• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1332-1336
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• 2003

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 8 ${\mu}m$ and 96 ${\mu}m$ were fabricated by the present method, and the replication quality and the optical properties of the replicated microlens were measured and analyzed.

• 한국산학기술학회논문지
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• 제15권11호
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• pp.6464-6471
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• 2014

웨이퍼 단위의 렌즈를 성형 시 일반적으로 UV경화 방식을 사용한다. 이 경우 발생될 수 있는 문제점은 크게. 경화후 이형과정에서 성형 렌즈의 금형 고착문제, 경화 공정 중 발생하는 소재의 수축 현상으로 렌즈간의 형상 오차 발생 및 웨이퍼 단위의 변형, 위치별 렌즈 형상 편차 발생, 웨이퍼 양면의 렌즈 형상 및 센터 정렬 오차 등이다. 이중 UV경화 과정에 직접적인 영향을 받는 것은 형상 오차 및 변형으로 그 요인은 UV 조사 균일성, UV 강도에 대한 경화도, UV 경화 소재의 수축 특성이다. 따라서 소재에 대한 경화 모델링 수립 및 경화 반응에 따른 수축율과 물성 변화에 대한 이론정립이 필요하다. 또한 이러한 모델링을 해석에 구현할 수 있는 해석 툴 개발이 필요하다. 본 연구에서는 Comsol을 이용하여 수립된 모델링을 반영하고 이를 통하여 웨이퍼 단위 렌즈의 성형 공정에 대한 해석 기법을 제안하였다. 이를 통해 7.2mm에 대한 누적 공차값을 실제 성형 공정 후 결과($0.149{\mu}m$)과 비교하여 제안한 해석 방법에 의한 결과($0.215{\mu}m$)을 비교, 검증을 수행하였으며 이를 통하여 UV경화 공정 후 변형에 대한 해석 가능성을 확인하였다.

• 대한기계학회논문집A
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• 제27권3호
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• pp.450-454
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• 2003

It is important to control the processing conditions to maximize the replication quality of UV-molded microstructure. In the present study, the tip radius anil surface roughness of V-groove structure were measured to quantify the replication quality. UV-curing dose and the applied pressure were experimentally selected as the governing Processing conditions that affect the replication quality of the UV-molded part. Finally. an experimental optimization technique combining central composite design and desirability function approach was used to maximize the replication quality of UV-molded structure.

• 한국광학회지
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• 제13권1호
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• pp.21-26
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• 2002

기존의 성형결합기는 광파가 자유전파영역에서 회절에 의해 전파되는 사실이 잘 알려져 있다. 본 논문에서는 손실을 줄이기 위하여 회절에 의한 광파의 전파가 아닌 W-테이퍼 도파로에 의한 광파의 전파를 하는 새로운 개념의 성형결합기를 제안하였고, 이를 광도파로열 격자 파장 필터에 적용시켜 여러 가지 특성을 조사하였다. 새로운 개념의 저 손실 성형결합기 및 이를 이용한 광도파로열 격자 파장 필터는 기존의 성혈결합기 및 광토파로열 격자 파장 필터와 같은 성능을 나타내면서도 손실이 작음을 확인하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.377-380
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• 2003

Recently, demand of digital products with optoelectronic device is increasing rapidly. A microlens array is applied to improve optical efficiency on optoelectronic device, and it is usually fabricated by photolithography and reflow process after planarization layer coating process. UV molding process is more suitable for mass production of high quality microlens array than photolithography and reflow process. In the present study, microlens array was fabricated on the simulated optoelectronic device with planarization layer by aligned UV molding process. The shape of replicated microlens was measured, and the section image of molded part was examined.

• 기계저널
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• 제47권10호
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• pp.47-52
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• 2007

• 정보저장시스템학회논문집
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• 제2권2호
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• pp.91-95
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• 2006

High-density image sensors rave microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using UV transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.17-21
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• 2005

High-density image sensors have microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using W transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• 소성∙가공
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• 제14권5호
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• pp.477-481
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• 2005

Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.

• 소성∙가공
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• 제13권3호
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• pp.236-241
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• 2004

UV-molded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, nickel mold inserts for microlens arrays with lenses having diameters between $3\mu\textrm{m}$ and $230\mu\textrm{m}$ were fabricated by electroforming process. An UV-molding system was designed and constructed, a simple technique to avoid micro-air bubbles was first suggested, and the effects of the compression pressure and UV-curing dose on the replication quality of UV-molded microlens arrays with a diameter of $14\mu\textrm{m}$ were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analyzed.