• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• Proceeding of EDISON Challenge
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• 2016.03a
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• pp.195-202
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• 2016

In this paper, crack detection method using eigen value analysis is presented. Three methods are used: theoretical analysis, finite element method with the cracked beam elements and finite element method with three dimensional continuum elements. Finite element formulation of the cracked beam element is introduced. Additional term about stress intensity factor based on fracture mechanics theory is added to flexibility matrix of original beam to model the crack. As using calculated stiffness matrix of cracked beam element and mass matrix, natural frequencies are calculated by eigen value analysis. In the case of using continuum elements, the natural frequencies could be calculated by using EDISON CASAD solver. Several cases of crack are simulated to obtain natural frequencies corresponding the crack. The surface of natural frequency is plotted as changing with crack location and depth. Inverse analysis method is used to find crack location and depth from the natural frequencies of experimental data, which are referred by another papers. Predicted results are similar with the true crack location and depth.

• Korean Journal of Optics and Photonics
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• v.18 no.2
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• pp.162-166
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• 2007

In this paper, we propose a WDM optical true time-delay (OTTD) beam former for phased way antenna (PAA) systems. It is composed of a delay lines matrix and a multiwavelength source with discrete DFB laser diodes. The building block of a delay lines matrix is a $2\times2$ optical MEMS switch with proper fiber-optic delay line connected between cross ports. A $4\times3$ matrix using four DFB lasers has been fabricated with unit time-delay difference of 12 ps. Maximum time-delay error was measured to be -1.74 ps and +1.14 ps at a radiation angle of $46.05^{\circ}$, corresponding to error range of $-2.87^{\circ}\sim+1.88^{\circ}$. By measuring time-delays at six different RF frequencies from 5- to 10-GHz, we verified the true time-delay characteristic of our OTTD.

• Korean Journal of Optics and Photonics
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• v.30 no.3
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• pp.94-100
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• 2019

The near-field subwavelength squint-less focusing system of a phased array antenna is designed and demonstrated by numerical simulation. The Huygens-Fresnel principle is applied to numerical simulation for calculation of the phased array antenna at microwave frequency. It was shown that beam squinting can be eliminated, utilizing true-time optical delay lines based on a chirped fiber grating in the proposed system. Furthermore, subwavelength focusing with high numerical aperture can be achieved by considering the fact that the array elements of the phased-array antenna can be treated as diffractive elements in an optical lens system. Also, side lobes can be suppressed by decreasing the distance between element antennas to less than half of the wavelength.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.2 no.3
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• pp.75-86
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• 1982

The degeneration of two classes of thick beam elements has been conducted, one (DB6) based on the conventional Timoshenko beam assumptions whereas the other (DB7) based on the assumed cubic axial displacement profile. While an adjustable shear correction factor is required for the DB 6 element to compensate for the unrealistic distribution of shear strain across the thickness, the DB 7 element assumes the more realistic quadratic profile of shear strain at the outset. With the plane-stress continuum solution as reference, solutions obtained by these two element models are compared with the analytical Timoshenko solution, the analytical thin beam solution and several available solutions of other existing beam elements. The result indicates that the performance of the higher order beam element DB 7 is consistently superior to any others. This is true for the whole range of aspect ratios of beam, in both static and free vibration analyses.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.27 no.3C
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• pp.241-247
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• 2002

In this paper, we proposed a continuously variable true time-delay for transmit linear phased-array antenna sing chirped fiber gratings(CFGs) and a tunable laser source. Average group delay-slope of the CFG was treasured to be 177 ps/nm at L-, S-, and X-band. Simulation results show that the maximum gain of the transmit linear phased-array antenna with the beam steering angle of 180$^{\circ}$ is 11.6 dB at 10 GHz.

• Steel and Composite Structures
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• v.39 no.3
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• pp.337-352
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• 2021

The study presented experimental and numerical investigation on the seismic performance of steel reinforced concrete (SRC) L-shaped column- reinforced concrete (RC) beam joints. Various parameters described as steel configuration form, axial compressive ratio, loading angle, and the existence of slab were examined through 4 planar joints and 7 spatial joints. The characteristics of the load-displacement response included the bearing capacity, ductility, story drift ratio, energy-dissipating capacity, and stiffness degradation were analyzed. The results showed that shear failure and flexural failure in the beam tip were observed for planar joints and spatial joint, respectively. And RC joint with slab failed with the plastic hinge in the slab and bottom of the beam. The results indicated that hysteretic curves of spatial joints with solid-web steel were plumper than those with hollow-web specimens. The capacity of planar joints was higher than that of space joints, while the opposite was true for energy-dissipation capacity and ductility. The high compression ratio contributed to the increase in capacity and initial stiffness of the joint. The elastic and elastic-plastic story deformation capacity of L-shaped column frame joints satisfied the code requirement. A design formula of joint shear resistance based on the superposition theory and equilibrium plasticity truss model was proposed for engineering application.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.410-415
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• 2002

A winding bend rig is designed to overcome the drawbacks of the conventional bend rig for measuring springback ratio of a strip or plate. Using the present bend rig, springback ratios are measured and they are compared with ones that obtained by using simple beam theory and tensile test. Theoretically, there should be no difference between the two values as far as the simple beam theory holds true for the bending test. But, within the scope of our tests, there is a difference of 5% between the two values since the specimen under bend test is subjected to a transverse shear force and friction force on the surface of the specimen.

• The Journal of Korean Society for Radiation Therapy
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• v.14 no.1
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• pp.109-116
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• 2002

The mordem linear accelerators are equipped with X-ray collimators that can be moved independently to allow asymmetric fields with field centers positioned away from the true central axis of the beam. We have studied the dosimetric of an independent collimator system using measurements performed quarter fields. The field size factors for asymmetric fields are compared to those for symmetric fields. Dosimetric measurements include portent depth don, beam penumbra and shape of isodose curves for symmetric and quarter fields.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2000.04a
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• pp.96-103
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• 2000

This research is a new design method, which will be presented as a basic concept for a more efficient minimum weight design of grillages, as an attempt to describe true collapse mechanism in as overall search as possible. It serves as introduction to the numerical technique of Linear Programming(LP) and Automatic Modified Direct Plastic Frame Analysis(AMDPFA). Attention is directed to both analysis and design, and emphasis is placed on the physical significance of Systematic Searching Techniques(SST) involved. In weight minimum grillages design, the parameterisation study in optimum beam configuration which was carried out over the range of beam sections for a given plastic section modulus likely to occur in structures by suing an adaptive stochastic optimisation technique, Genetic Algorithms.