• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.416-417
• /
• 2005

In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

• Proceedings of the KIEE Conference
• /
• 1998.11a
• /
• pp.79-81
• /
• 1998

This paper presents analytic and numerical analysis of ultrasonic motor, specially linear motion ultrasonic machine. For rough estimation of characteristics of linear ultrasonic motor, the analytic method is used and a three-dimensional numerical analysis with experimental material data using ABAQUS, is performed. The validity of analysis is confirmed by comparing experimental results with numerical ones.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.11a
• /
• pp.200-203
• /
• 2000

The application of the ultrasonic nozzle has been extended because it is possible atomization of liquid material. In this study, the characteristics of the ultrasonic nozzle and ceramic oscillator were investigated. The oscillator for the ultrasonic nozzle were made piezoelectric ceramic of Pb[($Sb_{1/2}$ $Nb_{1/2}$)$_{0.035}$-($Mn_{1/3}$$Nb_{2/3}$)$_{0.065}$-($Zr_{0.49}$$Ti_{0.51}$)$_{0.90}$]$O_3$. The electromechanical coupling factor($k_p$) and mechanical quality factor(Qm) showed the values of 0.555, 1, 214 respectively when the Zr/Ti ratio was 49/51. Moreover, this oscillator will have the temperature stability because it's curie temperature is 322[$^{\circ}C$]. The driving current of ultrasonic nozzle showed the value of 80[mA] when the driving time was lO[min.]. Also, The surface temperature of ceramic oscillator showed 80[$^{\circ}C$] at driving time lO[min.] We knew that the ultrasonic nozzle had stabile driving above 10[min.].

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.21 no.9
• /
• pp.1-11
• /
• 2022

Recently, there has been continuous technological development in the semiconductor industry, and semiconductor manufacturing technologies are being advanced and highly integrated. For this reason, ceramic material having excellent heat resistance, wear resistance, and conductivity are used as components in semiconductor manufacturing. Among them, the probe card's space transformer is used as ceramic material to prevent electronic signal noise during the electrical die sorting of semiconductor function testing. However, implementing a bulk-type space transformer with a thickness of 5.6 mm or more is challenging, and thus it is produced in a structure with a stacked ceramic film. The stacked space transformer has low productivity because it is difficult to ensure hole clogging and a precise shape. In this research, an ultrasonic horn is designed to manufacture a bulk-type ceramic space transformer through ultrasonic drilling. Vibration characteristics were analyzed according to the ultrasonic horn, and the natural frequency was measured.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.21 no.1
• /
• pp.49-52
• /
• 2008

In this study, multilayer structured ultrasonic linear motor was simulated using Atila for investigating its optimum driving conditions. The ultrasonic linear motors mainly consist of an ultrasonic vibrator to generate elliptical displacement. The ultrasonic linear motor simulated in this paper was the use of the 1st longitudinal(Ll) and 4th bending vibrations (B4). Whit the increase of the number of piezoelectric actuator layers, displacement of node was increased. Maximum total displacement of node was about $3,91{\mu}m$ at the 13 layered ultrasonic motor under 5 V.

• 유체기계공업학회:학술대회논문집
• /
• 2003.12a
• /
• pp.101-106
• /
• 2003

In this work, mixing phenomena in the mixing chamber of a ultrasonic micromixer are analyzed through an analytical approach. A simplified 2-dimensional model for the ultrasonic micromixer is presented. Analytical solutions for fluid flow induced by ultrasonic waves are obtained through successive approximations method. From simulation results on thermal diffusion in the mixing chamber, effects of relative location, size, and vibration frequency of a piezoelectric material and aspect ratio of the mixing chamber on mixing performance of the ultrasonic micromixer are investigated. Finally, design guidelines for the ultrasonic micromixer are suggested based on the parametric study.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.11a
• /
• pp.177-180
• /
• 2000

In this paper, we studied efficiency improvement of linear ultrasonic motor using projection. The principle of ultrasonic motor is to use an elliptic motion generated at the side of the vibrator, and the elliptic motion of the ultrasonic motor was obtained by complex oscillation of L$_1$-B$_4$ mode. As the experimental results, the efficiency of linear ultrasonic motor without projection was 1.52[%] when applied voltage was 56[V] in resonance frequency 58.4[kHz]. The efficiency of linear ultrasonic motor using projection was 3.36[%] when applied voltage was 56[V] in resonance frequency 58.4[kHz]. The efficiency was improved by projection.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.06a
• /
• pp.272-273
• /
• 2007

In this paper, ultrasonic nozzle and driving circuit were manufactured, respectively. And then, their electrical properties. were investigated. Ultrasonic nozzle was fabricated using PSN-PMN-PZT ceramics showing excellent piezoelectric characteristics. In order to drive ultrasonic nozzle, PWM controller(KA3525A) was used. The purpose of this study is to find the optimal driving condition of ultrasonic. nozzle. Accordingly electrical and temperature characteristic of ultrasonic driving system were investigated as a function of the input voltage.

• Proceedings of the KSME Conference
• /
• 2001.06a
• /
• pp.78-83
• /
• 2001

It's required mechanical properties of in-service facilities to maintain safety operation in power plants as well as chemical plants. In this study the four classes of the thermally aged 1Cr-1Mo-0.25V specimens were prepared using an artificially accelerated aging method at $630^{\circ}C$. Ultrasonic tests, tensile tests, $K_{IC}$ tests and hardness tests were performed in order to evaluate the degree of degradation of the material. The mechanical properties were decreased as degraded, but the attenuation coefficient and the harmonic generation level of a ultrasonic signal were increased. Expecially the nonlinear parameter of the signal is sensitive and will be a good parameter to evaluate the material degradation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1999.05a
• /
• pp.669-672
• /
• 1999

In this paper, we studied the properties of small-size disk-type ultrasonic motor using travelling wave for the application to the precise control robotic joint motor and fabricated it. The diameter of the ultrasonic motor fabricated was 13mm. Also, the piezoelectric vibrator was constructed by piezoelectric ceramic and elastic material. The piezoelectric ceramic was composed to PZ-PT-PMN which was shown the high electromechanical stability under high vibration level and stainless steel was used as the elastic material in which configuration was disk-type. To conform the capability of application to robotic motor, we measured the change of rotational speed according to applied voltage and applied frequency. As the results, the small-size disk-type ultrasonic motor was able to fabricate, and the revolution speed was 350 (rpm) when input voltage was 55 (Vrms) and applied frequency 160.4 IkHz] under pre-load.