• Journal of Korean Society of Environmental Engineers
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• v.38 no.7
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• pp.364-370
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• 2016

In this paper, the technique that determines efficient process combinations for the ultrapure water production was studied. The ultrapure water is one of the industrial water used in industrial activity and required in the advanced technology integrated industry. It is produced by combined process including filtration, ion exchange processes, the reverse osmosis (RO) process, degassing (DG) process and UV-oxidation (UVox) process. An ultrapure water production process consists of 15-20 different water treatment unit process. In this study, a pilot plant was built and operated to research the design parameters for the individual process. Through the pilot plant operation, 19 effective combinations were optimized among various processes. And then, 11 of them satisfied the final quality of the ultrapure water. The stability and economic feasibility were evaluated about the final 11 process combinations.

• Proceedings of the Membrane Society of Korea Conference
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• 1991.10a
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• pp.17-26
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• 1991

It can be said that the current ULSI technology has been supported and/or accomplished by a major challenge to the clean room environment and the ultrapure water equipment manufacturers as to contamination control. The required improvement in ultrapure water quality, which is shown in Figure 1, would not have been possible without significant improvements in membrane performance and enhancements in analytical capabilities.

• Environmental Engineering Research
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• v.10 no.3
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• pp.144-154
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• 2005

The use of ozone gained acceptance in the production of ultrapure water because of its powerful oxidizing ability. Ozone is currently used to deactivate microorganisms and remove organic contaminants. However, interest also exists in using radical species, which arc stronger oxidants than ozone, in such processes. One means of producing radical species is by corona discharge. This work investigates the use of a novel pulseless corona-discharge system for the removal of organic substances in ultrapure water production. The method combines corona discharge with electrohydrodynamic spraying of oxygen, forming microbubbles. Experimental results show that pulseless corona discharge effectively removes organics, such as phenol and methylene blue, in deionized water. The corona-discharge method is demonstrated to be comparable to the direct use of ozone at a high-applied voltage. The results also show that a minimum applied voltage exists for operation of the corona-discharge method. In this work, the minimum applied voltage is approximately 4.5 kV. The kinetic rate or phenol degradation in the reactor is modeled. Modeling results show that the dominant species of the pulseless corona-discharge reactor are hydroxyl radical and aqueous electron. Several radical species produced in the pulseless corona-discharge process are identified experimentally. The. major species are hydroxyl radical, atomic hydrogen species, and ozone.

• Journal of Microbiology and Biotechnology
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• v.7 no.3
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• pp.200-203
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• 1997

Bacteria isolated from ultrapure water made by a high-purity water manufacturing system in a semiconductor manufacturing plant were classified into two groups which either grew in diluted nutrient broth medium (oligotrophic bacteria) or could not grow (copiotrophic bacteria). The nutritional flexibility of oligotrophic and copiotrophic bacteria was investigated. The oligotrophic bacteria were shown to be able to utilize a significantly broader range of organic substrates than the copiotrophic bateria. This finding substantiates the hypothesis that nutritional flexibility is adaptive for oligotrophic bacteria.

• Particle and aerosol research
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• v.10 no.3
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• pp.99-108
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• 2014

Liquid filtration by membrane filters is essential for the preparation of ultrapure water in semiconductor manufacturing processes. The separation of submicrometer particles suspended in ultrapure water with a laminated fibrous membrane filter was studied numerically and experimentally in the present work. We found that an electrical double layer around a single fiber expanded to a large extent at a low ion concentration, as in ultrapure water, and deformed toward the upstream of the fiber with increasing filtration velocity. Since an increase in the electrical double-layer thickness leads to a decrease in the electrical potential gradient, particles with the same polarity as the fiber approach the fiber more easily and are captured at a high filtration velocity. Experimental results also confirmed that the collection efficiency of polystyrene latex(PSL) particles through a PTFE filter became higher as the filtration velocity increased.

• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.5-11
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• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• Journal of Korean Society of Water and Wastewater
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• v.28 no.4
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• pp.391-396
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• 2014

Ultrapure water (UPW) is water containing nothing but water molecule ($H_2O$). The use of UPW is increasing in many industries such as the thermal and nuclear power plants, petrochemical plants, and semiconductor manufacturers. In order to produce UPW, several unit processes such as ion exchange, reverse osmosis (RO), ultraviolet (UV) oxidation should be efficiently arranged. In particular, RO process should remove not only ions but also low molecular weight (LMW) organic matters in UPW production system. But, the LMW organic matter removal data of RO membranes provided by manufacturers does not seem to be reasonable because they tested the removal in high concentration conditions like 1,000 ppm of isopropyl alcohol (IPA, MW=60.1). In this study, bench-scale experiments were carried out using 4-inches RO modules. IPA was used as a model LMW organic matter with low concentration conditions less than 1 ppm as total organic carbon (TOC). As a result, the IPA removal data by manufacturers turned out to be trustable because the effect of feed concentration on the IPA removal was negligble while the IPA removal efficiency became higher at higher permeate flux.

• Membrane Journal
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• v.10 no.3
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• pp.112-120
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• 2000

• Applied Chemistry for Engineering
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• v.30 no.4
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• pp.408-414
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• 2019

In this study, an antioxidant was extracted from dandelion leaves using traditional hot water and ultrasonic extraction methods. In order to optimize the extraction yield and total flavonoid, an antioxidant, Box-Behnken design (BBD) model among response surface analysis methods was used. In the case of hot water extraction, the extraction temperature and time as well as the ratio of alcohol/ultrapure water were set as variables, and for the ultrasonic extraction, the ultrasonic survey century and irradiation time and the ratio of alcohol/ultrapure water were variables. Optimum extraction conditions in the hot water extraction method were the extraction temperature and time of $45.76^{\circ}C$ and 1.75 h and the ratio of alcohol/ultrapure water of 41.92 vol.%. While for the ultrasonic extraction method the survey century of 512.63 W, the ratio of alcohol/ultrapure water of 56.97 vol.% and the extraction time of 20.79 min were optimum conditions. Expected reaction yield and flavonoid content values under the optimized condition were calculated as 22.09 wt.% and 28.98 mg QE/mL dw, respectively. In addition, the error value of less than 3% was obtained validating our optimization process.

• Membrane and Water Treatment
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• v.3 no.4
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• pp.221-230
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• 2012

This study employed the modified fouling index (MFI) to determine the performance of a two-step recycling system - a membrane filtration integrated laminar flow water storage (LFWS) tank followed by an ion exchange process to reclaim ultrapure water (UPW) from the wastewater generated from semiconductor wafer backgrinding and sawing processes. The first step consisted of the utilization of either ultrafiltration (UF) or nanofiltration (NF) membranes to remove solids in the wastewater where the second step consisted of an ion exchanger to further purify the filtrate. The system was able to produce high purity water in a continuous operating mode. However, higher recycling cost could be incurred due to membrane fouling. The feed wastewater used for this study contained high concentration of fine particles with low organic and ionic contents, hence membrane fouling was mainly attributed to particulate deposition and cake formation. Based on the MFI results, a LFWS tank that was equipped with a turbulence reducer with a pair of auto-valves was developed and found effective in minimizing fouling by discharging concentrated wastewater prior to any membrane filtration. By comparing flux behaviors of the improved system with the conventional system, the former maintained a high flux than the latter at the end of the experiment.