A Study on the Low Temperature Epitaxial Growth of $CoSi_2$ Layer by Multitarget Bias cosputter Deposition and Phase Sequence
(Multitarget Bias Cosputter증착에 의한 $CoSi_2$ 층의 저온정합성장 및 상전이에 관한 연구)
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- Korean Journal of Materials Research
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- v.4 no.1
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- pp.9-23
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- 1994