The characteristics of polycrystalline 3C-SiC microhotplates for high temperature M/NEMS (고온 M/NEMS용 3C-SiC 마이크로 히터 특성)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2008.11a
- /
- pp.252-252
- /
- 2008