• 제목/요약/키워드: Ultrashort laser pulse

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극초단펄스 레이저에 의한 크롬박막 미세가공 (Ablation of Cr Thin Film on Glass Using Ultrashort Pulse Laser)

  • 김재구;신보성;장원석;최지연;장정원
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.620-623
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    • 2003
  • The material processing by using ultrashort pulse laser, in recently, is actively applying into the micro machining and nano-machining technology since ultrashort pulse has so faster than the time which the electrons energy absorbing photon energy is transmitted to surrounding lattice-phonon that it has many advantages in point of machining. The micro machining of metallic thin film on the plain glass is widely used in the fields such as mask repairing for semiconductor, fabrication of photonic crystal, MEMS devices and data storage devices. Therefore, it is important to secure the machining technology of the sub-micron size. In this research, we set up the machining system by using ultrashort pulse laser and conduct on the Cr 200nm thin film ablation experiments of spot and line with the variables such as energy, pulse number, speed, and so on. And we observed the characteristics of surrounding heat-affected zone and by-products appeared in critical energy density and higher energy density through SEM, and also examined the machining features between in He gas atmosphere which make pulse change minimized by nonlinear effect and in the air. Finally, the pit size of 0.8${\mu}{\textrm}{m}$ diameter and the line width of 1${\mu}{\textrm}{m}$ could be obtained.

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Ultrashort Pulsed Laser Machining for Biomolecule Trapping

  • Choi, Hae-Woon;Farson, Dave F.;Lee, L.James;Lee, Ho
    • Journal of the Optical Society of Korea
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    • 제13권3호
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    • pp.335-340
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    • 2009
  • Ultrashort pulse laser drilling of polycarbonate track-etched membrane (pTEM) material was used to fabricate a mouse embryo cell trapping device. Holes with a diameter of $2{\mu}m$ to $5{\mu}m$ were fabricated on a $10{\mu}m$ thick membrane using a femtosecond laser with a 150 fs pulse width and 775 nm wavelength and multiple-pulse irradiation. In cell trapping tests, the overall cell occupancy of the machined holes in the fabricated pTEM was found to be more than 80%. The results of a single pulse and multiple pulse irradiation were compared in terms of the surface quality. It was generally found that a single pulse with high energy was less desirable than irradiation with multiple pulses of lower energy.

Effects of Temperature Coefficients for Dielectric Constants on Thermoreflectances and Thermal Responses of Metal Thin Films Exposed to Ultrashort Pulse Laser Beams

  • Seungho Park
    • International Journal of Air-Conditioning and Refrigeration
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    • 제10권1호
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    • pp.1-9
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    • 2002
  • Effects of temperature coefficients fur dielectric constants on transient reflectances and thermal responses have been investigated for a metal(gold) thin-film during ultrashort pulse laser heating. Heating processes are simulated using the conventional conduction model(parabolic one-step, POS), the parabolic tow-step model(PTS), the hyperbolic two-step model(HTS). Results fro the HTS model are very similar to those from the PTS model, since the laser heating time in this study is considerably greater than the electron relaxation time. PTS and HTS models, however, result in completely different temperature profiles from those obtained by the POS model due to slow electron-lattice interactions compared to laser pulse duration. Transient reflectances are directly estimated from the linear relationship between electron temperature and complex dielectric constants, while conventional approaches assume that the change in reflectances is proportional to that in temperatuer. Reflectances at the front surface vary considerably for various dielectric constants, while those at the rear surface remain unchanged relatively.

Measurement and Prediction of Damage Threshold of Gold Films During Femtosecond Laser Ablation

  • Balasubramani, T.;Kim, S.H.;Jeong, S.H.
    • 한국레이저가공학회지
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    • 제11권4호
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    • pp.13-20
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    • 2008
  • The damage threshold measurement of gold films is carried out with ultrashort-pulse laser. An enhanced two temperature model is developed to encounter the limitation of linear modeling during ultrashort pulse laser ablation. In which the electron heat capacity is calculated using a quantum mechanical approach based on a Fermi-Dirac distribution, temperature-dependent electron thermal conductivity valid beyond the Fermi temperature is adopted, and reflectivity and absorption coefficient are estimated by applying a temperature-dependent electron relaxation time. The predicted damage threshold using the proposed enhanced modelclosely agreed with experimental results, demonstrating the importance of considering transient thermal and optical properties in the modeling of ultrashort pulse laser ablation.

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극초단 펄스레이저의 분광학 응용 (Spectroscopic Applications of Ultrashort Pulse Lasers)

  • 김동호
    • 한국광학회지
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    • 제1권1호
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    • pp.87-97
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    • 1990
  • With the recent advent of various ultrashort pulse lasers, time-resolved laser spectroscopic techniques have been widely recognized as versatile tools to study ultrafast phenomena in many research areas. These techniques are currently being employed not only to study atomic and molecular physics but to characterize the excited state or the carrier dynamics on surfaces of semiconductors, metals and thin layer materials. Also the sweetching speed measurement of ultrafast electro-optic devices using ultrashort laser pulses becomes important in high-speed electronics. Here, some principles of spectroscopic techniques with ps or fs lasers and their applications are summarized briefly.

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A Novel Spectral Analysis of Ultrashort Pulse Transmission Using the Pulse-Ordering Concept

  • Jae-hong;Hi-chang Chung;Jin-sung Jun;Yong-sun Oh
    • 한국통신학회논문지
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    • 제25권7A호
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    • pp.986-993
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    • 2000
  • In this paper, we analyze transmission characteristics of ultrashort laser pulses using the properties of high-order pulses which are systematically obtained following their orders. The high-order pulses are easily derived from a modified PRS system model. But we make clear they are very useful to cover wider area and to show more accurate transmission characteristics of ultrashort pulses than Gaussian or Sech pulse approximations used conventionally. These are based on the fact that the spectra and bandwidths of the high-order pulses are geautifully related to their orders. First modifying the generalized PRS system model, we propose a new model for deriving any type of high-order pulse. And we offer a novel analysis method of ultrashort pulse transmission varying the order of the pulse from n=1 to n=100, we obtain spectra of ultrashort pulses with 1(ps)∼150(fs) FWHM's, which are widely used in optical pulse communications. One-step further, we derive PSD's of their pulse-tr ins when they are applied to Unipolar signaling scheme. These PSD's are decided in the range of possible pulse intervals. All of these results are not only coincided with some conventional experimental works but will be applied to any pioneering ultrashort pulse in the future.

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High Power 1.83 GHz Femtosecond Yb-doped Fiber Laser Incorporating Repetition Rate Multipliers

  • In Chul Park;Eun Kyung Park;Ye Jin Oh;Hoon Jeong;Ji Won Kim;Jeong Sup Lee
    • Current Optics and Photonics
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    • 제7권6호
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    • pp.732-737
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    • 2023
  • A high-power Yb-doped femtosecond (fs) fiber laser at a repetition rate of 1.83 GHz is reported. By employing a 5-stage repetition rate multiplier, the repetition rate of the mode-locked master oscillator was multiplied from 57.1 MHz to 1.83 GHz. The ultrashort pulse output at 1.83 GHz was amplified in a two-stage Yb-doped fiber amplifier, leading to >100 W of fs laser output with a pulse duration of 290 fs. The theoretical pulse width along the fiber was simulated, showing that it was in good agreement with experimental results. Further improvement in power scaling is discussed.