• Title/Summary/Keyword: Ultra Precision Processing

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Stability Analysis According to Material Alteration on Micro Stage for Micro Cutting Machine (재질 변화에 따른 초정밀가공기용 마이크로 스테이지의 안정성 해석)

  • 김재열;곽이구;김항우
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.12 no.3
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    • pp.52-57
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    • 2003
  • In this paper, stability of ultra precision cutting unit is analyzed and this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

A Study on the Nano Grinding of Sapphire by Ultra-Precision Grinder (초정밀 연삭기에 의한 사파이어의 나노가공)

  • 김우순;김동현;난바의치
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.12 no.5
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    • pp.40-45
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    • 2003
  • Optical and electronic industries are using lapping and polishing processing as a final finish rather than grinding, because they need more accurate parts of brittles non-metallic materials such as single crystals. Sapphire has been ground by the ultra-precision surface grinder having a glass -ceramic spindle of extremely-low thermal expansion with various cup-type resinoid-bonded diamond wheels of #400-#3000 in grain size. Sapphire can be ground in the ductile mode. And also, the surface roughness and grinding conditions has been clarified. The smooth surface of Sapphire less than 1nm RMS, 1nm Ra can be obtained by the ultra-precision grinding without any polishing process.

Re-Ir Coating Effect of WC Core Surface for Aspheric Glass Lens Molding (비구면 Glass 렌즈 성형용 초경합금 코어면 Re-Ir 코팅 효과)

  • Kim, Hyun-Uk;Kim, Sang-Suk;Kim, Hye-Jeong;Kim, Jeong-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.441-441
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    • 2007
  • As Rhenium-Iridium{Re-Ir) coating possesses such features as, high hardness, high elasticity, abrasion resistance and chemical stability, there have been exerted continuous efforts in research works in a variety of fields, and this technology has also been applied widely to industrial areas. In this research, the optimal grinding condition was identified using Microlens Process Machine in order to contribute to the development of aspheric glass lens for mobile phone module having 3 mega pixel and 2.5X zoom, and molding core(WC) was manufactured having performed ultra-precision machining. Effects of Re-Ir coating on form accuracy (P-V) of molding core and surface roughness(Ra) were measured and evaluated.

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Characteristics of aspheric lens processing using ultra-precision moulds processing system (초정밀 금형가공기를 이용한 비구면 렌즈 가공특성 연구)

  • Baek, Seung-Yub;Lee, Ha-Sung;Kang, Dong-Myeong
    • Design & Manufacturing
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    • v.1 no.1
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    • pp.7-11
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    • 2007
  • The fabrication of precision optical components by deterministic CNC grinding is an area of great current interest. Replacement of the traditional, craftsman driven, optical fabrication process is essential to reduce costs and increase process flexibility and reliability. Moreover, CNC grinding is well suited to the fabrication of complex shapes such as aspheres, making it possible to design optical systems with fewer components and reduced weight. Current technology is capable of producing surfaces with less than 2 microns peak to valley error, 50 nm rms surface roughness, and less than 1 micron subsurface damage. Bound abrasive tools, in which the abrasive particles are fixed in a second (matrix) material, play an important part in achieving this performance. In this paper, the factors affecting the ultra-fine surface roughness and profile accuracy of machined surfaces of aspheric parts has been analyzed experimentally and theoretically and on ultra-precision aspheric grinding system and precise adjusting mechanism have been designed and manufactured. In the paper we report the results of experiments and modeling performed to examine the effects of machinability, occurring during grinding of optical surfaces, on the tool surface profile. Profiles of machined surface were measured by using SEM. In order to optimize grinding conditions of aspheric lens processing, we performed experiments by design of experiments.

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Development of Uniform Press for Wafer Bonder (웨이퍼 본딩 장비용 Uniform Press 개발)

  • Lee, Chang-Woo;Ha, Tae-Ho;Lee, Jae-Hak;Kim, Seung-Man;Kim, Yong-Jin;Kim, Dong-Hoon
    • Transactions of the KSME C: Technology and Education
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    • v.3 no.4
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    • pp.265-271
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    • 2015
  • The bonding process should be achieved in vacuum environment to avoid air bubble. In this study, we studied about pressure uniformity that became an issue in thermo compression bonding usually. Uniform press is realized by the method that use air spring and metal form spring. The concept of uniform press using air spring is removed except pressing direction in the press processing so angle between the vector of pressure surface and the pressure axis is parallel automatically. Air spring compensate the errors of machining and assembly. Metal form compensate the thermal deformation and flatness error.

Numerical Analysis on the High Speed Precision Press for Ultra-thin Sheet Metal Forming (초박판 성형용 고속 정밀프레스에 대한 해석적 연구)

  • Kang, J.J.;Kim, J.E.;Hong, S.K.;Kim, J.D.;Heo, Y.M.;Cho, C.
    • Transactions of Materials Processing
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    • v.17 no.8
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    • pp.643-648
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    • 2008
  • Ultra-thin sheet metal forming techniques are required in precision forming of miniaturized and integrated products. In order to manufacture a good quality and low cost ultra-thin sheet metal products, a highly precise high-speed press is needed. The precision of a press is related with its vibration characteristics during pressing operation. This study evaluated the vibration characteristics of a proposed press design using computer simulation. The analysis compares the static deformation characteristics of the slide and the slide motion for the metal forming of an ultra-thin sheet of thickness less than 0.1mm. Further, in order to minimize the vibrations during high speed pressing operation, revolution balances of the eccentric shaft and the balance weight device is also considered. Finally, modal analysis is used to characterize the natural frequency of vibration of the press.

Leakage Analysis of Air Bearing for Vacuum Environment (진공환경용 공기베어링의 Leakage 해석)

  • 김경호;박천홍;이후상;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.912-915
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    • 2004
  • A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

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DLC Coating Effect of WC Core Surface Roughness for Glass Molding Lens (Glass Lens 성형용 WC Core 표면조도의 DLC 코팅 효과)

  • Kim, Hyun-Uk;Jeong, Sang-Wha;Lee, Dong-Gill;Kim, Sang-Suk;Kim, Jeong-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.487-488
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    • 2006
  • As DLC coating possesses such features as, high hardness, high elasticity, abrasion resistance and chemical stability, there have been exerted continuous efforts in research works in a variety of fields, and this technology has also been applied widely to industrial areas. In this research work, the optimal grinding condition was identified using Microlens Process Machine in order to contribute to the development of aspheric glass which is to be used for mobile phone module having 2 megapixel and $2.5{\times}$ zoom, and mold core (WC) was manufactured having performed ultra-precision machining and effects of DLC coating on shape accuracy(P-V) of mold core and surface roughness(Ra) as well were measured and evaluated.

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