• 한국정밀공학회지
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• 제21권5호
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• pp.38-45
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• 2004

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V-groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical waveguide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angle and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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• pp.216-220
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• 2006

평면 광 신호 분리기와 광 케이블의 정밀결합을 위하여 V-groove를 제작하였다. V-groove 는 실리콘웨이퍼 (100) 면을 KOH 용액으로 선택적 습식 식각하여 제작되었다. V-groove 를 효과적으로 제작하기 위하여 KOH 의 조성 (10, 20, 30, 33, 40 wt%)과 온도 (50, 60, 70, $80^{\circ}C$)를 변화시켜 식각률과 표면조도를 측정하였다. 식각률은 $80^{\circ}C$에서 20 wt.% KOH 로 식각했을 경우 $1.84{\mu}m/min$ 로 가장 빨랐으며, 표면조도는 $80^{\circ}C$에서 33 wt.% KOH로 식각했을 경우 1.6nm로 가장 양호하였다.

• 센서학회지
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• 제23권4호
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• pp.229-233
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• 2014

In this study, a V-grooved single-mode fiber along with optical time domain reflectometry (OTDR) as a quasi-distributed temperature sensor was investigated. The external medium used to fill the V-groove affects the optical mode. The V-groove was filled with ethylene vinyl acetate (EVA) because its transmittance was sensitive to temperature. The experimental results showed that the optical loss of the sensor varies with temperature, and the sensitivity depends on the depth of the V-groove.

• 한국통신학회논문지
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• 제21권12호
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• pp.3277-3285
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• 1996

In this paper, w designed an opical power distribution device for application to an optical switching and an optical subscriber loop. We fabricated PSG thin film by LPCVD. Based on the measured index of fabricted thin film, rib-type waveguide was transformed to two-dimension by the effective index method and we simulated dispersion property to find asingle-mode condition. We found that the optimum design parameters of rib-type waveguide are:cladding layer of 3.mu.m, core layer of 3.mu.m, buffer layer of 10.mu.m, and core width of 4.mu.m. Each side of the guiding region was etched down to 4.mu.m to shape the core. We used these optimum parameters of the rib-type waveguide with branching angle of 0.5.deg. and simulted the Y-branch waveguide by the BPM simulation. Numerical loss in branching area was claculated to be 0.1581dB and equal to the total loss of the Y-branch. The loss of the fabricated Y-branch waveguide on PSG film ws 1.6dB at .lambda.=1.3.mu.m before annealing but was 1.2dB after annealing at 1000.deg. C for 10 minutes. Consequently, the loss of branching area from 3000.mu.m to 6000.mu.m in the z-direction was 0.8dB, and single-mode propagation was confirmed by measuring the near field pattern. For coupling the fabricated Y-branch waveguide with an optical fiber, we fabricated V-groove which was used as the upholder of optical fiber. An etching angle was 54.deg. and the width and depth of guiding groove was 150.mu.m, 70.mu.m, respectively. The optical fiber is inserted onto V-groove. Both the Y-branch and V-groove were connected through the index matching oil. Coupling loss after connecting Y-branch and the optical fiber on V-groove was 0.34dB and that after injecting index mateching oil was 0.14dB.

• 전자공학회논문지A
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• 제31A권6호
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• pp.88-97
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• 1994

We describe the design, fabrication, and performance of the optical fiber-photodiode 1$\times$12 arry module using mesa-type InS10.53T GaS10.47TAS/INP 1$\times$12 PIN photodiode array. We fabricated the PIN PD array for high-speed optical fiber parallel data link optimizing quantum efficiency, operating speed sensitivity from the PIN-FET structure, and electrical AC crosstalk. For each element of the array, the diameter of the photodetective area is 80 $\mu$m, the diameter of the p-metal pad is 90 $\mu$m, and the photodiode seperation is 250 $\mu$m to use Si v-groove. Ground conductor line is placed around diodes and p-metal pads are formed in zigzag to reduce Ac capacitance coupling between array elements. The dark current (IS1dT) is I nA and the capacitance(CS1pDT) is 0.9 pF at -5 V. No signifcant variations of IS1dT and CPD from element to element in the array were observed. We calulated the coupling efficiency for 10/125 SMF and 50/125 GI MMF, and measured the responsivity of the PD array at the wavelength is 1.55 $\mu$ m. Responsivities are 0.93 A/W for SMF and 0.96 A/W for MMF. The optical fiber-PD array module is useful in numerous high speed digital and analog photonic system applications.

• 반도체디스플레이기술학회지
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• 제6권3호
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• pp.61-64
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• 2007

V-groove device was fabricated for precision coupling of planar optical splitter and optical fibers. V-groove was made through select wet etching of Si wafer by using KOH solution. Etching rate and surface roughness were checked, changing KOH composition(10, 20, 30, 33, 40 wt.%) and etching temperature (50, 60, 70, $80^{\circ}C$) to fabricate V-groove device effectively. Etching rate was the fastest as $1.84\;{\mu}m/min$ in case of etching by 20 wt.% KOH on $80^{\circ}C$, surface roughness was the best in case of etching by 33 wt. % KOH on $80^{\circ}C$.

• 마이크로전자및패키징학회지
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• 제6권3호
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• pp.65-71
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• 1999

광 패키징에서 광섬유와 광전자소자를 정확히 정렬하기 위한 V-groove의 치수 정밀도에 미치는 마스크 재료와 에칭용액의 영향을 연구하였다. PECVD nitride, LPCVD nitride, thermal oxide($SiO_2$)를 마스크재료로 사용하였고 실리콘을 이방성에칭하는 용액으로 KOH(40wt%)용액과 KOH(40wt%)용액에 IPA를 첨가한 용액을 이용하였다. 마스크재료로는 LPCVD nitride가 가장 좋은 선택적에칭특성을 나타내었으며 사용된 마스크재료 중 thermal oxide가 가장 빠른 속도로 에칭되었다. V-groove의 크기 증가는 마스크충 아래로의 undercutting에 의해 생겼는데 이는 주로 (111)면으로의 에칭 때문이었다. KOH(40wt%)용액에서 (111)면의 에칭속도는 0.034 - 0.037 $\mu\textrm{m}$/min로 마스크재료에 관계없이 거의 일정하였다. IPA를 KOH(40wt%)용액에 첨가하면 (100)면과 (111)면의 에칭속도는 모두 감소하지만 (111)면에 대한 (100)면의 에칭속도비는 증가하였다. 그러므로 이런 용액에서 (111)면으로의 에칭에 의한 undercutting현상은 줄어들었으며 V-groove의 크기를 더 정확하게 조절할 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1265-1267
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• 1995

In the fiber-photodiode(PD) coupling module using v-groove, the paraxial approximation is no longer valid because the beam enters obliquely the PD substrate with the angle of $20^{\circ}$ after being reflected from the $55^{\circ}$ mirror formed by anisotropically etching of the (100) silicon wafer. In this paper, we study the beam profile incident on the PD active area and fiber-PD coupling efficiency for this case.

• 대한전자공학회논문지
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• 제27권11호
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• pp.1-8
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• 1990

4개의 Quantum well을 갖는 GRINSCH InGaAs/Inp Buried Heterostructure의 laser diode 12개로 구성되어 있는 12-laser diode array를 제작하여, 각 laser diode의 전자 흡수 영역의 인가 전압에 의하여 lasing 작용을 조절할 수 있는 가능성을 조사하였다. 12개의 V가 홈을 갖는 Si V-groove와 12개의 광섬유를 이용하여 12-laser diode array의 빛출력을 coupling하여 전자 흡수영역의 인가 전압의 변화에 따른 각 laser diode의 여러특성을 조사하였다. 마지막으로 12-laser diode array와 Si V-Groove와 광섬유를 이용하여 디지털 논리 gate들로 구성되어 있는 전자 회로 board들 간의 광대역 근거리 통신 및 B-ISDN을 위한 central office와 가입자 간의 통신을 구현하는 방법에 대하여 생각해 보았다.

• 센서학회지
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• 제24권1호
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• pp.1-5
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• 2015

The V-grooved single-mode fiber in which a surface part of the core was removed was investigated as a quasi-distributed water detection sensor. In the normal state, the V-grooved region is filled and covered with a specific RI (Refractive Index)-matched medium, and the sensor experiences minimal optical loss. As water invades the V-grooved region, the material is dissolved and removed, and a considerable optical loss occurs owing to the large RI difference between the fiber core and water. The experimental results showed the feasibility of the device as a sensor element of the quasi-distributed water detection sensor system based on general optical time domain reflectometry (OTDR).