PZT thin capacitor characteristics of the using Pt-Ir($Pt_{80}Ir_{20}$ )-alloy
(Pt-Ir($Pt_{80}Ir_{20}$ )-alloy를 이용한 PZT 박막 캐패시터 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.05c
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- pp.47-52
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- 2002