• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.2
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• pp.137-142
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• 2001

A throttle/brake control law for the intelligent cruise control(ICC) systems has been proposed in this paper. The ICC system consists of a vehicle detection sensor, the control algorithm and a throttle/brake actuators. The control performance has been investigated through vehicle tests. The test vehicle is equipped with a MMW radar sensor, a solenoid-valve-controlled Electronic-Vacuum-Booster(EVB) and a step-motor controlled throttle actuator. The results indicate the proposed throttle/brake control laws can provide satisfactory vehicle-to-vehicle distance and velocity control performance.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.87-87
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• 2013

The interface between nanomaterials and biosystems is emerging as one of the broadest and most dynamic areas of science and technology, bringing together biology, chemistry, physics and many areas of engineering, biomedicine. The combination of these diverse areas of research promised to yield revolutionary advances in healthcare, medicine, and life science. For example, the creation of new and powerful nanosensors that enable direct, sensitive, and rapid analysis of biological and chemical species can advance the diagnosis and treatment of disease, discovery and screening of new drug molecules. Nanowire based sensors are emerging as a powerful and general platform for ultrasensitive and multiplex detection of biological and chemical species. Here, we present the studies about noble metal nanowire sensors that can be used for sensitive detection of a wide-range of biological and chemical species including nucleic acids, proteins, and toxic metal ions. Moreover, the optical and electrochemical applications of noble metal nanowires are introduced. Noble metal nanowires are successfully used as plasmonic antennas and nanoelectrodes, thereby provide a pathway for a single molecule sensor, in vivo neural recording, and molecular injection and detection in a single living cell.

• Proceedings of the Korean Vacuum Society Conference
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• 2008.02a
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• pp.117-117
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2003.08a
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• pp.109-109
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.819-820
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.24 no.10
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• pp.83-90
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• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.354.2-354.2
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• 2016

Mycosporine-like amino acids (MAAs) are small secondary metabolites produced by organisms that live in environments with high volumes of sunlight, is an important group of novel bioactive compounds having immense biotechnological poten-tials due to their UV screening properties and Polypyrrole (PPy) is a type of organic polymer formed by polymerization of pyrrole. A novel composite nanofilm (~60 nm) of mycosporine-like amino acid (MAA) and polypyrrole is synthesized by interfacial polymerization technique. This composite nanofilm is conductive and has strong photoresponse. A photoelectric UV sensor is fabricated by depositing the composite film onto a silicon chip. This UV sensor shows good sensitivity, selectivity and stability for UV detection.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.128-128
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• 1999

산소이온 전도체로 잘 알려진 Yttira-Stabilizd Ziroconia(TSZ)는 연료전지, oxygen pumps, chemical gas sensor 등 다양한 electrochemical divices에 이용되는 고체 전해질의 하나이다. 특히 YSZ는 oxygen 및 oxygen과 평형상태에 있는 gas들을 검출하는 sensor의 electrolyte로서 가장 많이 쓰이고 있다. 현재 상용화되어 있는 YSZ Sensor는 전통적인 bulk 형태의 ceramic으로 제작된 것으로 충분한 ionic conductivity를 얻기 위해서는 $600^{\circ}C$이상의 operating temperature를 필요로 하나 YSZ를 박막으로 제조시 낮은 operating temperature를 뿐만 아니라 sensor의 소형화, 낮은 ohmic loss 및 다양한 응용이 가능한 장점을 가질 수 있다. 본 실험에서는 산소 이온 전도체로서 8mol%-YSZ 고체전해질을 RF-magnetron bias sputtering 법을 이용하여 증착하였다. 제조된 YSZ 박막을 이용한 산소감응 센서셀 구조는 SiO2/Ni-NiO/Pt/YSZ/Pt-기판이다. 센서셀의 정상상태에서의 기전력(electromotive force ; EMF)을 산소분압(Po:1.013$\times$103Ta ~1.013$\times$105Pa)과 측정온도(30$0^{\circ}C$~$700^{\circ}C$)를 변화시키며 측정하였다. 이론적인 기전력과 측정값 사이의 편차는 Po:1.565$\times$104Pa 이하의 산소분압에서는 컸지만 이 이상의 분압에서는 이론치에 근접한 값을 가졌다. 증착한 YSZ와 Ni-NiO 박막의 구조는 X-ray diffractometer(XRD)를 이용하여 결정구조를 알아 보았고, TSZ 박막의 표면 morphology 관찰은 Scanning electron microscopy(SEM) 이용하였다. 박막의 조성분석은 X-ray energy dispersive analysis(EDX)을 사용하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.176.2-176.2
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• 2014

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.57-65
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• 2003

In this study, we carry out reliability tests and investigate the failure mechanisms of the anodically bonded wafer level vacuum packaging (WLVP) MEMS gyroscope sensor. There are three failure mechanisms of WLVP: leakage, permeation and out-gassing. The leakage is caused by small dimension of the leak channel through the bonding interface and internal defects. The larger bonding width and the use of single crystalline silicon can reduce the leak rate. Silicon and glass wafer itself generates a large amount of outgassing including $H_2O$, $C_3H_5$, $CO_2$, and organic gases. Epi-poly wafer generates 10 times larger amount of outgassing than SOI wafer. The sandblasting process in the glass increases outgassing substantially. Outgassing can be minimized by pre-baking of the wafer in the vacuum oven before bonding process. An optimum pre-baking temperature of the wafers would be between $400^{\circ}C$ and $500^{\circ}C$.