• 한국정밀공학회지
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• 제25권6호
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• pp.33-39
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• 2008

• 한국정보통신학회논문지
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• 제19권6호
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• pp.1493-1498
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• 2015

자동초점이란 영상을 획득하는 시스템에서 고정된 촬상면에 자동으로 초점이 맺히도록 렌즈를 구동시키는 방식으로 컴퓨터비전과 카메라 등에서 매우 중요하게 사용된다. 소형 카메라의 경우 자동초점에서 렌즈구동부인 actuator의 기술은 대량생산이 이용이하고, 위치센서가 불필요하며, 회로구성이 용이한 VCM방식이 널리 사용되고 있으며, 구동의 안정성에 비해 크기와 소음이 큰 스테핑모터 방식, 크기는 가장 작지만 납 함유문제 및 습도 취약성을 갖는 피에조 방식이 있다. 그 외에 액체렌즈방식이 있는데, 소형 구조에 저전력의 장점이 있지만 화질 및 신뢰성 검증 그리고 고압이 필요한 특징을 가지는 구조도 있다. 본 논문에서 5Mpixel급 이미지 센서를 통해 획득한 영상의 선예도를 이용하여 VCM의 actuator처럼 액체렌지를 제어할 수 있는 제어 시스템을 두 가지를 구현하여 자동으로 초점을 맞추는 기능을 구현 검증하였다.

• 한국정밀공학회지
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• 제19권12호
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of Mechanical Science and Technology
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• 제17권5호
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• pp.679-690
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• 2003

As the rate of increase in areal density of the HDD has accelerated, dynamic characteristics of the HDD actuator need to be improved with respect to the performance of the tracking servo and shock transmission. Therefore, it is important to analyze the vibration characteristic of the HDD actuator that consists of the VCM part, E-block and pivot bearing. In this paper, vibration modes of the HDD actuator are investigated the using finite element and experimental modal analyses methods. To develop a detailed finite element model, finite element models of each components of the actuator assembly are constructed and tuned to the results of the EMA. The VCM coil is modeled as an equivalent finite element model that has an orthotropic material property using auto-model updating program. Auto-model updating program with improved sensitivity based iterative method is applied to build a detailed finite element model using the result of the EMA. A detailed finite element model of the HDD actuator is then constructed and analyzed.

• 한국소음진동공학회논문집
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• 제16권1호
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• pp.50-56
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• 2006

Since most of small form-factor drives have a load/unload mechanism and the flying height of the head is getting lower as the capacity of disk drives increases, the load/unload velocity becomes one of the important factors to ensure the reliability of the load/unload mechanism. To control the load/unload velocity accurately, velocity sensing is essential. In this paper, we introduce a very practical method that acquires the load/unload velocity from the back electromotive force (BEMF) of a voice coil motor (VCM) and propose a calibration method for measuring the BEMF from a given circuit. Moreover, the effect of calibration error and temperature variation on the measurement of BEMF is shown by simulation. Then, this present method is applied to the load/unload velocity controller and is verified from the experimental result.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2007년도 하계학술대회 논문집
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• pp.321-324
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• 2007

The actuators of anti-vibration system(AVS) can be separated into several types: piezoelectric actuators, pneumatic springs, cylinders, rotating motor and linear motor. The last one has some advantages, such as low noise, low vibration, simpler configuration and possibility of direct drive. The voice coil motor(VCM) is one type of linear motor, originally used in speaker system. VCM actuators are usually used in occasions that rapid and controlled motion of devices are required. In this paper, a controller which satisfies system specification(e.g. current controller bandwidth) within whole operation range is designed. For that objective, parameters as position were initially obtained with 3D FEM analysis and motor modeling was performed. A current controller in 2-axis VCM drive system was designed and then performance of the proposed controller was verified with simulation using Simplorer and an experimental result.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.119-124
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• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• 한국광학회:학술대회논문집
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• 한국광학회 1996년도 Advance Program of 13th optics andquantum Electronics conference, 1996제13 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.107-107
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• 1996

• 약학회지
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• 제39권4호
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• pp.351-359
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• 1995

The in vitro and in vivo antibacterial activities of DWQ-217 (1-cyclopropyl-6-fluoro-8-chloro-7-(3-amino-4-methylthiomethylpyrrolidinyl )-1,4-dihydro-4-oxo-quinoline-3-carboxylic acid) were compared with those of ciprofloxacin (CPFX) and vancomycin(VCM). DWQ-217 was superior to those of CPFX and VCM against gram positive bacteria. DWQ-217 showed excellent activity against MRSA (MIC of methicillin; $\geq$12.5 $\mu\textrm{g}$/ml), MIC$_{90}$=0.013. DWQ-217 possessed strong bactericidal action against gram positive and gram negative strains by MIC/MBC test and killing curve. DWQ-217 and CPFX were administered orally and subcutaneously to mice infected systematically with S. aureus and S. pyogenes, DWQ-217 was $\geq$5-16 fold(p.o.) and $\geq$3-5 fold(s.c.) more active than CPFX.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2005년도 Proceedings of ISRS 2005
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• pp.165-168
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• 2005

In this study, emissivity and land surface temperature (LST) were retrieved using the previously developed algorithms and Aqua/MODIS data. And sensitivity of estimated emissivity and LST to the predefined values, such as land cover, normalized difference vegetation index (NOVI) and spectral emissivity were investigated. The methods used for emissivity and LST were vegetation cover method (VCM) and four different split-window algorithms. The spectral emissivity retrieved by VCM was not sensitive to the NOVI error but more sensitive to the land cover error. The comparison of LST showed that the LST was systematically different without regard to the land cover and season. And the LST was very sensitive to the emissivity error excepting the Uliveri et al. This preliminary result indicates that more works are needed for the retrieval of reliable LST from satellite data.