• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.43-44
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• 2015

Electrodeposited Ni and Ni-SiC composite coatings were prepared on Cu substrates by using the Ni-Sulfamate electrolytic bath. Thus prepared samples were subjected for the two different types of post surface modification techniques; i.e. Laser Surface Texturing (LST) and Ultrasonic Nano Surface Modification (UNSM), respectively in order to investigate their effects on surface and interface related properties of the coatings. Hemispherical dimples, with 80 to 200 um dimple spacing, were created and examined on the surfaces of the materials studied. The results revealed that micro-surface texturing with 150 um dimple spacing considerably improved the coefficient of friction. Dimple spacing accuracy and incorporated second phase ceramic particles both contributed significantly to reduction in coefficient of friction. On the other hand, application of UNSM considerably modified the surface topography, led to increase the Vickers microhardness, and reduced the wear and coefficient of friction as compared to non UNSM treated Ni and Ni-SiC samples.

• 한국전기전자재료학회논문지
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• 제32권2호
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• pp.129-133
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• 2019

TiN thin films were fabricated using an unbalanced magnetron sputtering (UBMS) system, and their structure and surface characteristics as well as their optical and tribological properties were evaluated. The hardness, elastic modulus, adhesive force, surface roughness, and transmittance of the Ti thin films fabricated using the UBMS system were 11.5 GPa, 103 GPa, 27.5 N, 2.45 nm and 20%, respectively. The TiN films prepared with various proportions of nitrogen as the reaction gas exhibited maximum values for the hardness, elastic modulus, critical load, RMS roughness and transmittance of approximately 19.2 GPa, 182 GPa, 27.3 N, 0.98 nm, and 85%, respectively. Moreover, the TiN thin film fabricated under the condition of 30 sccm nitrogen gas showed the optimal physical properties. In summary, the TiN thin films fabricated using the UBMS system exhibited excellent hardness, elastic modulus, adhesion, and smooth surface in addition to good hydrophilic properties.

• Composites Research
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• 제29권3호
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• pp.111-116
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• 2016

터보/컴프레셔(Turbo compressor)용 틸팅 패드 저널 베어링(Tilting pad journal bearing)은 고속, 고하중의 주축(Rotor)을 지지하는 역할을 하며, 화이트 메탈(White metal)이 대표적인 소재로 널리 사용되어왔다. 그러나 예기치 않은 윤활유 공급 중단 상황(Oil cut situation) 또는 베어링과 주축 사이에 유막(Oil film)이 제대로 형성되지 않을 경우, 기존의 화이트 메탈 베어링은 융착(Seizure) 현상에 의해 바로 정지하게 되고 주축에 심각한 손상을 유발한다. 이러한 융착 문제를 해결하기 위해 기존의 화이트 메탈에 비해 높은 비강성, 비강도 그리고 뛰어난 마찰 특성(Tribological characteristic)을 가지는 탄소섬유 강화 복합재료(Carbon fiber reinforced composite)가 틸팅 패드 저널 베어링에 사용될 수 있다. 본 연구에서는 고 내열성 탄소섬유/에폭시 복합재료 틸팅 패드 저널 베어링의 오일공급 중단 상황에서의 내구성에 대한 연구를 진행하였다. 이를 위해 상온 및 오일공급 중단상황의 고온에서 인장, 압축, 전단 등의 기초적인 복합재료 물성 실험을 진행하였고, 복합재료 틸팅 패드 저널 베어링에 있어 가장 중요한 물성인 층간 계면 강도를 측정하기 위해 Short Beam Shear 실험을 진행 하였다. 오일 공급 중단 상황에서 복합재료 틸팅 패드 저널 베어링의 파손(Failure) 가능성을 알아보기 위해 유한 요소 해석(Finite element analysis)을 진행함으로써 베어링 표면에 가해지는 최대 응력을 도출하였고, 해석 결과와 물성 시험으로부터 측정된 강도 값을 이용하여 Tsai-Wu Failure index를 계산하였다. 해석 결과를 검증하기 위해 산업용 테스트 벤치를 이용하여 탄소섬유/에폭시 복합재료로 제조된 틸팅 패드 저널 베어링의 오일 공급 중단 실험을 진행하였다.

• Tribology and Lubricants
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• 제37권5호
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• pp.151-163
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• 2021

Since the discovery of single-layer graphene, exploiting graphene's excellent physical/chemical properties in tribology systems has been a topic of interest in academia over the last few decades. There is no doubt that understanding the underlying friction mechanism of graphite should precede this. Even now, new properties of graphene are being reported in academia, and based on this, studies exploring the origins of graphene's surface properties and friction characteristics in a wide range of scales are also being performed. From the perspective of lubrication engineering, graphene research can be largely divided into studies that 1) reveal its basic friction mechanism at the nanoscale and 2) explore its application in macroscale sliding systems. At the nanoscale, the basic friction mechanism of graphene is mainly due to its atomic thickness. In this paper, the various research on the nanoscale friction and surface characteristics of graphene is reviewed. Graphene surface properties, such as wettability and surface energy and the basic friction mechanisms of graphene attributed to adhesion, electronphonon scattering, bending stiffness, and the underlying substrate, are summarized. Further, we provide the research outcomes on the superlubricity of graphene. Finally, the potential application and challenges of the superlubricity of graphene are highlighted. Through this, we intend to provide summarized information to researchers interested in the tribological properties of graphene and help set the direction of future research.

• 한국분말재료학회지
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• 제30권5호
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• pp.409-414
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• 2023

YSZ (Y₂O₃-stabilized zirconia)-based ceramics have excellent mechanical properties, such as high strength and wear resistance. In the application, YSZ is utilized in the bead mill, a fine-grinding process. YSZ-based parts, such as the rotor and pin, can be easily damaged by continuous application with high rpm in the bead mill process. In that case, adding WC particles improves the tribological and mechanical properties. YSZ-30 vol.% WC composite ceramics are manufactured via hot pressing under different pressures (10/30/60 MPa). The hot-pressed composite ceramics measure the physical properties, such as porosity and bulk density values. In addition, the phase formation of these composite ceramics is analyzed and discussed with those of physical properties. For the increased applied pressure of hot pressing, the tetragonality of YSZ and the crystallinity of WC are enhanced. The mechanical properties indicate an improved tendency with the increase in the applied pressure of hot pressing.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2000년도 추계학술발표회 초록집
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• pp.3-4
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• 2000

Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

• Transactions on Electrical and Electronic Materials
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• 제8권2호
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• pp.53-57
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• 2007

In this study, a novel slurry containing ceria as the abrasive particles was analyzed in terms of its frictional, thermal and kinetic attributes for interlayer dielectric (ILD) CMP application. The novel slurry was used to polish 200-mm blanket ILD wafers on an $IC1000_{TM}$ K-groove pad with in-situ conditioning. Polishing pressures ranged from 1 to 5 PSI and the sliding velocity ranged from 0.5 to 1.5 m/s. Shear force and pad temperature were measured in real time during the polishing process. The frictional analysis indicated that boundary lubrication was the dominant tribological mechanism. The measured average pad leading edge temperature increased from 26.4 to $38.4\;^{\circ}C$ with the increase in polishing power. The ILD removal rate also increased with the polishing power, ranging from 400 to 4000 A/min. The ILD removal rate deviated from Prestonian behavior at the highest $p{\times}V$ polishing condition and exhibited a strong correlation with the measured average pad leading edge temperature. A modified two-step Langmuir-Hinshelwood kinetic model was used to simulate the ILD removal rate. In this model, transient flash heating temperature is assumed to dominate the chemical reaction temperature. The model successfully captured the variable removal rate behavior at the highest $p{\times}V$ polishing condition and indicates that the polishing process was mechanical limited in the low $p{\times}V$ polishing region and became chemically and mechanically balanced with increasing polishing power.

• 마이크로전자및패키징학회지
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• 제30권2호
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• pp.13-20
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• 2023

마이크로 전자기계 시스템 공정에서 표면 처리는 공정 방법의 일환이자 디바이스에 자체적인 기능을 부여하는 역할을 한다. 특히 자기 조립 단분자층은 마이크로 전자기계 시스템 공정에서 표면 개질 및 기능화를 수행하는 표면처리 방법으로 침지 시간과 용액 농도에 따라 강도를 정밀하게 조절할 수 있는 유기 단분자막이다. 고분자 기판이나 금속/세라믹 부품에 자발적으로 흡착되어 형성되는 자기 조립 단분자층은 표면 특성의 개질 뿐만 아니라 나노스케일 단위의 높은 정밀도로 하여금 양산용 리소그래피 기술 및 초민감 유기/생체분자 센서에도 응용되고 있다. 본 논문에서는 마찰 특성의 조절부터 생체 분자의 탐침 기능까지 자기 조립 단분자층 기술이 발전되어 응용되고 있는 다양한 분야들에 대해 소개한다.