• Journal of the Microelectronics and Packaging Society
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• v.15 no.3
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• pp.47-52
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• 2008

This investigation was performed in order to study the properties of deposition and layers by Silicon Dioxide, SiO2, as dielectric onto Via and Trench which have high Aspect Ratio (AR). Thus, in order to confirm these properties, three types of CVD, which were PECVD, PETEOS, and ALD, were selected. On the experiment each of the property sections was estimated that step overage of PECVD: <30%, PETEOS: 45%, ALD: 75% and the RSM of PECVD: 27.8 nm, PETEOS: 2.1 nm, ALD: <2.0 nm. As a result of this experiment for the property of electric film, ALD was valuated to be the most favorable outcome. However, ALD was valuated to have the least quality for the deposition rate. ALD deposition rate, $10\;\AA/min$ by $1\;\AA$/1cycle, was prominently lower than PETEOS, which had the deposition rate of $5000\;\AA$/min. Since electric film requires at least $1000\;\AA$ thicknesses, ALD was not suitable for the deposition rate. which is the most important component in a practical use. Therefore, in this particular study, PETEOS was evaluated to be the most suitable recipe.

• Journal of Conservation Science
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• v.26 no.3
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• pp.229-245
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• 2010

The pupose of this study was to identify the material characteristics, firing environments and making techniques for the jar coffins from the Oryangdong kiln site and the Ungokdong tomb site in Naju. All jar coffins had very similar physical, mineralogical and geochemical characteristics, although it was excavated from the different sites. The wall thickness of the jar coffins was about 2.3 to 5.3 cm. Under the microscopy, the jar coffins include a large quantity of various quartz with some microcrystalline and showed partly orthoclase and biotite. It is presumed that the mineral sherds added to maintain the thick wall and to control the percentage of contraction during drying and firing of jar coffins and it has contained about 11.4 to 19.8 %. Firing temperature of the jar coffins is estimated as 1,000 to $1,150^{\circ}C$. Also, all jar coffins and soils show similar geochemical behavior of elements and clay-mineralization degree within the site. This indicates making that the soil is probable to be a raw material of the jar coffins. But it shows different characteristics in major elements of soils which is collected at the kiln floor and the trench region of the Oryangdong kiln site because of the lack of quartz and feldspar in the soils. Therefore, it can use of the jar coffins making clay, if it goes through a simple special process such as mixing temper.

• Economic and Environmental Geology
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• v.33 no.2
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• pp.91-100
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• 2000

It has been more than ten years since Dukun mine was abandoned. Tailings of waste deposits and slime dumps in the abandoned Dukum mine have been left to be deserted for fifty years. The results of fifty years of neglecting are nothing short of major environmental problems. Slime dumps have been exposed to air and water in the mine over ten years and then soil profile has been formed well. Soil in the upper layer (A horizon) is the light gray color due to the leaching of cations. Soil in the lower layer (A2 horizon, 0.2∼0.3m)is tinted with reddish brown and yellowish brown color due to the development of iron oxides and iron hydroxides. Soil in the lower part of B horizon of (1.0∼3.0m) with the growth of copper and zinc oxides exposes to the bluish green, light blue, and dark gray. Ranging from 3m to 8m in depth, 85 samples were taken from 22 sampling sites with 50m intervals located on the slime dump area with hand auger and trench (open cut). As tailings was distributed, heavy metal elements extracted by the process of surface water and ground water move and disperse in to the hydrosphere. Waste dumps were distributed in and around the mine and water draining from those dumps be a potential source of contamination. Soils, thus, can be dispersed into downslope and downstream through wind and water by clastic movement. These materials may be deposited in another horizon if the water is withdrawn, or if the materials are precipitated as a result of differences in pH, or other conditions in deeper horizons. These were primarily associated with acid mine drainage. The characteristics and rate of release of acid mine drainage are influenced by various chemical and biological reactions at the source of acid generations. Prolonged extration of heavy metal elements has a detrimental effect on the agricultural land and residental area. Twenty soil samples were collected from the agricultural land in the area (0∼30 cm). Seventeen samples were also taken from the sediment in the stream running alongside the dumps. The dispersion patterns of heavy metal elements are as follows: The content of As ranged 2∼6 ppm in a horizon, 20∼125 ppm in B horizon with large amount of clay mineral is concentrated and the content of Cd ranged 1∼2 ppm in A horizon, 4∼22 ppm in B horizon. Like Cd, the content of As, Cu, Zn, Pb in B horizon is higher than that in A horizon (approximately 5∼100 times). When soil formation proceeds in stages, it is necessary to investicate the B horizon with the concentration of heavy metal and preventive measures will have to established.