• 제목/요약/키워드: Tungsten Powder

검색결과 221건 처리시간 0.025초

Preparation of tungsten metal film by spin coating method

  • Lee, Kwan-Young;Kim, Hak-Ju;Lee, Jung-Ho;Sohn, Il-Hyun;Hwang, Tae-Jin
    • Korea-Australia Rheology Journal
    • /
    • 제14권2호
    • /
    • pp.71-76
    • /
    • 2002

  • Metal thin films, which are indispensable constituents of ULSI (Ultra Large Scale Integration) circuits, have been fabricated by physical or chemical methods. However, these methods have a drawback of using expensive high vacuum instruments. In this work, the fabrication of tungsten metal film by spin coating was investigated. First of all, inorganic peroxopolytungstic acid (W-IPA) powder, which is soluble in water, was prepared by dissolving metal tungsten in hydrogen peroxide and by evaporating residual solvent. Then, the solution of W-IPA was mixed with organic solvent, which was spin-coated on wafers. And then, tungsten metal films, were obtained after reduction procedure. By selecting an appropriate organic solvent and irradiating UV, the sheet resistance of the tungsten metal film could be remarkably reduced.

  • PDF KSCI

Neutron Diffraction Analysis of Tungsten-Molybdenum-Disilicide Powders Formed by Self-propagating High Temperature Synthesis

  • Choi, Y.;Kim, Y.S.
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
    • /
    • pp.1325-1326
    • /
    • 2006

  • Tungsten-molydiside $W_xMo_{1-x}Si_2$ was synthesized by self-propagating high temperature synthesis (SHS). The SHS product with the initial composition of (0.5Mo+0.5W+2Si) contains 23.9% $MoSi_2$, 40.89% $WSi_2$ with remaining 9.11% Mo, 9.16% Si and 16.94%W. Lattice parameters of the $MoSi_2$ and $WSi_2$ determined by Rietvelt analysis were a=0.3206 nm, c=0.7841 nm and a=0.3212 nm, c=0.7822 nm, respectively.

  • PDF

Effect of TiC Content on Oxidation Behavior of Sintered WC-TiC-TaC Alloys

  • Tanaka, Hiroki;Mouri, Shigeki;Nakahara, Kenji;Sano, Hideaki;Zheng, Guo Bin;Uchiyama, Yasuo
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
    • /
    • pp.352-353
    • /
    • 2006

  • The effect of TiC content on oxidation behavior of the sintered WC-TiC-TaC alloys with 2 mass% TaC and different TiC amounts of 3-45 mass% was investigated through oxidation tests in air at 973K. As a result of the tests, it was revealed that with increasing TiC content in the alloys, mass changes caused by oxidation and thickness of the scale decreased. Thus, it is considered that the main component of the scales changed gradually from $WO_3$ to $TiO_2$ with increasing TiC content in the alloys, and oxygen diffusion through the scale to the alloys was inhibited gradually.

  • PDF

Effect of Electrical Parameters and Surrounding Gas on the Electroexplosive Tungsten Nanopowders Characteristics

  • Kwon, Young-Soon;Kim, Jin-Chun;Ilyin, Alexander P.;Nazarenko, Olga B.;Tikhonov, Dmitry V.
    • 한국분말재료학회지
    • /
    • 제19권1호
    • /
    • pp.49-54
    • /
    • 2012

  • Tungsten nanopowders were produced by the method of wires electrical explosion in the different gases. The study of phase and dispersed composition of the powders was carried out. The influence of electrical parameters such as the value of energy input in wire and the arc stage of the explosion was discussed. The factors that make for decreasing the particles size are the lower pressure of surrounding gas and the use of addition of chemically reactive gas.

  • https://doi.org/10.4150/KPMI.2012.19.1.049 인용 PDF KSCI