• 제목/요약/키워드: Ultra precision

검색결과 925건 처리시간 0.037초

압전 액츄에이터를 이용한 초정밀 위치제어장치 개발 (Development of Nano Positioning Stage using PZT Actuator)

  • 정상화;차경래
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2002년도 추계학술대회 논문집
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    • pp.214-218
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    • 2002

  • In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

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