Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Graphene Growth on the Cobalt and Nickel Sputtered Cu foil Depending on the Annealing Time

코발트와 니켈이 스퍼터링된 구리 포일에서 어닐링 시간에 따른 그래핀 성장

  • Oh, Ye-Chan (School of Energy, Materials & Chemical Engineering Korea University of Technology and Education) ;
  • Lee, Woo-Jin (School of Energy, Materials & Chemical Engineering Korea University of Technology and Education) ;
  • Kim, Sang-Ho (School of Energy, Materials & Chemical Engineering Korea University of Technology and Education)
  • 오예찬 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 이우진 (한국기술교육대학교 에너지신소재화학공학부) ;
  • 김상호 (한국기술교육대학교 에너지신소재화학공학부)
  • Received : 2021.05.26
  • Accepted : 2021.06.27
  • Published : 2021.06.30
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Abstract

Graphene which grown on the cobalt or nickel sputtered copper foil depending on the annealing time was studied. Graphene on the copper foil grown by chemical vapor deposition was compared to those on cobalt or nickel sputtered copper foil by using a RF (Radio Frequency) magnetron sputtering at room temperature. FLG(few-layer graphene) was identified independent of substrates by Raman and X-Ray Photoelectron Spectroscopy analyses. On copper foil, size and area fraction of the graphene growth increased until 30 minutes annealing and then didn't changed. Comparing to that, graphene on the cobalt refined till 50 minutes annealing, after then the effect disappeared which means a similar shape to that on copper foil. On nickel the graphene refined irrespective of annealing time that is possibly because of the complete solid solution of nickel with copper.

Keywords

Acknowledgement

이 논문은 2021년 한국기술교육대학교 교육연구진흥과제 및 산학협력단 공용장비센터의 지원으로 연구되었음.

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