• 진공이야기
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• 제4권1호
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• pp.12-15
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• 2017

The Pohang Accelerator Laboratory X-ray Free Electron Laser (PAL-XFEL) is a 0.1 nm hard X-ray FEL which aims at providing photon flux higher than $1{\times}10^{12}$ photons/pulse using a 10-GeV electron linac. The vacuum system of the machine consists of an injector section including an S-band photocathode RF gun, 10-GeV electron linac section based on S-band normal conducting accelerating structures and a 150-m long out-vacuum undulator system. We introduce the present status of PAL-XFEL vacuum systems.

• 한국진공학회지
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• 제9권1호
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• International journal of advanced smart convergence
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• 제7권4호
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• pp.84-91
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• 2018

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

• 한국정밀공학회지
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• 제14권4호
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• pp.15-21
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• 1997

Pneumatics is widly used in the industrial implementation, in the operation of air-powered actuators and the control devices needed in their operation. However, there are many empirical factors in pneumatics design, it might cause excessive design of pneumatic components. For that reason, we developed VDES(Vacuum Design Expert System) for the economic design of pneumatic vacuum equipment. VDES is achieved with CLIPS(C Language Integrated Production System) and knowledge base that contains a number of facts and rules for pneumatic vacuum design. Forward chaining and depth first search technique are used in this system. Appling VDES to the actual field, this system is verified to be a good efficiency and could be applied to the field of pneumatic vacuum equipment design.

• 한국진공학회지
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• 제15권6호
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• pp.605-611
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• 2006

정적법(constant volume method)을 이용하여 $1Pa\sim100kPa$ 영역에서 진공게이지의 직접교정 (direct calibration) 장치를 개발하였다. 이 장치는 피 교정 게이지의 이동 없이 in-situ 상태에서 비교교정(comparison calibration)도 가능하다. 이 장치가 개발됨으로서 산업체 교정기관의 생산성을 높이고 개발도상국에 국가 진공표준과 교정기술을 보급할 수 있게 되었다.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2001년도 추계학술대회 논문집(Proceeding of the KOSME 2001 Autumn Annual Meeting)
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• pp.45-49
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• 2001

To maintain the freshness of produce, because of stand away between produced and consumer, we need refrigeration system that can supply to consumer at cold chain as soon as gathering. General refrigeration system consist of refrigeration chamber or low temperature store. But the vacuum technology can rapidly refrigeration without refrigerator. This precool system possible to get low precooled temperature, suitable for the fishes, the meat, the vegetables, the fruit etc. Especially get advantage that quality maintain through rapid refrigeration of ferment directly generate heat. Vacuum precool system's principle is that water saturated temperature reduce according to pressure is get to vacuum area, so product temperature reduce as water evaporation at product. In vacuum suction, unit, on early experiment period run the rotary type vacuum pump at purpose pressure, then maintain pressure by water-diven ejector. As the results, cabbage took about 60 minutes to reach from $23.2^{\circ}C$ to $4.5^{\circ}C$at 5mgHg abs.

• 한국진공학회지
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• 제12권4호
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• pp.207-213
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• 2003

중진공 국가표준기의 자동화를 위한 하드웨어 및 측정 프로그램 개발에 관한 연구를 수행하였다. 이 장치는 부피가 서로 다른 여러 개의 진공용기, 배기장치, 진공게이지, 온도계, 그리고 밸브 등 많은 부품들로 구성되어 있을 뿐만 아니라 복잡한 측정방법 때문에 자동화가 꼭 필요하다. 개발한 자동화 장치의 성능 평가를 위하여 진공용기의 부피율을 측정하고 용량형 격막식 진공게이지를 교정해 보았다.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.88-95
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• 2022

Vacuum simulation is associated with the prediction and calculation of how materials, pumps and systems will perform using mathematical equations. In this investigation, three different high vacuum systems were simulated and estimated with each vacuum characteristics by VacTran simulator. In each of modelled vacuum systems, selection of gas loads into vessel, combination of rough and high vacuum pumps and dimension of conductance elements were proposed as system variables. In pump station model, the pumping speed to pressures by the combination of root pump was analyzed under the variations of vessel volume. In this study, the effects of outgassing dependent on vessel materials was also simulated and aluminum vessel was estimated to optimum materials. It was obtained from the modelling with diffusion pump that the diameter, length of 50×250[mm]roughing line was characterized as optimum variables to reach the ultimate pressure of 10E-7[torr]. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacTran simulator. Feasibility of VacTran as vacuum simulator was verified and applications of VacTran in high tech process expected to be increased.

• 동력기계공학회지
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• 제13권6호
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• pp.110-116
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• 2009

In the present study, we proposed a simulation model of vacuum booster with AMESIM software to predict the output characteristic. And we performed the sensitivity analysis of output characteristic with main design parameters, such as diaphragm diameter. All of these parameters are main design parameters in the procedure of vacuum booster design. The simulation results of this paper offer qualitative information of vacuum booster output. Therefore, the simulation results of this paper will be used effectively for the design procedure of vacuum booster in the industrial field.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 D
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• pp.2652-2654
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• 2005

A vacuum chamber temperature control system of Pohang Accelerator Laboratory (PAL) storage ring is a subsystem upgraded PAL control system, which is based upon Experimental Physics and Industrial Control System (EPICS) [1]. There are two control components, data acquisition system (SA120 data logger), development control system IOC (Input/Output Controller) at the storage ring of PAL. There are 240 vacuum chamber at the storage ring. It was a very important problem to solve how to monitor such a large number of vacuum chamber temperature distributed around the ring. The IOC connect MODBUS/JBUS field network to asynchronous serial ports for communication with serial device. It can simultaneously control up to 4 data acquisition systems. Upon receiving a command from a IOC running under Windows2k through the network, the IOC communicate through the slave serial interface ports to SA120. We added some software components on the top of EPICS toolkit. The design of the vacuum control system is discussed. This paper describes the development vacuum chamber temperature control system and how the design of this system.