• 제목/요약/키워드: Vacuum chamber

검색결과 648건 처리시간 0.024초

포항가속기 저장링 진공 Chamber 용접 (UHV Welding for The PLS Vacuum Chambers)

  • 최만호;정상수;김효윤;김명진;이해철;한영진;최우천
    • 한국진공학회지
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    • 제2권3호
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    • pp.275-281
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    • 1993
  • 본 논문은 포항가속기에서 건설 중인 진공 chamger의 용접에 관한 것이다. 저장링에 전자빔을 5시간 이상 저장하기 위하여 10-10torr 이하로 진공도를 유지하도록 설계되어 있기 때문에 초고진공에 적합한 TIG 용접(tungsten inert gas welding)을 하였다. 진공 chamber는 Al 5083-H321이며 flange의 재질은 Al 2219-T852이다. Sector chamber I, II의 총 용접 길이는 각각 27m, 37m이며 진공에 유해한 균열과 virtual leak가 생기지 않도록 하는 용접조건 등을 선정하였다.

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A Study of the Transient Flow Characteristics of a Vacuum Ejector-Diffuser System.

  • ;김희동
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2769-2774
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    • 2007
  • In vacuum ejector-diffuser systems where a finite volume secondary chamber is used, the secondary jet exhibits transient characteristics during start-up. A steady state is achieved after some time in which mass entrainment prevails indefinitely inside the ejector, though there is no flow from the secondary chamber. An attempt is made in this work to study the infinite entrainment of secondary jet into the primary jet from a finite secondary chamber, with the help of a computational fluid dynamics method. The present study is also intended to identify the operating range of vacuum ejector-diffuser systems where the steady flow assumption can be applied without uncertainty. The results obtained show that the only condition in which an infinite mass entrainment is possible is the generation of a re-circulation zone near the primary nozzle exit. The flow in the secondary chamber attains a state of dynamic equilibrium at this point. Steady flow assumption is valid only after this point.

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전자빔 용접기 진공 작업실의 구조설계 (Structural Design on the Vacuum Chamber of Electron Beam Welding System)

  • 이영신;류충현;서정;한유희
    • 한국레이저가공학회지
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    • 제1권1호
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    • pp.11-17
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    • 1998
  • The electron beam welding system has the advantages of the high power density, narrow welding section, and small thermal distortion of a workpiece. Recently, the electron beam welding system is widely used to the airplane engineering, nuclear power plant, and automobile industry. In the present paper, the structural analyses on the vacuum chamber of the electron beam welding system are performed by the F.E.M. analysis. The stiffening characteristics on the geometric shape, stiffener height and stiffener span are investigated. The deflection of the stiffened vacuum chamber under pressure is minimized by longitudinal and transverse stiffeners which are continuous in both direction.

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KSTAR 중성빔 입사(NBI) 장치 배기계통 설계 (Design of the vacuum pumping system for the KSTAR NBI device)

  • 오병훈;인상렬;조용섭;김계령;최병호
    • 한국진공학회지
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    • 제8권4B호
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    • pp.548-555
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    • 1999
  • The NBI (Neutral BGeam Injection) System for the Korea Superconducting Tokamak Advanced Research (KSTAR) is composed of ion sources, neutralizers, bending magnets, ion dumps, and calorimeter. The vacuum chamber, in which all of the beam line components are enclosed, is composed of differential pumping system for the effective transfer of the neutral beams. The needed pumping speeds of each of the divided vacuum chamber and the optimized gas flow rate ot the neutralizer were calculated with the help of the particle balance equations. The minimum gas flow rate to the ion sources for producing needed beam current (120kV, 65A, 78MW), the pressure distributions in the vacuum chamber for minimizing re-ionization loss, and the beam loss rate on the beam line components were used as the input in the calculation. Also the scenario for short pulse operation was determined by analysing the time dependent equations. It showed that beam extraction during less than 0.5 sec could be made only with TMP.

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Experimental Verification of Transverse Electric Mode Controlled Vacuum Chamber of PLS-II Storage Ring

  • 주영도;하태균
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.229-229
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    • 2012
  • It is significant issue to control the unwanted transverse electric (TE) modes in the vacuum chamber for preventing the position reading noise from the beam position monitor (BPM) of storage ring. We introduce shunt structure to control the frequency distribution of TE resonance modes excited in the vacuum chambers of the Pohang Light Source II (PLS-II). The design of shunt structure is performed using the full three dimensional finite-difference time-domain (FDTD) simulation. It is verified that the sympton of the BPM noise is not oberved up to the beam current of 190 mA in the commmissioning of PLS-II.

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TFT LCD 제조용 대면적 Magnetron Sputtering 장치 설계와 Al 성장막 특성 조사 (Design of a Large Magnetron Sputtering System for TFT LCD and Investigation of Sputtered AI Film Properties)

  • 유운종
    • 한국진공학회지
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    • 제2권4호
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    • pp.480-485
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    • 1993
  • Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.

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광학기구기법을 이용한 가속기 진공챔버의 변형관측 (Deformation Measurement of Accelerator Vacuum Chamber Using Optical Tooling Technique)

  • 김병국
    • 대한토목학회논문집
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    • 제12권3호
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    • pp.181-194
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    • 1992
  • 광학기구기법을 이용하여, 포항방사광가속기(浦項放射光加速器) 본체(本體)의 일부인 진공챔버의 시제품 상하판(上下板)의 용접에 의한 변형과 초고진공(超高眞空)을 위한 Baking에 의한 변형을 관측(觀測)하였다. 이 변형의 관측(觀測)은 진공챔버 본 제품의 설계와 주변 설치물과의 간섭상태 파악 및 상대적 위치 관계를 정립하는데 기본자료를 제공함을 그 목적으로 하였다. 챔버의 변형관측(觀測)을 성공적으로 수행함으로써, 광화기구기법은 기계적(機械的) 정밀관측(觀測)의 대체안(代替案)으로서 그 효용성이 입증되었다.

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진공용 공기베어링 배기시스템의 최적설계 (Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing)

  • 김경호;박천홍;이후상;김승우
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.86-95
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    • 2007
  • This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

액체로켓엔진 연소기를 이용한 고고도 환경 모사용 디퓨저 시동특성 연구 (An Experimental Study of a Diffuser Starting Characteristics for Simulating High-Altitude Environment by using a Liquid Rocket)

  • 이양석;전준수;고영성;김유;김선진
    • 한국항공우주학회지
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    • 제38권12호
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    • pp.1195-1201
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    • 2010
  • 본 연구에서는 액체 로켓 엔진의 고온 연소 가스를 이용하여 축소형 고고도 환경 모사용 초음속 디퓨저 성능 실험을 수행하였다. 실험 장치는 연소실, 진공 챔버, 디퓨저로 구성되어 있다. 고고도 환경 모사 시험은 연소실 압력이 약 26, 29, 32barg 세 조건으로 수행하였고, 세가지 조건에서 모두 디퓨저는 성공적으로 시동되었으며 진공 챔버 압력이 약 140torr로 형성하였다. 이전의 상온 고압 가스를 이용한 디퓨저의 시동 특성과 비교하였을 때 시동 압력과 압력 분포 등의 시동 특성의 경향성은 유사하였으나, 고온 환경으로 인하여 진공 챔버에 형성되는 압력은 2배 정도 높은 것을 확인하였다. 본 연구 결과는 향후 실물형 고고도 환경 모사 시험 설비를 구축하는데 기초 자료로 활용될 수 있을 것으로 판단된다.

가속기 저장링 삽입장치 진공 챔버의 용접 (The welding Characteristics of the Insertion Device Vacuum Chamber of PLS Storage Ring)

  • 최만호;한영진;김창균;정진화;권영각
    • Journal of Welding and Joining
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    • 제17권4호
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    • pp.32-38
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    • 1999
  • PAL(Pohang Accelerator Laboratory) designed and manufactured a 5m-long straight vacuum chamber to adopt U7 undulator that is the first insertion device. Top and bottom plates of the vacuum chamber were made of Al alloy A5083-H321, and welded together by the GTAW welding. The leak rate is less than 1×{TEX}$10^{-10}${/TEX} torr·ℓ/s with negligible welding deformation. The pressure has been maintained below {TEX}$10^{-10}${/TEX} torr after installation. This paper reports the welding process and the method applied to achieve ultimate vacuum performance and t satisfy integrity of welds.

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