Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis

초음파 분무 열분해법으로 제조한 ZnO막의 전기적, 구조적 특성에 미치는 인듐 확산 효과

  • 심대근 (경상대학교 전기공학과 석사과정 및 공학연구원) ;
  • 배성찬 (경북대학교 전자공학부) ;
  • 마대영 (경상대학교 전기전자공학부 교수 및 공학연구원 연구원)
  • Published : 2001.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

Zinc oxide (ZnO) films deposited on indium (In) films were post-annealed in a rapid thermal anealing (RTA) system. The ZnO/In films were RTA-treated in air or a vacuum ambient. The crystallographic properties and surface morphologies of the films were studied before and after the RTA by X-ray diffraction(XRD) and scanning electron microscopy (SEM), respectively. The resistivity variation of the films with RTA temperature and time was measured by the 4-point probe method. Auger electron spectroscopy (AES) was carried out to figure out the redistribution of indium atoms in the ZnO films. The resistivity of the ZnO/In films decreased to 2$\times$10$\^$-3/ Ωcm by diffusion of the In. The In diffusion into the ZnO films roughened the surface of ZnO films. The results of depth profile by AES showed a hump of In atoms around ZnO/In interface after the RTA at 800 $\^{C}$. The effects of temperature time and ambient during the RTA on the structural and electrical properties of the ZnO/In films were discussed.

Keywords

References

  1. Sensors and Actuators B: Chemical v.69 no.1-2 Electrical and CO gas sensing properties of layered ZnO/CuO sensor Jeong Duk Choi;Gyeong Man Choi
  2. Sensors and Actuators B: Chemical v.36 no.1-3 Doping Effect of SnO₂on Gas Sensing Characteristics of Sputtered ZnO Thin Film Chemical Sensor H. Nanto;T. Morita;H. Habara;K. Kondo;T. Minami;Y. Douguchi
  3. J. Mater. Sci. v.11 Effects of Aluminum Content and Substrate Temperature on the Structural and Electrical Properties of Al-doped ZnO Films Prepared by Ultrasonic Spray Pyrolysis T. Y. Ma;S. C. Lee
  4. J. Appl. Phys. v.81 no.12 Structural, Electrical and Optical Properties of Al-doped ZnO Films Prepared by Radio Frequency Magnetron Sputtering K. H. Kim;K. C. Park;T. Y. Ma
  5. Solar Energy Materials and Solar Cells v.67 no.1-4 Improved Jsc in CIGS Thin Film Solar Cells using a Transparent Conducting ZnO:B Window Layer Y. Hagiwara;T. Nakada;A. Kunioka
  6. J. Appl. Phys. v.83 Preferred Orientation and Piezoelectricity in Sputtered ZnO Films J. G. E. Gardeniers;Z. M. Rittersma;G. J. Burger
  7. Sensors and Actuators B: Chemical v.23 no.2-3 Detection of Combustible Gases by means of a ZnO-on-Si Surface Acoustic Wave (SAW) Delay Line V. I. Anisimkin;M. Penza;A. Valentini;F. Quaranta;L. Vasanelli
  8. Jpn. J. Appl. Phys. v.125 Group Ⅲ Impurities Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering T. Minami;H. Sato;H. Nanto;S. Takata
  9. Sensor Actuat. B-Chem. v.46 Zinc Oxide ThinFilm Doped with $Al_2O_3,\;TiO_2\;and\;V_2O_5$ as Sensitive Sensor for Trimethylamine Gas Sung-Hyun Park;Jee-Yeol Ryu;Hy다-Hwan Choi;Tae-Ha Kwon
  10. Computational Materals Science v.22 no.1-2 Electronic structure of twist grainboundaries in ZnO and the effect of Sb doping Helder S. Domingos;Paul D. Bristowe
  11. Sensors and Actuators B: Chemical v.66 no.1-3 Sensing characteristics of ZnO-based NOx sensor Naoto Koshizaki;Toshie Oyama
  12. Korean Appl. Phys v.7 Electrical, Optical Properties and Hydrogen Plasma Deposited Durabilities of Pyrosol Deposited ZnO:Al Films J. Song;G. Kang;K. H. Yoon;W. Cho;K. S. Lim
  13. Sensor Actuat. B-Chem. v.24;25 A Novel Method for the NH3 Sensors Based on ZnO-In Thin Films G. Sberveglieri;S. Groppelli;P. Nelli;A. Tintinelli;G. Giunta
  14. Thin solid Films v.376 Structural and Morphology of High Quality In-doped ZnO Films obtained by Spray Pyrolysis M. Miki-Yoshida;F. Paraguay-Delgado;W. Estrada-Lopez;E. Andrade
  15. Thin Solid Films v.333 Electrical and Optical Properties of Fluorine-doped ZnO Thin Flims Prepared by Spray Pyrolysis A. Sanchez-Juarez;A. Tiburcio-Silver;A. Ortiz;E. P. Zironi;J. Richards
  16. Jpn. J. Appl. Phys. v.31 Deposition of Aluminum-doped Zinc Oxide Thin Films by Spray Pyrolysis D. Goyal;P. Solanki;B. Marathe;M. Takwale;V. Bhide
  17. J. Mater. Sci. Lett. v.17 Growth and Characterization of Sprayed ZnO:Ga Thin Films K. T. Ramakrishna Reddy;R. W. Miles
  18. Solar Energy Materials and Solar Cells v.70 no.3 Preparation of Au/ZnO Nanocomposites by Radio Frequency Co-sputtering U. Pal;E. Aguila Almanza;O. Vazquez Cuchillo;N. Koshizaki;T. Sasaki;S. Terauchi
  19. Solar Energy Materials and Solar Cells v.67 no.1-4 Performance Improvement of CIGS-based Modules by Depositing High-quality Ga-doped ZnO Windows with Magnetron Sputtering Baosheng Sang;Katsumi Kushiya;Daisuke Okumura;Osamu Yamase
  20. Jpn. J. Appl. Phys. v.24 Optical properties of Al-doped ZnO Thin Films Prepared by RF Magnetron Sputtering T. Minami;H. Nanto;S. Takada
  21. Sensors and Actuators B: Chem. v.55 no.1 Electrical and reducing gas sensing properties of ZnO and ZnO-CuO thin films fabricated by spin coating method Hong Youl Bae;Gyeong Man Choi
  22. Solar Energy Materials and Solar Cells v.52 no.3 Optical Transmittance and Photoconductivity Studies on ZnO : Al Thin Films Prepared by the Sol-Gel Technique A. E. Jimenez Gonzalez;J. A. Soto Urueta
  23. Surface and Coatings Technology v.74-75 Design of Piezoelectric Thin Films in the System AlN-ZnO C. Kunisch;H. Holleck
  24. Surface and Coatings Technology v.110 no.1-2 Chemical changes of ITO/p and ZnO/p interfaces as a function of deposition parameters M. A. Martinez;M. T. Gutierrez;C. Maffiotte
  25. Thin Solid Films v.197 ZnO Transparent Thin Films Deposited by Ultrasonic Spray Pyrolysis for Solar Energy Conversion A.Tiburcio-Silver;J. C. Joubert;M. Labeau
  26. Jpn. J. Appl. Phys. v.35 no.12A Substrate Tempertature Dependence of ZnO Films Prepared by Ultrasonic Spray Pyrolysis T. Y. Ma;S. H. Kim;H. Y. Moon;G. C. Park;Y. J. Kim;K. W. Kim
  27. J. Appl. Phys. v.71 Textured Aluminum-doped Zinc Oxide Thin Films from Atmopheric Pressure Chemical-vapor Deposition J. Hu;R. G. Gordon
  28. Thin Solid Films v.246 Aluminum Content dependence of Milky Transparent Conducting ZnO:Al Films with Textured Surface Prepared by d. c. Magnetron Sputtering H. Sato;T. Minami;Y. Tamura;S. Takada;T. Mouri;N. Ogawa
  29. J. Mater. Sci. v.9 Effects of Vapor Annealing on the Properties of the ZnO Films Prepared by Spray Pyrolysis T. Y. Ma;H. Y. Moon
  30. Phase Transformations in Metals and Alloys D. A. Porter;K. E. Easterling