• 제목/요약/키워드: Vacuum Pipeline

검색결과 8건 처리시간 0.024초

반도체공정 고진공시스템 진공특성에 대한 배기도관 컨덕턴스 영향 전산모사 (Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing)

  • 김형택;서만재
    • 한국전기전자재료학회논문지
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    • 제23권4호
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    • pp.287-292
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    • 2010
  • Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

광섬유센서를 이용한 쓰레기수송관로 유지관리 모니터링에 대한 연구 (The Study about Control Monitoring of Fiber Optic Sensor on Vacuum Pipeline for Waste Collecting System)

  • 이준영;김채석;김봉규
    • 한국유체기계학회 논문집
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    • 제13권2호
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    • pp.54-58
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    • 2010
  • The most recent, Vacuum Pipeline for Waste Collecting System, to collect MSW(Municipal Solid Waste) efficiently, is used environmental preservative, to emit less air pollution, in New City. However, it is difficult to monitor broken pipe and filled mass of Waste, because Vacuum Pipeline is laid underground. Therefore, FBG, optical fiber sensor, is used to inspect the temperature change and longitudinal strain to take proper action for unusual situation. I have need to accumlate sensor data of district control. I hope to be used Vacuum Pipeline more than 30 years in New City.

생활폐기물 자동집하시설 이송관망 성능평가 (Performance Evaluation on the Pipelines for an Automated Vacuum Waste Collection System)

  • 장춘만;이상문
    • 한국유체기계학회 논문집
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    • 제18권5호
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    • pp.26-32
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    • 2015
  • This paper describes performance evaluation of design parameters, air velocity inside a pipeline and pressure along a pipeline, using experimental measurements in an automated vacuum waste collection system. Automatic robot having six cameras is introduced to analyze the internal pipeline conditions whether waste accumulates at the bottom of the pipeline or not. Throughout the experimental measurements of the pipeline having the various shapes, it is found that pressure and internal air velocity linearly increase along the pipeline from a waste inlet to a waste collection station while air density decreases due to the air compression effect with high pressure. Although air velocity inside the pipeline at a waste inlet keeps design velocity range between 20 m/s and 30 m/s, it is noted that air velocity near the waste collection station exceeds maximum design velocity of 30 m/s. Pressure increase per unit length is changed from 17.6 Pa/m to 18.9 Pa/m, which depends on the air velocity inside the pipeline. From the investigation inside the pipeline with CCTV loaded on an automated robot, waste accumulated at the bottom of the pipeline is mainly found at the downstream of a circular curved pipe, an inclined pipe and a bended pipe.

디스플레이공정 진공시스템 밸브응용에 따른 진공특성 전산모사 (Simulation of Vacuum Characteristics by Applications of Vacuum Valves in Display Processing)

  • 김형택
    • 한국인터넷방송통신학회논문지
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    • 제12권2호
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    • pp.77-83
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    • 2012
  • 진공 시스템의 성능에 대한 밸브 컨덕턴스의 영향은 진공시스템의 설계 최적화를 위해 전산모사 되었다. 본 연구에서는, 전산모사기인 VacSimMulti에 의한 모델링기구가 제시되었다. 진공 시스템의 설계는 진공 장비의 다양한 산업적 구현을 위해 특정한 프로세스 조건을 충족해야 한다. 진공 밸브의 구조, 길이, 직경 등은 컨덕턴스 영향의 전산모사 변수로서 모델링 되었으며, 직렬 진공 시스템의 배기 밸브 또한, 다양한 크기와 구조로 모델링하여 전산모사되었다. 밸브 직경의 변화는 도관의 길이의 변화보다 진공특성에 있어 더 유의미한 효과를 보여주었으며 슬릿형의 밸브도관 시스템은 모델링된 밸브구조 중 가장 뛰어난 진공특성을 가지는 것으로 관찰 되었다.

냉매 내 공기혼입에 따른 에어컨 시스템의 냉각성능 저하 (Cooling Performance Deficiency of Air Conditioning System According to Air Quantity Included in Refrigerant)

  • 문성원;민영봉;정태상
    • Journal of Biosystems Engineering
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    • 제34권6호
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    • pp.470-475
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    • 2009
  • This study was performed to present the diagnosis basis of cooling performance deficiency according to air quantity included in refrigerant of air-conditioner by detecting the temperatures and pressures of refrigerant pipeline. The car air-conditioner of SONATA III (Hyundai motor Co., Korea) was tested by maximum cooling condition at 1500 rpm of engine speed in the room with controlled air condition at $33\sim35^{\circ}C$ and 55~57% RH. Measured variables were temperature differences between inlet and outlet pipe surface of the compressor (Tcom), condenser (Tcon), receive dryer (Trec) and evaporator (Teva), and high pressure (HP) and low pressure (LP) in the refrigerant pipeline, and temperature difference (Tcoo) between inlet and outlet air of the cooling vent of evaporator. Control variables were the refrigerant charging weight and the vacuum degree in the refrigerant pipeline before charging refrigerant. From the test, it was represented that the measuring values of (Tcom), LP and (Tcoo) were enabled to make the diagnosis of cooling performance deficiency according to quantity included in refrigerant of air-conditioner. The ranges of Tcom, LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively less than $55^{\circ}C$, more than 166.7 kPa-g(1.7 kgf/$cm^2$) and less than $13.7^{\circ}C$. In the case of using only external sensors and the condition under the normal performances of air conditioner, it was considered that the ranges of LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively more than 166.7 Pa and less than $12^{\circ}C$.

Rapid and massive throughput analysis of a constant volume high-pressure gas injection system

  • Ren, Xiaoli;Zhai, Jia;Wang, Jihong;Ren, Ge
    • Nuclear Engineering and Technology
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    • 제51권3호
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    • pp.908-914
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    • 2019
  • Fusion power shutdown system (FPSS) is a safety system to stop plasma in case of accidents or incidents. The gas injection system for the FPSS presented in this work is designed to research the flow development in a closed system. As the efficiency of the system is a crucial property, plenty of experiments are executed to get optimum parameters. In this system, the flow is driven by the pressure difference between a gas storage tank and a vacuum vessel with a source pressure. The idea is based on a constant volume system without extra source gases to guarantee rapid response and high throughput. Among them, valves and gas species are studied because their properties could influence the velocity of the fluid field. Then source pressures and volumes are emphasized to investigate the volume flow rate of the injection. The source pressure has a considerable effect on the injected volume. From the data, proper parameters are extracted to achieve the best performance of the FPSS. Finally, experimental results are used as a quantitative benchmark for simulations which can add our understanding of the inner gas flow in the pipeline. In generally, there is a good consistency and the obtained correlations will be applied in further study and design for the FPSS.

액화천연가스(LNG) 사용시설내의 부취농도 분포 및 관리방법에 관한 연구 (A Study on the Odorization Levels and Management in the Facility using Liquified Natural Gas(LNG))

  • 원승연;신헌용
    • 한국가스학회지
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    • 제23권6호
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    • pp.25-32
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    • 2019
  • 많은 대량소비 가스시설에서는 천연가스를 가스공사의 배관망을 통해 공급받지 못하여 탱크로리를 통해 액화천연가스(LNG)를 가스공사로부터 공급받아 기화시켜 사용한다. 이러한 시설에서 가스 누출로 인한 인명 또는 재산피해를 방지하기 위하여 주입하는 부취제가, 최초지점과 소비지점들에서 어떤 농도로 분포하는지 분석하는 연구를 수행하였다. 일정한 유량이 흐를 때 가스시설내의 배관위치에 따라 부취농도의 변화를 확인하기 위한 분석이 이루어졌다. 시료채취는 알루미늄 재질의 4.5 L 용기를 진공상태로 만든 후, 부취제가 주입되는 정압기와 가스가 사용되는 소비지점에서 시료를 포집하였다. 포집된 가스시료로부터 가스크로마토그래피(Main Body : Agilent 7890A, Detector : ANTEC 7090)를 이용하여 부취제의 농도를 분석하였다. 안전한 가스시설관리를 위하여 대량수요자 시설의 형태별로 부취농도 관리방법의 정립이 필요한 것으로 판단된다.

반도체 공정에서 TEMAZ폭발사고 사례연구 (A Case Study on the TEMAZ Explosion Accident in Semiconductor Process)

  • 양원백;임종국;홍성민
    • 한국가스학회지
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    • 제21권6호
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    • pp.52-60
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    • 2017
  • 반도체 제조공정 중 확산공정 배기라인에 "반응 부산물인 $ZrO_2$와 TEMAZ, TMA, $O_3$ 등 미반응 물질"과 "퇴적되어 있는 분체"를 제거하여 배관 내 운송효율을 높이고자 히터 자켓을 사용하여 배관온도를 $80^{\circ}C$이상으로 올리던 중 진공펌프 후단의 신축배관이 파열되는 사고가 발생하여 사례연구를 진행하였고 사례연구를 통해 동일한 사고가 발생하는 것을 예방하고자 한다. 사고원인을 분석해보면 진공펌프 흡입 측의 틈새발생으로 외부 공기 배관유입과 히터 자켓으로 배관을 가열함으로서 미 반응된 TEMAZ가 분해되어 발생하는 가스의 부피팽창으로 배관 내 과압이 발생하였고 배관 중에서도 가장 취약한 벨로우즈에서 파열된 것으로 추정할 수 있다. 이와 같은 사고를 예방하기 위하여 배관파열사고의 원인물질로 추정되는 TEMAZ에 대한 물리적 위험성을 평가하여 배관파열사고의 원인을 규명하고 동종재해를 예방하기 위한 안전대책을 수립하고자 하는데 목적이 있다.