• 제목/요약/키워드: Ultraprecision Positioning

검색결과 14건 처리시간 0.024초

초정밀 가공기용 FTS를 위한 압전 액츄에이터의 위치제어 (Accurate Positioning of Piezoelectric Actuator for Fast Tool Servo in Ultraprecision Machine)

  • 김호상;정병철;송승훈;김태형
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.446-449
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    • 1995
  • In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

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고진공 환경중 고출력 초음파 모터 이송 스테이지의 나노미터 위치 제어 (Nano-Positioning of High-Power Ultrasonic Linear Motor Stage in High-Vacuum Environment)

  • 김완수;이동진;이선규
    • 대한기계학회논문집A
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    • 제34권11호
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    • pp.1613-1622
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    • 2010
  • 본 연구는 고진공 환경중 초음파 리니어 스테이지의 나노미터 위치제어를 기술하고 있다. 고진공 환경 중 초정밀 위치 제어 시스템에 응용하기 위해 3 차 종진동 모드와 6 차 횡진동 모드를 가지는 BLT를 개발 했다. 안정적인 고출력을 위해 BLT 는 하나의 공진 주파수로 두 개의 모드 진동을 발생 시켜야 한다. 하나의 공진 주파수를 이용 하기 위해 어드미턴스를 변화시켜 각 모드의 공진 주파수를 일치시켜 조건이 다른 대기 환경에서 안정적인 고출력을 얻을 수 있었다. 기압 변화에 따라 구동 특성이 달라지는 시스템을 제어하기 위해 마찰력 변화에 따른 비선형 특성을 보상한 NCTF 제어를 사용했다. 설계된 제어기를 이용해 고진공 환경에서 시스템을 나노미터 정도로 제어하는 결과를 얻을 수 있었다.

초정밀 나노 스테이지에서의 다중 변위 확대 기구 해석 (Analysis of Multiple Displacement Magnification Mechanism in Ultraprecision Nano Stage)

  • 민경석;최우천
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1273-1276
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    • 2005
  • A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

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Real-Time Determination of Relative Position Between Satellites Using Laser Ranging

  • Jung, Shinwon;Park, Sang-Young;Park, Han-Earl;Park, Chan-Deok;Kim, Seung-Woo;Jang, Yoon-Soo
    • Journal of Astronomy and Space Sciences
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    • 제29권4호
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    • pp.351-362
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    • 2012
  • We made a study on real-time determination method for relative position using the laser-measured distance data between satellites. We numerically performed the determination of relative position in accordance with extended Kalman filter algorithm using the vectors obtained through nonlinear equation of relative motion, laser simulator for distance measurement, and attitude determination of chief satellite. Because the spherical parameters of relative distance and direction are used, there occur some changes in precision depending on changes in relative distance when determining the relative position. As a result of simulation, it was possible to determine the relative position with several millimeter-level errors at a distance of 10 km, and sub-millimeter level errors at a distance of 1 km. In addition, we performed the determination of relative position assuming the case that global positioning system data was not received for long hours to see the impact of determination of chief satellite orbit on the determination of relative position. The determination of precise relative position at a long distance carried out in this study can be used for scientific mission using the satellite formation flying.