• Title/Summary/Keyword: Ultrashort laser

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Micro-machining of nickel by picosecond laser ablation (피코초 레이저를 이용한 니켈의 미세가공 특성)

  • Shin D.S.;Lee J.H.;Suh J.;Noh J.W.;Chung Y.W.;Kim J.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.653-654
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    • 2006
  • In case of ultrashort laser ablation of metals, the transfer of energy from the electronic system causing strong absorption of laser light to the lattice needs relaxation times of the order of some picoseconds. Under the above theoretical background, nickel was ablated using femtosecond, picosecond and nanosecond laser. As a result, nickel ablation by picosecond laser and femtosecond laser, which are called ultrashort laser, has similar machinability because of relaxation time of metals, whereas nanosecond Nd:YAG laser has lower absorption, higher thermalization effect in comparison with ultrashort laser.

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Ablation of Cr Thin Film on Glass Using Ultrashort Pulse Laser (극초단펄스 레이저에 의한 크롬박막 미세가공)

  • 김재구;신보성;장원석;최지연;장정원
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.620-623
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    • 2003
  • The material processing by using ultrashort pulse laser, in recently, is actively applying into the micro machining and nano-machining technology since ultrashort pulse has so faster than the time which the electrons energy absorbing photon energy is transmitted to surrounding lattice-phonon that it has many advantages in point of machining. The micro machining of metallic thin film on the plain glass is widely used in the fields such as mask repairing for semiconductor, fabrication of photonic crystal, MEMS devices and data storage devices. Therefore, it is important to secure the machining technology of the sub-micron size. In this research, we set up the machining system by using ultrashort pulse laser and conduct on the Cr 200nm thin film ablation experiments of spot and line with the variables such as energy, pulse number, speed, and so on. And we observed the characteristics of surrounding heat-affected zone and by-products appeared in critical energy density and higher energy density through SEM, and also examined the machining features between in He gas atmosphere which make pulse change minimized by nonlinear effect and in the air. Finally, the pit size of 0.8${\mu}{\textrm}{m}$ diameter and the line width of 1${\mu}{\textrm}{m}$ could be obtained.

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Measurement and Prediction of Damage Threshold of Gold Films During Femtosecond Laser Ablation

  • Balasubramani, T.;Kim, S.H.;Jeong, S.H.
    • Laser Solutions
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    • v.11 no.4
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    • pp.13-20
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    • 2008
  • The damage threshold measurement of gold films is carried out with ultrashort-pulse laser. An enhanced two temperature model is developed to encounter the limitation of linear modeling during ultrashort pulse laser ablation. In which the electron heat capacity is calculated using a quantum mechanical approach based on a Fermi-Dirac distribution, temperature-dependent electron thermal conductivity valid beyond the Fermi temperature is adopted, and reflectivity and absorption coefficient are estimated by applying a temperature-dependent electron relaxation time. The predicted damage threshold using the proposed enhanced modelclosely agreed with experimental results, demonstrating the importance of considering transient thermal and optical properties in the modeling of ultrashort pulse laser ablation.

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Spectroscopic Applications of Ultrashort Pulse Lasers (극초단 펄스레이저의 분광학 응용)

  • 김동호
    • Korean Journal of Optics and Photonics
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    • v.1 no.1
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    • pp.87-97
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    • 1990
  • With the recent advent of various ultrashort pulse lasers, time-resolved laser spectroscopic techniques have been widely recognized as versatile tools to study ultrafast phenomena in many research areas. These techniques are currently being employed not only to study atomic and molecular physics but to characterize the excited state or the carrier dynamics on surfaces of semiconductors, metals and thin layer materials. Also the sweetching speed measurement of ultrafast electro-optic devices using ultrashort laser pulses becomes important in high-speed electronics. Here, some principles of spectroscopic techniques with ps or fs lasers and their applications are summarized briefly.

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Effects of Temperature Coefficients for Dielectric Constants on Thermoreflectances and Thermal Responses of Metal Thin Films Exposed to Ultrashort Pulse Laser Beams

  • Seungho Park
    • International Journal of Air-Conditioning and Refrigeration
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    • v.10 no.1
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    • pp.1-9
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    • 2002
  • Effects of temperature coefficients fur dielectric constants on transient reflectances and thermal responses have been investigated for a metal(gold) thin-film during ultrashort pulse laser heating. Heating processes are simulated using the conventional conduction model(parabolic one-step, POS), the parabolic tow-step model(PTS), the hyperbolic two-step model(HTS). Results fro the HTS model are very similar to those from the PTS model, since the laser heating time in this study is considerably greater than the electron relaxation time. PTS and HTS models, however, result in completely different temperature profiles from those obtained by the POS model due to slow electron-lattice interactions compared to laser pulse duration. Transient reflectances are directly estimated from the linear relationship between electron temperature and complex dielectric constants, while conventional approaches assume that the change in reflectances is proportional to that in temperatuer. Reflectances at the front surface vary considerably for various dielectric constants, while those at the rear surface remain unchanged relatively.

Ultrashort Pulsed Laser Machining for Biomolecule Trapping

  • Choi, Hae-Woon;Farson, Dave F.;Lee, L.James;Lee, Ho
    • Journal of the Optical Society of Korea
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    • v.13 no.3
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    • pp.335-340
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    • 2009
  • Ultrashort pulse laser drilling of polycarbonate track-etched membrane (pTEM) material was used to fabricate a mouse embryo cell trapping device. Holes with a diameter of $2{\mu}m$ to $5{\mu}m$ were fabricated on a $10{\mu}m$ thick membrane using a femtosecond laser with a 150 fs pulse width and 775 nm wavelength and multiple-pulse irradiation. In cell trapping tests, the overall cell occupancy of the machined holes in the fabricated pTEM was found to be more than 80%. The results of a single pulse and multiple pulse irradiation were compared in terms of the surface quality. It was generally found that a single pulse with high energy was less desirable than irradiation with multiple pulses of lower energy.

Effects of transient thermo reflectance on the thermal responses of metal thin film exposed to ultrashort laser heating (극초단 펄스레이저 광이 입사된 금속박막의 열적반응 중 비정상반사율의 영향)

  • 박승호;국정진
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.11 no.4
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    • pp.528-536
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    • 1999
  • This work studies the effects of transient reflectance on the thermal responses of a metal(gold) thin-film during ultrashort laser heating. The heating process is calculated using the conventional conduction model (parabolic one-step: POS), parabolic two-step model (PTS) with and without variable properties, hyperbolic two-step model (HTS). Results from the HTS model are very similar to those from the PTS model, since the laser heating time in this study is greater than the electron relaxation time. PTS model with variable properties, however, results in totally different temperature profiles compared to those from POS models or calculation with constant properties. Transient reflectances are estimated from electron temperature distributions and based on the linear relationship between the electron temperature and complex dielectric constants. Reflectance of the front surface can be changed with respect to dielectric constants, while those of the rear surface remain unchanged.

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Novel Design of Ultrashort Pulse Excimer Laser Amplifier System II (Temporal Gain Control and Phase Distortion/ASE Characteristics)

  • Lee, Young-Woo
    • Journal of information and communication convergence engineering
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    • v.1 no.4
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    • pp.228-232
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    • 2003
  • The previous design work for very large final amplifier pumped by electron beam module was described from the point of view of energy characteristics. In this work, the design problems for phase front distortion, ASE, and gain control in large aperture amplifier are presented in detail.