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A Study on Improvement of Slurry Filter Efficiency in the CMP Process (CMP 공정에서 슬러리 필터의 효율 개선에 관한 연구)

  • Park, Sung-Woo;Seo, Yong-Jin;Seo, Sang-Yong;Lee, Woo-Sun;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05b
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    • pp.34-37
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    • 2001
  • As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

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A Report on the Collecting Status of the Prospective Clinical Data Included the Constitutional Prescription (전향적 체질치료 임상증례 수집현황에 대한 보고)

  • Kim, Sang-Hyuk;Kim, Ho-Seok;Park, Ki-Hyun;Lee, Siwoo
    • Journal of Sasang Constitutional Medicine
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    • v.28 no.1
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    • pp.57-66
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    • 2016
  • Objectives The purpose of this study is to report on the collecting status of the prospective clinical data, that is designed to find clinical factors for determining the constitutional prescription.Methods We collected the prospective clinical data of 1208 subjects in the 10 oriental hospitals and 2 oriental clinic, from September 2012 to July 2015. Subjects were diagnosed and prescribed by the Sasang Constitution specialist. We counted the usage frequency of each constitutional herbal formula. Besides we check the main chief complaints on each constitutional herbal formula.Results & Conclusions In TE type, Yeoldahanso-tang, Cheongsimnyeonja-tang were used in high frequency. In SE type, Palmulgunja-tang, Gwakhyangjunggi-san were used in high frequency. In SY type, Hyeongbangjihwang-tang, Yanggyeoksanhwa-tang were used in high frequency. The both of high frequency-prescriptions in TE types were for the Interiorheat disease, expecially liver-heat lung-dry symptomatology. The main chief complaint of high frequency-prescriptions was fatigue in every constitution. We hope that the process of constitutional prescription would be standardized through the subsequent researches.

Simulation on Hydraulic Control Characteristics of Regulator System in Bent-Axis Type Piston Pump

  • Kim, Jong Ki;Oh, Seok Hyung;Jung, Jae Youn
    • KSTLE International Journal
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    • v.1 no.2
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    • pp.101-106
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    • 2000
  • Variable displacement axial piston pumps are widely used for raising the energy level of the fluid in hydraulic systems. And the regulator is the device which regulates the discharge flow of the piston pump by controlling the swivel angle. The regulator receives the hydraulic pilot pressure and controls the pump output flow depending on the machine load and engine speed. This work deals with constant power control (horsepower control) in the design of a regulator by using a bent-axis type piston pump. In order to effectively use engine power, we must keep the horsepower from the engine to the pump constant. Therefore the regulator operates the constant power control. As a result, optimum power usage is obtained by accurately following the power hyperbola. This study focused on developing a simulation model of a regulator. First, the governing equations of the regulator are derived, and analysis is performed by computer simulation, which can identify significant parameters of regulator. As a result, the variation of the swivel angle, flow rate, hyperbolic curve, inner leakage and responsibility are simulated, and significant parameters of a regulator are identified.

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Effects of the Butanol Extact of Head of Panax Ginseng on Type II Collagen-induced Arthritis in DBA/1J Mice

  • Jeong, Choon-Sik
    • Biomolecules & Therapeutics
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    • v.15 no.4
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    • pp.235-239
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    • 2007
  • In order to evaluate the improvement effects of head of Panax ginseng on chronic arthritis, we have investigated the activity of butanol fraction (BuOH fraction) in vitro and in vivo system. BuOH fraction showed significant inhibition on the elastase activity. Anti-arthritic activity of BuOH fraction was also examined on type II collagen-induced arthritis in DBA/1J mice. Mice were immunized with injection of type II collagen emulsified in Freund's complete adjuvant, followed by a booster injection 21 days later. BuOH fraction(BHPG) was administered at an oral dose of 500mg/kg for 2 weeks from the 1st day boost. The hind paw edema was significantly decreased in the group of treatment with BuOH fraction compared to control. In collagen-induced DBA/1J mice, BuOH fraction did not affected the collagen antibody titer but significantly inhibited the tumor necrosis factoralpha(TNF-${\alpha}$) activity. These results were confirmed with histological evaluation of joint tissues. This study may raise the possibility that the usage of BuOH fraction of head of Panax ginseng as alternative medicine for the relief and prevention of rheumatoid arthritis symptoms.

The Effects of Functional Monomers on the Synthesis andPhysical Properties of Solution Type Quaternary Polymer Acrylic Pressure-Sensitive Adhesives (관능성 단량체 종류에 따른 4원 용액형 아크릴계 점착제의 합성과 물성에 관한 연구)

  • Kim, Nam-Seok;Kim, Sung-Hoon
    • Journal of the Korean Applied Science and Technology
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    • v.25 no.4
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    • pp.525-532
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    • 2008
  • To prepare a solution type acrylic pressure-sensitive adhesive, quarter polymers were synthesized from butyl acrylate(BA), 2-ethylhexylacrylate(2-EHA) as a base monomer, methyl methacrylate(MMA) as a comonomer, each of methacrylic acid(MAA), acrylic acid(AA) as a functional monomer. Acrylic solution type pressure-sensitive adhesives(PSA's) of isocyanate derivative crosslinking PSA's were prepared by crosslinking of BEMM, BEMA with toluene-2,4-diisocyanate. The structure of adhesive was identified by FT-IR. The viscosity was measured by using Brookfield DV-III and molecular weight was measured by using gel permeation chromatography. The physical properties of polyethylene film coated with BEMMT, BEMAT were measured as a function of the concentration. As the result, BEMMT(0.6, 0.8), BEMAT(0.6) showed peel adhesion of $160{\sim}180\;g_f$/25 mm width and shear adhesion of more than 24 hours, and tackiness of $4/32{\sim}6/32$ which was relevant to commercial usage.

Novel AGLP-1 albumin fusion protein as a long-lasting agent for type 2 diabetes

  • Kim, Yong-Mo;Lee, Sang Mee;Chung, Hye-Shin
    • BMB Reports
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    • v.46 no.12
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    • pp.606-610
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    • 2013
  • Glucagon like peptide-1 (GLP-1) regulates glucose mediated-insulin secretion, nutrient accumulation, and ${\beta}$-cell growth. Despite the potential therapeutic usage for type 2 diabetes (T2D), GLP-1 has a short half-life in vivo ($t_{1/2}$ <2 min). In an attempt to prolong half-life, GLP-1 fusion proteins were genetically engineered: GLP-1 human serum albumin fusion (GLP-1/HSA), AGLP-1/HSA which has an additional alanine at the N-terminus of GLP-1, and AGLP-1-L/HSA, in which a peptide linker is inserted between AGLP-1 and HSA. Recombinant fusion proteins secreted from the Chinese Hamster Ovary-K1 (CHO-K1) cell line were purified with high purity (>96%). AGLP-1 fusion protein was resistant against the dipeptidyl peptidase-IV (DPP-IV). The fusion proteins activated cAMP-mediated signaling in rat insulinoma INS-1 cells. Furthermore, a C57BL/6N mice pharmacodynamics study exhibited that AGLP-1-L/HSA effectively reduced blood glucose level compared to AGLP-1/HSA.

Investigation of Network Application of the Hybrid SFCLs (복합형 초전도 한류기의 한류특성에 따른 계통 적용성 검토)

  • Choe, Won-Joon;Sim, Jung-Wook;Park, Kwon-Bae;Kim, Young-Gun;Oh, Il-Sung;Hyun, Ok-Bae
    • Proceedings of the KIEE Conference
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    • 2008.10c
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    • pp.223-225
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    • 2008
  • In order to apply SFCLs into electric power systems, the urgent issues to be settled are as follows, such as initial installation price, operation and maintenance cost due to ac loss of superconductor and the life of cryostat, and high voltage and high current problems. We designed novel hybrid SFCLs which combine superconductor and conventional electric equipments including a vacuum interrupter, an electro-magnetic contactor and a current limiting reactor. The main purpose of the hybrid SFCL is to drastically reduce total usage of superconductor by adopting current commutation method by use of the superconductor and the fast switch. According to protective coordination and performance, we investigated two concepts of Hybrid SFCLs. First is a half cycle fault current limitation type and second is a non-half cycle fault current limitation type. We concluded that the non-half cycle fault current limitation type is batter than the other.

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Improvement of Pad Lifetime using POU (Point of Use) Slurry Filter and High Spray Method of De-Ionized Water (POU 슬러리 필터와 탈이온수의 고분사법에 의한 패드수명의 개선)

  • 박성우;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.707-713
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    • 2001
  • As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

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A Study on the Relationship between the Cooking Wine Attributes and Demographic Characteristics (조리용 와인의 선택 속성과 인구통계학적 특성 사이의 관계에 대한 연구)

  • Ryul, Cheol;Cha, Suk-Bin;Choi, Sung-Man
    • Journal of the East Asian Society of Dietary Life
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    • v.17 no.2
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    • pp.274-287
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    • 2007
  • The purpose of this study was to examine the actual state of cooking wine usage, and analyze the relationship between the attributes of cooking wine and demographic characteristics. The major findings of this study are as follows. First, the origin and correct choice of cooking wine were significantly related to hotel type, restaurant type and career. Second, the importance of the taste and aroma of a cooking wine, which are intrinsic attributes in the evaluation of a wine, had significant relationships with all the demographic variables whereas the importance of purchase cost and label information of the cooking wine only exhibited a significant correlation with career (p<0.05). Third, 53.7% of the respondents used cooking wine based on recipes, while the rest used it by rule of thumb. These results between restaurant type were significantly different (p<0.05). For the results of this research to be of more use, further research should be conducted on the functional aspects of cooking wine and their effects on cooking. In addition, further systematic research should be performed on the functional and sensory effects of a variety of wine tastes and aromas on cooking.

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Performance of the Exhaust Filtration System of Hot Cell at PIEF (조사후시험시설에서의 핫셀 배기포집시스템의 성능평가)

  • Hwang, Yong-Hwa
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.12
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    • pp.799-804
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    • 2011
  • Radioactivity of high concentrations have existed in the handling nuclear materials in hot cell of PIEF(Post Irradiation Examination Facility). The exhaust filtration system was enabled to process cylindrical filters by using a manipulator in the hot cell. By establishing a double filtration system with two filters, backup protection against leakage or failure of the first is provided by the second filter. Additionally, this a arrangement is arrange intended to increase the total filtration efficiency. The result of the pressure drop changing in the air flow of the cylindrical and HEPA filters is observed by a curved line. A filtering efficiency of more than 99.99% to $0.3{\mu}m$ particle appears in the upstream and downstream during the efficiency test on the HEPA filters. The V-pleats type had a lower pressure drop than the separator type. There was no damage during usage and was found to be suitable with high capacity of air volume. Therefore, by carrying out performance tests of the exhaust filtration system, efficiency and safety can be achieved.