• 센서학회지
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• 제8권2호
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• pp.115-123
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• 1999

PSG(800nm)/$Si_3N_4$ (150nm)로 구성된 유전체 membrane 윗면에 heater와 감지전극을 등일면상에 동시에 형성하였다. 제작된 소자의 전체 면적은 $3.78{\times}3.78mm^2$이고, diaphragm의 면적은 $1.5{\times}1.5mm^2$이며, 감지막치 면적은 $0.24{\times}0.24mm^2$였다. 그리고 diaphragm내의 열분포 분석을 유한요소법을 이용하여 수행하였으며, 실제로 제작된 소자의 열분포와 비교하였다. 소비전력은 동작온도 $350^{\circ}C$에서 약 85mW였다. Sn 금속막을 상온과 $232^{\circ}C$의 두 가지 기판온도에서 열증착하였고, 이를 $650^{\circ}C$의 산소분위기에서 3시간 열산화함으로써 $SnO_2$ 감지막을 형성하였다. 그리고 이를 SEM과 XRD로 특성을 분석하였다. 제작된 소자에 대해서 온도 및 습도에 대한 감지막의 영향 및 부탄가스에 대한 반응특성도 조사하였다.

• 한국연초학회지
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• 제35권1호
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• pp.20-27
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• 2013

An Electronic Nose(E-Nose) and Gas Chromatography/Mass Spectroscopy (GC/MS) are meanwhile conventional technique to analyze volatile materials in many industries (e.g., food, medicine, environment) and have broad acceptance in the analysis of tobacco products. In this study, an experiment where tin oxide gas sensor array responses and GC/MS profiles are used to characterize the volatile compounds of different cigarettes at the same time is performed and the measurements of two instruments are compared for cigarette samples with a known chemical information. E-Nose and GC/MS were employed to differentiate and match flavored cigarettes with commercial tobacco flavoring agents (lavender, vanilla, peppermint, orange, star anise). For verifying reliability of two systems, the analyses were conducted in terms of amount of flavors in each cigarettes using partial least squares (PLS) and with the principal components analysis (PCA). Various chemical sensors and GC/MS data was reduced into two principal factors (PC1, PC2) for being distinguished with visualized regions. Both systems provided adequate results for odor characteristics of cigarettes in this study with each instrument having its own advantages and disadvantages.

• Journal of the Korean Physical Society
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• 제73권10호
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• pp.1437-1443
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• 2018

In this work, $SnO_2$ modified with reduced graphene oxide (rGO) and carbon nanotubes (CNTs) separately and combined sensitized by using the co-precipitation method and their sensing behavior toward ethanol vapor at room temperature were investigated. An interdigitated electrode (IDE) gold substrate is very expensive compared to a fluorine doped tin oxide (FTO) substrate; hence, we used the latter to reduce the fabrication cost. The structure and the morphology of the studied materials were characterized by using differential thermal analyses (DTA) and thermogravimetric analysis (TGA), transmission electron microscope (TEM), X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy, Brunauer-Emmett-Teller surface area and Barrett-Joyner-Halenda (BJH) pore size measurements. The studied composites were subjected to ethanol in its gas phase at concentrations from 10 to 200 ppm. The present composites showed high-performance sensitivity for many reasons: the incorporation of $SnO_2$ and CNTs which prevents the agglomeration of rGO sheets, the formation of a 3D mesopourus structure and an increase in the surface area. The decoration with rGO and CNTs led to more active sites, such as vacancies, which increased the adsorption of ethanol gas. In addition, the mesopore structure and the nano size of the $SnO_2$ particles allowed an efficient diffusion of gases to the active sites. Based on these results, the present composites should be considered as efficient and low-cost sensors for alcohol.

• Transactions on Electrical and Electronic Materials
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• 제10권4호
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• pp.135-139
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• 2009

$H_2S$ micro-gas sensors have been developed employing $SnO_2$:CuO composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals on silicon substrates, followed by oxidation at high temperatures. Results of various studies, such as scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that $SnO_2$ and CuO are mutually non-reactive. The CuO grains, which in turn reside in the inter-granular regions of $SnO_2$, inhibit grain growth of $SnO_2$ as well as forming a network of p-n junctions. The film showed more than a 90% relative resistance change when exposed to $H_2S$ gas at 1 ppm in air at an operating temperature of $350^{\circ}C$ and had a short response time of 8 sec.

• 마이크로전자및패키징학회지
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• 제14권2호
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• pp.59-63
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• 2007

간단한 PCB 공정을 기반으로 하여 저가형의 후막 가스 센서 모듈을 제안하고자 한다. 제안된 센서 모듈은 $NO_2/H_2$ 가스 센서와 습도센서, 그리고 히터를 포함한다. $NO_2/H_2$ 가스와 상대 습도 센서들은 각각 $SnO_2$와 $BaTiO_3$ 나노 입자들을 PCB 기판에서의 IDT(interdigital Transducer)에 프린팅 함으로써 제작되었다. 처음에 1% $H_2$ 가스를 센서 쳄버에 공급하고 4분 후 $H_2$가스 공급을 멈추고 공기를 주입시켰으며, 이러한 동작을 반복적으로 수행하였다. 마찬가지로 $NO_2$로 감지하도록 같은 동작을 실행하였다. $H_2$ 가스에 대한 결과는 도전성의 증가로 인하여 0.8V에서 3.5V로 증가함을 볼 수 있었으며, $H_2$ 가스를 주입한후의 반응 시간은 65초였다. $NO_2$ 가스의 경우는 도전성이 감소함으로써 2.7 V의 전압강하가 일어 났으며, 반응시간은 3초였다.

• 열처리공학회지
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• 제24권2호
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• pp.87-91
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• 2011

Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.

• 한국재료학회지
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• 제13권2호
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• pp.106-110
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• 2003

Nano-sized powders of Indium Tin Oxide(ITO) were synthesized by a coprecipitation method. In order to investigate the gas sensing characteristics in the nanocrystalline ITO thick films with various particle sizes, ITO powders with the average particle diameter of 15, 30, and 70 nm respectively were synthesized. And the sensitivity of ITO thick films was measured upon exposure to a target gas($C_2$$H_{5}$ /OH) and some other Volatile Organic Compounds(VOCs), such as, toluene, methanol, benzene, chloroform. As a result, ITO thick films had high sensitivity for ethanol and higher sensitivity with smaller particle size.

• 마이크로전자및패키징학회지
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• 제15권4호
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• pp.101-106
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• 2008

이산화질소를 감지할 수 있는 센서물질로 Pd과 탄소 나노튜브(CNT)가 첨가된 $SnO_2$ 박막을 스핀코팅으로 제조하였으며, 동 시편의 이산화질소에 대한 감지 특성을 $200^{\circ}C$ 및 $1ppm{\sim}5ppm$의 $NO_2$ 농도 하에서 측정하였다. 센서시편의 전기저항은 $NO_2$ 기체의 노출과 농도에 따라 증가 하였으며, Pd이 3wt%로 첨가된 시편의 감도는 26.5로 첨가전의 감도에 비하여 10배 증가하였다. 또한 $SnO_2$ 모체에 첨가한 CNT의 량에 따라서도 감도는 증가 하였으며, 0.225wt% CNT 첨가 시 5ppm의 $NO_2$ 농도에서 감도 값은 72이었다.

• Journal of Ceramic Processing Research
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• 제13권spc2호
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• pp.359-362
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• 2012

We have employed Kelvin force microscopy (KFM) system to measure the potential change of a single SnO2 nanowire which had been synthesized on the Au thin film by a thermal process. By using the KFM probing technique, Rh coated conducting cantilever can approach a single SnO2 nanowire in nano scale and get the potential images with oscillating AC bias between Au electrode and cantilever. Also, during imaging the potential status, we controlled the concentration of oxygen in measuring chamber to change the ionosorption rate. From the results of such experiments, we verified that the surface potential as well as doping type of a single SnO2 nanowire could be changed by oxygen ionosorption.

• 센서학회지
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• 제15권3호
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• pp.211-215
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• 2006

Conducting polymer (Polypyrrole) and Tin oxide ($SnO_{2}$) composite films have been fabricated with layer-by-layer technique. $SnO_{2}$ layer was screen-printed on $Al_{2}O_{3}$ substrate and then was dip-coated with polypyrrole (Ppy). The microstructures of composite films were evaluated by a field emission scanning electron microscope (FE-SEM) and FTIR spectral analysis. The change in sensitivity to various VOCs was observed. The target VOCs were methanol, ethanol, benzene and toluene. The sensitivities of the $Ppy/SnO_{2}$ sensor to benzene and toluene were very low at 1000 ppm (2.1 %, 1.5 %), while the sensitivities to methanol and ethanol was high (9 %, 11 %). It indicates that the sensors have selectivity to alcoholic gases such as methanol and ethanol.