• 제목/요약/키워드: Uniform electric field

검색결과 216건 처리시간 0.027초

A Novel Approach for Controlling Process Uniformity with a Large Area VHF Source for Solar Applications

  • Tanaka, T.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.146-147
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    • 2011
  • Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

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평등/불평등 전계에서의 $SF_6$혼합된 가스의 절연파괴특성 연구 (An investigation on the insulation characteristics of $SF_6$ mixtures gas under uniform and non-uniform electric field)

  • 이상화;이영조;안희성;정승용;구자윤
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1397-1398
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    • 2007
  • 본 연구는 $SF_6$와 Dry-air(건조공기), $N_2$, $CO_2$ 가스가 혼합된 절연매체의 절연 특성과 부분방전 특성 연구를 기초실험용 쳄버와 70kV급 GIS mock up을 이용하여 교류전압을 인가하여 실험이 수행되었다. 전자의 경우, Sphere gap 및 Needle/Plate 전극시스템을 이용하여 순수 $SF_6$가스와 Dry-air, $N_2$, $CO_2$ 가스들의 절연내력을 비교하고, 챔버의 압력을 5기압으로 유지한 상태에서 Dry-air, $N_2$, $CO_2$$SF_6$가스의 혼합비를 변화시키면서 절연내력이 측정되었다. 후자의 경우, 기초실험에서 도출된 $SF_6$가스와 Dry-air, $N_2$, $CO_2$의 최적의 혼합비율을 선택한 후, 방전 개시전압과 부분방전 양상을 순수 $SF_6$가스의 결과와 비교분석하기 위한 실험을 수행하였다. 이를 위하여 GIS 사고의 주요원인이 되는 결함들, 즉 Protrusion, Floating, Free moving particle 들을 인위적으로 모의하여 Mock up 내부에 설치하고 내부 압력을 5기압으로 유지한 상태에서 수행되었다. 전자의 경우, $0.5{\sim}5$ 기압 범위 내에서 Dry-air, $N_2$, $CO_2$ 압력을 변화시켰을 때 절연내력은 전극시스템에 무관하게 순수 $SF_6$가스의 결과치의 Dir-air $47{\sim}51%$, $N_2\;48{\sim}61%$, $CO_2\;47{\sim}60%$ 정도이다. 또한 챔버 압력이 5기압인 상태에서 Dry-air, $N_2$, $CO_2$가 80% 혼합된 절연매체는 순수 $SF_6$가스 절연내력의 80%이상의 절연내력을 가지고 있다. 후자의 경우, 인가전압을 고정 시켰을 때, 부분방전 패턴과 방전크기는, 순수 $SF_6$가스와 Dry-air 가 80% 혼합된 절연매체는 동일한 패턴과 방전크기를 나타내고 있다. 이러한 결과를 근거로, 가스 압력이 5기압에서 운전되는 전력기기의 절연매체로서 혼합가스를 사용할 경우, $SF_6$가스와 Dry-air, $CO_2$, $N_2$ 가스들의 혼합비는 2:8정도가 적절한 것으로 제안한다.

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선형구배 응력장에서 표층의 잔류응력 측정에 관한 연구 (A Study on the Measurements of Sub-surface Residual Stress in the Field of Linear Stress Gradient)

  • 최병길;전상윤;이택순
    • 대한기계학회논문집
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    • 제16권9호
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    • pp.1632-1642
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    • 1992
  • 본 연구에서는 방전가공(electric disharge machining, EDM) 또는 공기연마 분사기(air-abrasive jet machine, AJM) 가공에 의하여 인장 시험편 또는 외팔보 시험 편에 구멍깊이를 증가시켜 가면서 구멍을 뚫었다. 여기에서 방저가공(EDM)을 채택한 것은 구멍깊이를 직접 계측하는 것이 가능하여 구멍깊이 측정 오차에 기인하는 잔류응 력 측정오차를 최소화 할 수 있기 때문이며, 공기연마 분사기를 채택한 것은 구멍을 뚫는 동안 가공응력을 유발시키지 않기 때문이었다. 위 인장 시험편 또는 외팔보 시 험편을 이용하여 균일한 응력장과 두께 방향으로 변하는 선형적 구배응력장을 구현하 고, 이 때 각각 구멍깊이가 다른 원통형 막힘 구멍으로 부터 이완되는 스트레인을 계 측하였다. Schajer가 제안한 멱급수법과 최소장승법을 적용하여 균일응력장 또는 구 배 응력장에서 측정되는 스트레인을 잔류응력으로 환산하였으며, 환산된 잔류응력과 실제로 작용하는 응력을 비교하므로서 이론적으로 제시된 멱급수법과 최소자승법의 타 당성을 실험적으로 검토하는데 본 연구의 목적이 있다. 이 때 얕은 구멍깊이 (0.3∼ 1.2mm)에서 측정되는 스트레인을 이용하여 Schajer의 제안에 따라 잔류응력을 산정하 므로서, 잔류응력 계측 대상 구조물을 가급적 덜파괴시키며 잔류응력을 측정할 수 있 는지 여부를 실험적으로 검토하였다.

전해질 첨가제에 따른 graphite 음극의 SEI분석 및 전기 화학적 특성 고찰 (Characterization of SEI layer for Surface Modified Cathode of Lithium Secondary Battery Depending on Electrolyte Additives)

  • 이성진;차은희;임수아
    • 전기화학회지
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    • 제19권3호
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    • pp.69-79
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    • 2016
  • 높은 에너지 밀도를 지닌 리튬 이온 전지는 현재 리튬 이온 전지에 상용화된 음극 활물질인 천연 흑연의 보다 높은 율 별 특성과 안정한 장수 명 특성을 요구하고 있다. 천연 흑연계 음극 활물질을 이용하여 리튬 전지 음극을 제작하여, SEI 피막의 형성 및 제어의 대표적인 전해질 첨가제인 VC (vinylene carbonate), VEC (vinyl ethylene carbonate), FEC (fluoroethylene carbonate)등의 다양한 첨가제를 사용하여 초기 반응에 의해 생성되는 SEI 피막을 분석하고 이에 따른 전기 화학 특성 변화를 측정하기 위하여 SEM, EVS (electorochemical voltage spectroscopy), 피막 분석, EIS (electrochemical impedance spectroscopy), FT-IR (Fourier transform infrared spectroscopy)등을 측정하여, 고온 수명 평가, 용량 유지율 및 성능 평가를 실시하여, $0^{\circ}C$ 수명특성 이후의 음극에 대한 분석을 비교 및 분석 평가 하였다. 초기 충전 시 profile에서 SEI의 형성에 의한 변화를 나타냈으며, EVS를 통하여 No-Additive가 약 0.9 V에서 SEI의 형성이 이루어지지만, VC, VEC, FEC의 경우 1 V 이상에서 형성반응이 이루어졌다. $60^{\circ}C$ 수명특성평가에서 초기 효율은 No-Additive가 가장 높게 나타나며 용량 유지율이 높게 나타났으나, cycle이 진행 될수록 충전 시 용량과 효율이 감소하여 VC, FEC보다 용량 유지율이 낮아졌고, VEC는 효율 및 용량 유지율 모두 성능이 가장 낮게 나타났다. SEM을 통하여 SEI의 변화를 확인할 수 없었지만, FT-IR을 통하여 SEI의 성분이 cycle이 진행이 될수록 첨가제에 의해 $2850-2900cm^{-1}$영역의 Alkyl carbonate ($RCO_2Li$) 계열의 성분이 더욱 견고하게 유지되는 것을 확인하였으며, EIS를 통하여 cycle이 진행될수록 저항은 증가하는 것으로 나타났고, 특히 No-Additive 및 VEC의 SEI에 의한 저항이 매우 커졌다는 것을 알 수 있었다.

설비공학 분야의 최근 연구 동향 : 2012년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2012)

  • 한화택;이대영;김사량;김현정;최종민;박준석;김수민
    • 설비공학논문집
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    • 제25권6호
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    • pp.346-361
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    • 2013
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2012. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. The conclusions are as follows : (1) The research works on thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and valves, fuel cells and power plants, ground-coupled heat pumps, and general heat and mass transfer systems. Research issues are mainly focused on new and renewable energy systems, such as fuel cells, ocean thermal energy conversion power plants, and ground-coupled heat pump systems. (2) Research works on the heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer, and industrial heat exchangers. Researches on heat transfer characteristics included the results for natural convection in a square enclosure with two hot circular cylinders, non-uniform grooved tube considering tube expansion, single-tube annular baffle system, broadcasting LED light with ion wind generator, mechanical property and microstructure of SA213 P92 boiler pipe steel, and flat plate using multiple tripping wires. In the area of pool boiling and condensing heat transfer, researches on the design of a micro-channel heat exchanger for a heat pump, numerical simulation of a heat pump evaporator considering the pressure drop in the distributor and capillary tubes, critical heat flux on a thermoexcel-E enhanced surface, and the performance of a fin-and-tube condenser with non-uniform air distribution and different tube types were actively carried out. In the area of industrial heat exchangers, researches on a plate heat exchanger type dehumidifier, fin-tube heat exchanger, an electric circuit transient analogy model in a vertical closed loop ground heat exchanger, heat transfer characteristics of a double skin window for plant factory, a regenerative heat exchanger depending on its porous structure, and various types of plate heat exchangers were performed. (3) In the field of refrigeration, various studies were executed to improve refrigeration system performance, and to evaluate the applicability of alternative refrigerants and new components. Various topics were presented in the area of refrigeration cycle. Research issues mainly focused on the enhancement of the system performance. In the alternative refrigerant area, studies on CO2, R32/R152a mixture, and R1234yf were performed. Studies on the design and performance analysis of various compressors and evaporator were executed. (4) In building mechanical system research fields, twenty-nine studies were conducted to achieve effective design of mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, renewable energy systems, and lighting systems in buildings. New designs and performance tests using numerical methods and experiments provide useful information and key data, which can improve the energy efficiency of buildings. (5) In the fields of the architectural environment, studies for various purposes, such as indoor environment, building energy, and renewable energy were performed. In particular, building energy-related researches and renewable energy systems have been mainly studied, reflecting interests in global climate change, and efforts to reduce building energy consumption by government and architectural specialists. In addition, many researches have been conducted regarding indoor environments.

설비공학 분야의 최근 연구 동향: 2014년 학회지 논문에 대한 종합적 고찰 (Recent Progress in Air-Conditioning and Refrigeration Research: A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2014)

  • 이대영;김사량;김현정;김동선;박준석;임병찬
    • 설비공학논문집
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    • 제27권7호
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    • pp.380-394
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    • 2015
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2014. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of heat and mass transfer, cooling and heating, and air-conditioning, the flow inside building rooms, and smoke control on fire. Research issues dealing with duct and pipe were reduced, but flows inside building rooms, and smoke controls were newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for thermal contact resistance measurement of metal interface, a fan coil with an oval-type heat exchanger, fouling characteristics of plate heat exchangers, effect of rib pitch in a two wall divergent channel, semi-empirical analysis in vertical mesoscale tubes, an integrated drying machine, microscale surface wrinkles, brazed plate heat exchangers, numerical analysis in printed circuit heat exchanger. In the area of pool boiling and condensing, non-uniform air flow, PCM applied thermal storage wall system, a new wavy cylindrical shape capsule, and HFC32/HFC152a mixtures on enhanced tubes, were actively studied. In the area of industrial heat exchangers, researches on solar water storage tank, effective design on the inserting part of refrigerator door gasket, impact of different boundary conditions in generating g-function, various construction of SCW type ground heat exchanger and a heat pump for closed cooling water heat recovery were performed. (3) In the field of refrigeration, various studies were carried out in the categories of refrigeration cycle, alternative refrigeration and modelling and controls including energy recoveries from industrial boilers and vehicles, improvement of dehumidification systems, novel defrost systems, fault diagnosis and optimum controls for heat pump systems. It is particularly notable that a substantial number of studies were dedicated for the development of air-conditioning and power recovery systems for electric vehicles in this year. (4) In building mechanical system research fields, seventeen studies were reported for achieving effective design of the mechanical systems, and also for maximizing the energy efficiency of buildings. The topics of the studies included energy performance, HVAC system, ventilation, and renewable energies, piping in the buildings. Proposed designs, performance performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment was mostly focused on indoor environment and building energy. The main researches of indoor environment were related to the evaluation of work noise in tunnel construction and the simulation and development of a light-shelf system. The subjects of building energy were worked on the energy saving of office building applied with window blind and phase change material(PCM), a method of existing building energy simulation using energy audit data, the estimation of thermal consumption unit of apartment building and its case studies, dynamic window performance, a writing method of energy consumption report and energy estimation of apartment building using district heating system. The remained studies were related to the improvement of architectural engineering education system for plant engineering industry, estimating cooling and heating degree days for variable base temperature, a prediction method of underground temperature, the comfort control algorithm of car air conditioner, the smoke control performance evaluation of high-rise building, evaluation of thermal energy systems of bio safety laboratory and a development of measuring device of solar heat gain coefficient of fenestration system.