors induced by the front electrode formation process using e-beam evaporation of double passivation structure of p-type emitter and $Al_2O_3/SiN_x$ for high efficiency solar cell using n-type bulk silicon. In order to confirm the cause of the degradation, the passivation characteristics of each electrode region were determined through a quasi-steady-state photo-conductance (QSSPC).

• Journal of the Korean institute of surface engineering
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• v.54 no.3
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• pp.124-132
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• 2021

Graphene which grown on the cobalt or nickel sputtered copper foil depending on the annealing time was studied. Graphene on the copper foil grown by chemical vapor deposition was compared to those on cobalt or nickel sputtered copper foil by using a RF (Radio Frequency) magnetron sputtering at room temperature. FLG(few-layer graphene) was identified independent of substrates by Raman and X-Ray Photoelectron Spectroscopy analyses. On copper foil, size and area fraction of the graphene growth increased until 30 minutes annealing and then didn't changed. Comparing to that, graphene on the cobalt refined till 50 minutes annealing, after then the effect disappeared which means a similar shape to that on copper foil. On nickel the graphene refined irrespective of annealing time that is possibly because of the complete solid solution of nickel with copper.

• Korean Journal of Materials Research
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• v.31 no.7
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• pp.403-408
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• 2021

Various surface colors are predicted and implemented using the interference color generated by controlling the thickness of nano-level diamond like carbon (DLC) thin film. Samples having thicknesses of up to 385 nm and various interference colors are prepared using a single crystal silicon (100) substrate with changing processing times at low temperature by plasma-enhanced chemical vapor deposition. The thickness, surface roughness, color, phases, and anti-scratch performance under each condition are analyzed using a scanning electron microscope, colorimeter, micro-Raman device, and scratch tester. Coating with the same uniformity as the surface roughness of the substrate is possible over the entire experimental thickness range, and more than five different colors are implemented at this time. The color matched with the color predicted by the model, assuming only the reflection mode of the thin film. All the DLC thin films show constant D/G peak fraction without significant change, and have anti-scratch values of about 19 N. The results indicate the possibility that nano-level DLC thin films with various interference colors can be applied to exterior materials of actual mobile devices.

• International Journal of Naval Architecture and Ocean Engineering
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• v.13 no.1
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• pp.794-803
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• 2021

The instantaneous acceleration affects the performance of the water-jet pump obviously. Here, based on the user-defined function, the method to simulate the inner flow in water-jet pumps under acceleration conditions was established. The effects of two different acceleration modes (linear acceleration and exponential acceleration) and three kinds of different acceleration time (0.5s, 1s and 2s) on the performance of the water-jet pump were analyzed. The results show that the thrust and the pressure pulsation under exponential acceleration are lower than that under linear acceleration at the same time; the vapor volume fraction in the impeller under linear acceleration is 27.3% higher than that under exponential acceleration. As the acceleration time increases, the thrust gradually increases and the pressure pulsation amplitude at the impeller inlet and outlet gradually decreases, while the law of pressure pulsation is the opposite at the diffuser outlet. The main frequency of pressure pulsation at the impeller outlet is different under different acceleration time. The research results can provide some reference for the optimal design of water-jet pumps.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.1
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• pp.9-18
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• 2013

Two-phase vapor-liquid flows exist in many shell and tube heat exchangers such as condensers, evaporators, and nuclear steam generators. To understand the fluid dynamic forces acting on a structure subjected to a two-phase flow, it is essential to obtain detailed information about the characteristics of a two-phase flow. The characteristics of a two-phase flow and the flow parameters were introduced, and then, an experiment was performed to evaluate the pressure loss in the tube bundles and the fluid-dynamic force acting on the cylinder owing to the pressure distribution. A two-phase flow was pre-mixed at the entrance of the test section, and the experiments were undertaken using a normal triangular array of cylinders subjected to a two-phase cross-flow. The pressure loss along the flow direction in the tube bundles was measured to calculate the two-phase friction multiplier, and the multiplier was compared with the analytical value. Furthermore, the circular distributions of the pressure on the cylinders were measured. Based on the distribution and the fundamental theory of two-phase flow, the effects of the void fraction and mass flux per unit area on the pressure coefficient and the drag coefficient were evaluated. The drag coefficient was calculated by integrating the measured pressure on the tube by a numerical method. It was found that for low mass fluxes, the measured two-phase friction multipliers agree well with the analytical results, and good agreement for the effect of the void fraction on the drag coefficients, as calculated by the measured pressure distributions, is shown qualitatively, as compared to the existing experimental results.