• Tribology and Lubricants
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• 제7권1호
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• pp.35-39
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• 1991

The performance of the ultra-precision machine tools depends on the steady state characteristics of the main spindle bearings. For excluding the effect of machining error with perpendicularity, conical or spherical bearing has been used. In this paper, steady analysis of the externally pressurized conical gas bearing for ultraprecision is carried out based on the direct numerical method with assumption of point source. As a result of theoretical analysis, design parameters for optimal condition of conical gas bearing are' presented in dimensionless form.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1996년도 춘계학술대회 논문집
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• pp.137-142
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• 1996

Magnetic-electrolytic-abrasive polishing system(MEAPS) was developed for machining national standard electrode and its finishing characteristics was analyzed. The paper describes the operational principle of MEAP system by experimental results. The finishing characteristics and optimal finishing condition for national standard electrodes were experimented and analyzed. As a result, MEAPS can improve straightness as well as surface roughness.

• 한국정밀공학회지
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• 제28권3호
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.83-87
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• 2001

A 110 mm diameter aspheric metal secondary mirror for a test model of an earth observation satellite camera was fabricated by ultra-precision single point diamond turning (SPDT). Aluminum alloy for mirror substrates is known to be easily machinable, but not polishable due to its ductility. A harder material, Ni, is usually electrolessly coated on an Al substrate to increase the surface hardness for optical polishing. Aspheric metal secondary mirror without a conventional polishing process, the surface roughness of Ra=10nm, and the form error of $Ra={\lambda}/12({\lambda}=632nm)$ has been required. The purpose of this research is to find the optimum machining conditions for reflector cutting of electroless-Ni coated Al alloy and apply the SPDT technique to the manufacturing of ultra precision optical components of metal aspheric reflector.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.59-64
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• 2002

One of the exciting research areas of the X-ray microscope is the observation of a living cell. In order to study a living cell with high resolution the order of the several tens nm, we need to improve the efficiency of mirrors which are components of an X-ray microscope system. In this paper we present the mirror design and manufacture to give a high resolution and reflectivity. We designed Wolter type I the condenser and objective mirror with the several tens of nm resolution. According to mirror design. we made the program using the visual basic. Using the new processing method as well as the ultra-precision diamond cutting, we directly processed the inside of an aluminum hulk in order to manufacture mirrors. From the experimental result, we think that the new processing method will improve a high reflectivity through the improved cutting tools and optimum cutting conditions.

• 한국공작기계학회논문집
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• 제15권1호
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• 한국기계가공학회지
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• 제20권7호
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• pp.15-24
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• 2021

In this paper, to analyze the types of surface morphology error according to factors that cause machining error, the experiments were conducted in the ultra-precision diamond machine using a diamond tool. The factors causing machining error were classified into the pressure variation of compressed air, external shock, tool errors, machining conditions (rotational speed and feed rate), tool wear, and vibration. The pressure variation of compressed air causes a form accuracy error with waviness. An external shock causes a ring-shaped surface defect. The installed diamond tool for machining often has height error, feed-direction position error, and radius size error. The types of form accuracy error according to the tool's errors were analyzed by CAD simulation. The surface roughness is dependent on the tool radius, rotational speed, and feed rate. It was confirmed that the surface roughness was significantly affected by tool wear and vibration, and the surface roughness of Rz 0.0105 ㎛ was achieved.

• 대한기계학회논문집A
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• 제35권1호
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• pp.53-58
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• 2011

초정밀 소형공작기계는 초정밀가공분야에서 마이크로/메조 스케일 가공품의 정밀제조기술의 핵심으로 개발되어 왔다. 소형초정밀기계의 기하학적 오차는 가공품의 품질에 큰 영향을 미치기 때문에 반드시 분석 및 보정되어야 한다. 기존 소형공작기계의 기하학적 오차는 주로 레이저 간섭계로 측정되었으나 한번의 설치로 모든 기하학적 오차를 측정할 수 없고 까다로운 절차를 따라야 한다. 그 대안으로써 PSD 로 구성된 측정시스템이 개발되었으나 측정가능거리가 PSD 의 유효영역에 한정되었다. 본 논문에서는 측정가능거리를 확장시키고 설치오차를 최소화하여 6-자유도 기하학적 오차를 측정하는 시스템을 제안하고 민감도 해석과 실험을 통하여 이 측정 시스템의 정확도를 증명하였다.