• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• 한국정밀공학회지
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• 제20권10호
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• 대한기계학회논문집
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• 제17권12호
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• pp.3115-3123
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• 1993

This paper presents a real-time correction method of the movemont errors of a translatory precision machine axis. This method is a null-balances technique in which two plane mirrors are used to generate an interferometric fringe pattern utilizing the optical principles of TwymanGreen interferometry. One mirror is fixed on a reference frame, while the other is placed on the machine axis being supported by three piezoelectric actuators. From the fringe pattern, one translatory and two rotational error components of the machine axis are simultaneously detected by using CCD camera vision and image processing techniques. These errors are then independently suppressed by activating the peizoelectric actuators by real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with movement errors less than 10 nm in vertical straightness, 0.1 arcsec in pitch, and 0.06 arcsec in roll for 50mm travel by adopting the real-time correction method.

• 한국정밀공학회지
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• 제23권9호
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1673-1678
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• 2007

The use of flip-chip type electronic package offers numerous advantages such as reduced thickness, improved environmental compatibility, and downed cost. Despite numerous benefits, flip-chip type packages bare several reliability problems. The most critical issue among them is their electrical performance deterioration upon consecutive thermal cycles attributed to gradual delamination growth through chip and adhesive film interface induced by CTE mismatch driven shear and peel stresses. The electronic package in use is heated continuously by itself. When the crack at a weak site of the electronic package occurs, thermal deformationon the chip side is changed. Therefore, we can measure these micro deformations by using Moire interferometry and find out the crack length.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.204-207
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• 2005

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 한국광학회지
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• 제3권1호
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• pp.20-26
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• 1992

Twyman-Green형 간섭계의 시험파면의 변형을 추출하기 위하여 fourier변환을 이용하는 방법을 모사실험과 실험을 통하여 검토하였다. 대상 방법중에서는 Takeda의 방법이 변형을 추출하는 용도로 적절함이 밝혀졌다. 이 방법을 평면경에 적용하여 얻은 표면의 구조에는 curvature가 존재하며, 그 크기는 $\lambda$/6정도였다. 이 축정의 정확도는 $\lambda$/40정도로 얻어져, 기 발표된 유사연구의 결과보다 그 정도가 높음을 확인하였다.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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• pp.90-91
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• 2003

대부분의 가공기 혹은 측정기에 있어 이송테이블은 그 기능수행의 기본을 담당하고 있으며 이송테이블의 운동 정밀도와 고속화는 목표하는 정밀도와 생산성으로 직결된다. 종래에는 형상특성, 열변형 등의 계통 오차만을 오프라인(Off-line)으로 측정하고 소프트웨어적으로 보상하는 방법을 사용하였으나 초정밀 분야에서 요구되는 테이블의 운동정밀도는 기계적 강성한계를 넘는 정밀도이므로, 테이블 이송 시 발생하는 운동오차를 실시간으로 측정하고, 보상할 수 있는 온라인(On-line)개념의 능동형 보상이 필요하다. (중략)