Electrical Properties of Integrated Ir/$IrO_2$ /PZT/Pt/$IrO_2$ /Ir Ferroelectric Capacitor on TiN/W Plug Structure
(TiN/W 플러그 구조 위에 제작된 Ir/$IrO_2$ /PZT/Pt/$IrO_2$ /Ir 강유전체 커패시터의 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2006.06a
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- pp.321-322
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- 2006