• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.370-370
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• 2012

Feature size of Cu interconnects keep shrinking into several tens of nanometer level. For this reason, the Cu interconnects face challenging issues such as increase of electro-migration, line-width dependent electrical resistivity increase, and gap-filling difficulty in high aspect ratio structures. As the thickness of the Cu film decreases below 30 nm, the electrical resistivity is not any more constant, but rather exponential. Research on alloying with other elements have been started to inhibit such escalation in the electrical resistivity. A faint trace of Al added in Cu film by sputtering was reported to contribute to suppression of the increase of the electrical resistivity. From an industrial point of view, we introduced cyclic metal organic chemical vapor deposition (MOCVD) in order to control Al concentration in the Cu film more easily by controlling the delivery time ratio of Cu and Al precursors. The amount of alloying element could be lowered at level of below 1 at%. Process of the alloy formation was applied into gap-filling to evaluate the performance of the gap-filling. Voidless gap-filling even into high aspect ratio trenches was achieved. In-depth analysis will be discussed in detail.

• Transactions on Electrical and Electronic Materials
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• 제15권1호
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• pp.49-54
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• 2014

In this study, we carried out an investigation of the etch characteristics of silicon (Si) film, and the selectivity of Si to $SiO_2$ in $SF_6/O_2$ plasma. The etch rate of the Si film was decreased on adding $O_2$ gas, and the selectivity of Si to $SiO_2$ was increased, on adding $O_2$ gas to the $SF_6$ plasma. The optical condition of the Si film with this work was 1,350 nm/min, at a gas mixing ratio of $SF_6/O_2$ (=130:30 sccm). At the same time, the etch rate was measured as functions of the various etching parameters. The X-ray photoelectron spectroscopy analysis showed the efficient destruction of oxide bonds by ion bombardment, as well as the accumulation of high volatile reaction products on the etched surface. Field emission auger electron spectroscopy analysis was used to examine the efficiency of the ion-stimulated desorption of the reaction products.

• 한국농공학회지
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• 제24권1호
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• pp.31-43
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• 1982

Engineering phase of dairy housing systems has close connection with the milk produc- tivity of dairy cattle, the quality of milk, extension of dairy production systems, labor- saving in management of dairy cattle and the like. Moreover, the rate of investment of dairy housing facilities is of relatively high level, However, there has been almost no research effort for the improvement of engineering aspects of dairy housing systems in Korea. The purpose of this study is to find out general engineering problems and to recomm- end the improvement in dairy housing systems in Korea. Field survey by means of questionaire, direct measurements, taking pictures and sketching was conducted to get necessary information for the study. Kyung-ki Do region was firstly chosen for sampling area since it has included more than half of the number of dairy farms of the whole country. The results obtained are summarized as follows: 1. In overall dairy farm layout, the dwellings of workers were ignored in the light of sanitary environment 2. The layout of stalls in a dairy barn belongs mostly to the type of double-row face-out, which is compatible with the emphasis of manure disposal activities. 3. While the width and length of stalls were sufficiently close to the standard dimension, the width of mangers was much less than the standard dimension. 4. The width and depth of manure gutters and the width of working alleys were much. less than the standard dimension. 5. The mooring equipment was mostly in the classes of chain or rope. The watering equipment was not facilitated independantly except the one cese of using watercup. 6. The bucket milkers with one or two bucket milkers with the capacity of two cattles. each were used as milking equipment in most dairy farms. 7. There were only few milk rooms independently spaced from other space, in which the arrangement of milking equipment was much less than the standard condition. 8. The lounging ground area was averaged to be sufficient for the activity of dairy herd. 9. Silos for silage used during winter consisted of mostly bunker silos, trench silos and underground vertical silos. Ordinary vertical silos were considered for the farmers to be inconvenient for the labor saving. 10. From the view point of heat conservation and moisture removal within the dairy barns, windows were not flexible for the easy ventilation and ceiling part was not adequate for temperatur maintenance. 11. Waste treatment and disposal systems were not provided with most dairy farms, therefore the livestock waste pollution problems would be serious in the near future.

• 한국전기전자재료학회논문지
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• 제26권4호
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• pp.271-274
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• 2013

Power Metal Oxide Semiconductor Field Effect Transistor's (MOSFETs) are well known for superior switching speed, and they require very little gate drive power because of the insulated gate. In these respects, power MOSFETs approach the characteristics of an "ideal switch". The main drawback is on-resistance RDS(on) and its strong positive temperature coefficient. While this process has been driven by market place competition with operating parameters determined by products, manufacturing technology innovations that have not necessarily followed such a consistent path have enabled it. This treatise briefly examines metal oxide semiconductor (MOS) device characteristics and elucidates important future issues which semiconductor technologists face as they attempt to continue the rate of progress to the identified terminus of the technology shrink path in about 2020. We could find at the electrical property as variation p base dose. Ultimately, its ON state voltage drop was enhanced also shrink chip size. To obtain an optimized parameter and design, we have simulated over 500 V Field ring using 8 Field rings. Field ring width was $3{\mu}m$ and P base dose was $1e15cm^2$. Also the numerical multiple $2.52cm^2$ was obtained which indicates the doping limit of the original device. We have simulated diffusion condition was split from $1,150^{\circ}C$ to $1,200^{\circ}C$. And then $1,150^{\circ}C$ diffusion time was best condition for break down voltage.

• 한국건설관리학회논문집
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• 제5권3호
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• pp.71-78
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• 2004

In conventional method of supporting soil shuttering wall during excavation a system of struts and wales to provide cross-lot bracing is common in trench excavations and other excavations of limited width. This method, however, becomes difficult and costly to be adopted for large excavations since heavily braced structural systems are required. Another expensive and unsafe situations are expected when temporary struts must be removed for the construction of underground structures. This paper introduces innovative strut systems which can be used as permanent underground structures after its role as brace system to resist earth pressure during excavation phase. Underground structural system suggested from architect is checked against the soil lated pressures before the analysis of stresses developed from gravity loads. In this technology, named SPS(Struts as Permanent System), retaining wall is installed first and excavation proceeds until the first level of bracing is reached. Braces used as struts during excavation will serve as permanent girders when buildings are in operation. Simultaneous construction of underground and superstructure can proceeds when excavation ends with the last level of braces being installed. In this paper, construction sequence and the calculation concept are explained in detail with some photo illustrations. SPS technology was applied to three selected buildings. One of them was completed and two others are being constructed Many sensors were installed to monitor the behavior of retaining wall, braces as column in terms of stress change and displacement. Adjacent ground movement was also obtained. These projects demonstrate that SPS technology contributes to the speed as well as the economy involved in construction.

• 한국지반공학회지:지반
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• 제4권1호
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• pp.49-58
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• 1988

성토하에 매설된 강관에 작용하는 응력을 유한요소법을 이용하여 탄소성해석을 하고 성토높이, 성토 흙의 탄성계수, 관의 두께, 트렌치의 폭 및 깊이가 응력에 미치는 영향을 검토하였다. 그리고 탄소 성해석결과와 Marston-Spangler이론에 의한 응력을 비교하였다. 연구결과 관직경과 관두께와의 비가 400인 경우에는 탄소성해석 결과와 Spangler이론의 연성관 해석 결과가 비슷하나 이 비가 200보다 작은 두께가 두꺼운 강관의 경우에는 연성관해석이 적합치 않는것 같다. 그리고 강성관해석에 의해서 구한 연직하중은 성토높이, 성토흙의 탄성계수, 관의 두께, 트렌치의 폭 및 깊이에 한계없이 연성관해석에 의한 값보다 항상 크다.

• 한국의류산업학회지
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• 제17권2호
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• pp.157-167
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• 2015

This study was initiated to understand design and detail characteristics of coats that targeted new senior women by analyzing shape, color, fabric and detail. For the new senior, youthful appearance has more appeal than products that represent elder's style. Among, the coat can be effectively utilized as a trendy fashion item that targets seniors since it is more useful to hide figures than pants, blouses or jackets. The objectives of this research were to: First, examine design characteristics of new senior women's coat. Second, understand design characteristics of new senior women's coat. Third, analyze the relationship between the design of collars and details according to type of new senior women's coat. Photographs collected were categorized according to type of coat. Three types of coat (balmacaan, redingote and trench) were chosen to analyze with the highest frequency. The results of analyzing shape, length, color and fabric of the products made in domestic and foreign brands were similar; however, the collar and way of fastening showed significant results that required specific analysis since the design elements were related to maincoat characteristics in protecting against the cold. The depth of the V-zone can change without change of collar width and design changes in V-zone that influence the coat image that lead to changes in sleeve type and length (or fastening and closing position) method.