• 제목/요약/키워드: Ultrasonic Spray Pyrolysis

검색결과 122건 처리시간 0.026초

Effects of post anneal for the INZO films prepared by ultrasonic spray pyrolysis

  • Lan, Wen-How;Li, Yue-Lin;Chung, Yu-Chieh;Yu, Cheng-Chang;Chou, Yi-Chun;Wu, Yi-Da;Huang, Kai-Feng;Chen, Lung-Chien
    • Advances in nano research
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    • 제2권4호
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    • pp.179-186
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    • 2014
  • Indium-nitrogen co-doped zinc oxide thin films (INZO) were prepared on glass substrates in the atmosphere by ultrasonic spray pyrolysis. The aqueous solution of zinc acetate, ammonium acetate and different indium sources: indium (III) chloride and indium (III) nitrate were used as the precursors. After film deposition, different anneal temperature treatment as 350, 450, $550^{\circ}C$ were applied. Electrical properties as concentration and mobility were characterized by Hall measurement. The surface morphology and crystalline quality were characterized by SEM and XRD. With the activation energy analysis for both films, the concentration variation of the films at different heat treatment temperature was realized. Donors correspond to zinc related states dominate the conduction mechanism for these INZO films after $550^{\circ}C$ high temperature heat treatment process.

초음파 분무 열분해법으로 제조한 ZnO막의 전기적, 구조적 특성에 미치는 인듐 확산 효과 (Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis)

  • 심대근;배성찬;마대영
    • 한국전기전자재료학회논문지
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    • 제14권10호
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    • pp.828-834
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    • 2001
  • Zinc oxide (ZnO) films deposited on indium (In) films were post-annealed in a rapid thermal anealing (RTA) system. The ZnO/In films were RTA-treated in air or a vacuum ambient. The crystallographic properties and surface morphologies of the films were studied before and after the RTA by X-ray diffraction(XRD) and scanning electron microscopy (SEM), respectively. The resistivity variation of the films with RTA temperature and time was measured by the 4-point probe method. Auger electron spectroscopy (AES) was carried out to figure out the redistribution of indium atoms in the ZnO films. The resistivity of the ZnO/In films decreased to 2$\times$10$\^$-3/ Ωcm by diffusion of the In. The In diffusion into the ZnO films roughened the surface of ZnO films. The results of depth profile by AES showed a hump of In atoms around ZnO/In interface after the RTA at 800 $\^{C}$. The effects of temperature time and ambient during the RTA on the structural and electrical properties of the ZnO/In films were discussed.

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초음파 분무법으로 제조한 ZnO:Al 박막의 전기 및 광학적 특성 (The electrical and optical properties of ZnO:Al films Prepared by ultrasonic spray Pyrolysis)

  • Lee, Soo-Chul;Moon, Hyun-Yeol;Lee, In-Chan;Ma, Tae-Young
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1999년도 하계종합학술대회 논문집
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    • pp.283-286
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    • 1999
  • Transparent conductive aluminum-doped ZnO(AZO) films Were prepared by a ultrasonic spray pyrolysis method at the substrate temperature below 23$0^{\circ}C$. A vertical type hot wall furnace was used as a reactor in the deposition system. Zinc acetate dissolved in methanol was selected as a precursor. The substrate temperature was varied from 18$0^{\circ}C$to 24$0^{\circ}C$. Aluminum (Al) was doped into ZnO films by incorporating anhydrous aluminum chloride (AlCl$_3$) in the zinc acetate solution. The proportion of the Al in the starting solution was varied from 0 wt % to 3.0 wt %. The crystallographic properties and surface morphologies of the films were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The resistivity of the films was measured by the Van der Pauw method, and the mobility and carrier concentration were obtained through the Hall effect measurements Transmittance was measured in the visible region. The effects of substrate temperature and aluminum content in the starling solution on the structural and electrical properties of the AZO films are discussed

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분무열분해법에 의해 합성된 장파장 자외선용 할로포스페이트계 형광체의 특성 (Characteristics of Halophosphate Phosphor for Long-wavelength UV Prepared by Spray Pyrolysis)

  • 손종락;강윤찬;박희동;윤순길
    • 한국재료학회지
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    • 제12권7호
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    • pp.555-559
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    • 2002
  • Blue-emitting $Sr_{10}$($PO$)$_{6}$ $Cl_2$:$Eu^{2+}$ and $_{(Sr,Mg) }$ 10/($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ phosphor particles for application of long-wavelength UV LED were prepared by ultrasonic spray pyrolysis. The luminescence characteristics under long- wave-length ultraviolet of the $Sr_{10}$ ($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ and (Sr,Mg)$_{10}$ ($PO_4$)$_{6}$ $Cl_2$:$^Eu{2+}$ phosphor particles prepared by the spray pyrolysis were compared with that of the commercial product. The PL intensity of the $Sr_{10}$ ($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ particles prepared by the spray pyrolysis was lower than that of the commercial $Sr_{10}$ ($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ particles because prepared $Sr_{10}$ ($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ phosphor particles had porous structure and hollow morphology. However, the PL intensity of the (Sr,Mg)$_{10}$($PO_4$)$_{6}$ $Cl_2$:$Eu^{2+}$ phosphor particles prepared by the spray pyrolysis was 8% higher than that of the commercial one. The high brightness of $(Sr,Mg)_{10}$ ($PO_4$)$_{6}$ $Cl_2$:Eu$^{2+}$ phosphor particles prepared by spray pyrolysis is due to the dense structure and high crystallinity of particles. The TEX>$(Sr,Mg)<_{10}$ ($PO_4$)$_{6}$ /$Cl_2$:$Eu^{ 2+}$ phosphor particles had main emission peak t 448 nm under long- wavelength ultraviolet.

초음파 분무 열분해법으로 합성한 PTCR Barium Titanate에 미치는 Y와 Mn의 효과 (Effects of Yittrium and Manganese on the PTCR Barium Titanate Synthesized by Ultrasonic Spray Pyrolysis)

  • 김복희;이정형;윤연현;최의석;정웅기
    • 한국세라믹학회지
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    • 제32권10호
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    • pp.1169-1177
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    • 1995
  • Barium nitrate and yittrium nitrate were dissolved into distilled water. Titaium hydroxide precipitated from titanium chloride with NH4OH was dissolved into nitric acid. Each aqueous solution was mixed for 12 hr in the composition of Ba1-xYxTiO3 (x=0.1∼0.6) and the concentration of mixed solution was 0.1 mol/ι. The mixed solution was sprayed with an ultrasonic atomizer and carried into an electric furnace which was kept at 900∼1000$^{\circ}C$ and pyrolyzed. Pyrolyzed powders were collected on the glass filter with vacuum pump. Aqueous Mn solutiion was added into the synthesized powders, mixed with ultrasonic vibration and sintered at 1300∼1400$^{\circ}C$. Synthesized powders were characterized with SEM, XRD, DT-TGA, and BET. Microsture and resistivity of sintered body were investigated with SEM and multimeter. The results of this experiment were as follows; 1) Yittrium dooped BaTiO3 powders were synthesized above 950$^{\circ}C$. 2) The average particle sizes of powders from BET specific surface area and SEM were 0.045$\mu\textrm{m}$, 0.046$\mu\textrm{m}$ respectively. The particle size distribution was narrow in the range of 0.1∼1.0$\mu\textrm{m}$ from SEM. 3) Room temperature resistivity and pmax/pmin of 0.4 mol% Y doped specimen which was sintered at 1375$^{\circ}C$ were 102∼3 (Ω$.$cm) and 102∼3 respectively. 4) Room temperature resistivity and pmax/pmin of 0.4 mol% Y and 0.04 at% Mn added specimen which was sintered at 1375$^{\circ}C$ were 102∼3 (Ω$.$cm) and 106∼7 respectively. 5) Grain growth was inhibited with addition of Y2O3 and enhanced in addition of Mn by 0.05 atm%.

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분무열분해로 합성한 수전해용 Co3O4의 입자형태에 따른 산소발생 활성에 관한 연구 (A Study on Oxygen Evolution Activity of Co3O4 with different morphology prepared by Ultrasonic Spray Pyrolysis for Water Electrolysis)

  • 김인겸;나인욱;박세규
    • Korean Chemical Engineering Research
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    • 제54권6호
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    • pp.854-862
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    • 2016
  • 최근 화석연료를 대체할 친환경 신재생에너지에 대한 요구가 증가하면서 수소에너지가 미래 대체에너지원으로서 주목받고 있다. 수소를 생산하는 방법 중 수전해 기술은 에너지효율과 안정성이 뛰어난 장점이 있지만, 산소발생반응시 발생하는 높은 과전압은 여전히 단점으로 지적되고 있다. 본 연구에서는 분무열분해 공정을 통하여 Co 전구체로부터 $Co_3O_4$를 제조하였다. 또한, urea, sucrose, citric acid의 유기물첨가제를 사용하여 다양한 입자 크기와 표면형상을 가지는 $Co_3O_4$를 제조하였고, 필요에 따라 추가로 열처리를 실시하였다. 합성한 $Co_3O_4$의 물리적 특성을 분석하기 위해 X-선 회절 분석(XRD)으로 결정성을 조사하였고, 주사전자현미경(SEM)과 투과전자현미경(TEM)으로 입자형상 및 표면을 분석하였다. 질소 흡 탈착 시험을 통해 촉매의 비표면적 및 기공부피를 측정하였고, 질소도핑을 확인하기 위해 X-선 광전자 분광법(XPS)을 사용하였다. 촉매의 산소발생반응 활성을 알아보기 위해 3전극 셀에서 선형주사전위법(LSV)으로 전기화학적 거동을 분석하였다. 첨가제를 사용하지 않은 $Co_3O_4$가 가장 우수한 활성을 보였고, 이는 분무열분해법을 통하여 상대적으로 작은 입자형성과 높은 비표면적의 영향인 것으로 판단된다.

초음파분무열분해법에 의한 TPSZ의 합성 및 특성 (Synthesis and Characterization of Titania-Partially-Stabilized Zirconia by Ultrasonic Spray Pyrolysis)

  • 서기용;이창섭
    • 대한화학회지
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    • 제44권6호
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    • pp.592-599
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    • 2000
  • 여러 가지 온도, 조성 및 농도에서 이성분계 세라믹 복합체 TPSZ(titania partially-stabilized zirconia)의 미분말을 초음파분무열분해법에 의하여 합성하였으며, 합성공정인자가 분체특성에 미치는 영향을 검토하고, 합성된 분체의 특성을 조사하였다. 출발용액의 제조는 금속염의 농도가 0.025~0.1 M이 되도록 증류수에 용해하고, 그 조성비는 $ZrO_2$ 90~97.5 wt%에 $TiO_2$ 2.5~10 wt%가 되도록 하였다. 합성시 열분해 영역에서의 온도는 건조부가 400~550$^{\circ}C$, 반응부는 800~1100$^{\circ}C$로 하였으며, 합성된 분체는 습식으로 포집하여 110$^{\circ}C$에서 3시간 동안 건조하였다. 합성된 미분체의 특성을 Raman Spectroscopy, X-ray diffraction(XRD), Scanning Electron Microscopy(SEM), Transmission Electron Microscopy (TEM) 및 Particle Size Analyzer(PSA)로써 조사하였고, Inductively Coupled Plasma-Atomic Emission Spectroscopy(ICP-AES)로써 순도 및 조성을 분석하였다.

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A Volatile Organic Compound Sensor Using Porous Co3O4 Spheres

  • Kim, Tae-Hyung;Yoon, Ji-Wook;Lee, Jong-Heun
    • 한국세라믹학회지
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    • 제53권2호
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    • pp.134-138
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    • 2016
  • Porous $Co_3O_4$ spheres with bimodal pore distribution (size: 2-3 nm and ~ 30 nm) were prepared by ultrasonic spray pyrolysis of aqueous droplets containing Co-acetate and polyethylene glycol (PEG), while dense $Co_3O_4$ secondary particles with monomodal pore distribution (size: 2-3 nm) were prepared from the spray solution without PEG. The formation of mesopores (~ 30 nm) was attributed to the decomposition of PEG. The responses of a porous $Co_3O_4$ sensor to various indoor air pollutants such as 5 ppm $C_2H_5OH$, xylene, toluene, benzene, and HCHO at $200^{\circ}C$ were found to be significantly higher than those of a commercial sensor using $Co_3O_4$ and dense $Co_3O_4$ secondary particles. Enhanced gas response of porous $Co_3O_4$ sensor was attributed to high surface area and the effective diffusion of analyte gas through mesopores (~ 30 nm). Highly sensitive porous $Co_3O_4$ sensor can be used to monitor various indoor air pollutants.

Gd$_2O_3$:Eu phosphor particles with spherical and filled morphology

  • Roh, Hyun-Sook;Kang, Yun-Chan;Park, Hee-Dong;Park, Seung-Bin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.253-256
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    • 2002
  • $Gd_2O_3$:Eu phosphor particles were prepared by largescale ultrasonic spray pyrolysis process. The morphological control of $Gd_2O_3$:Eu particles in spray pyrolysis was performed by adding polymeric precursors into spray solution containing nitrate salts. The effect of composition and amount of polymeric precursors on the morphology, crystallinity, and photoluminescence characteristics of $Gd_2O_3$:Eu particles was investigated. The influence of chain length of PEG on the morphology and photoluminescence intensity was investigated. $Gd_2O_3$:Eu particles prepared from aqueous solution containing no polymeric precursors had a hollow structure and rough surfaces after annealing process. The phosphor particles prepared from solution containing 0.1M CA and 0.lM PEG with high molecular weight as 1,500 had a spherical and filled morphology and the highest photoluminescence intensity, which was 48% higher than that of the $Y_2O_3$:Eu commercial product.

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