• Title/Summary/Keyword: TiN-M

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Fabrication of Anodic Aluminum Oxide on Si and Sapphire Substrate (실리콘 및 사파이어 기판을 이용한 알루미늄의 양극산화 공정에 관한 연구)

  • Kim Munja;Lee Jin-Seung;Yoo Ji-Beom
    • Korean Journal of Materials Research
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    • v.14 no.2
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    • pp.133-140
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    • 2004
  • We carried out anodic aluminum oxide (AAO) on a Si and a sapphire substrate. For anodic oxidation of Al two types of specimens prepared were Al(0.5 $\mu\textrm{m}$)!Si and Al(0.5 $\mu\textrm{m}$)/Ti(0.1 $\mu\textrm{m}$)$SiO_2$(0.1 $\mu\textrm{m}$)/GaN(2 $\mu\textrm{m}$)/Sapphire. Surface morphology of Al film was analyzed depending on the deposition methods such as sputtering, thermal evaporation, and electron beam evaporation. Without conventional electron lithography, we obtained ordered nano-pattern of porous alumina by in- situ process. Electropolishing of Al layer was carried out to improve the surface morphology and evaluated. Two step anodizing was adopted for ordered regular array of AAO formation. The applied electric voltage was 40 V and oxalic acid was used as an electrolyte. The reference electrode was graphite. Through the optimization of process parameters such as electrolyte concentration, temperature, and process time, a regular array of AAO was formed on Si and sapphire substrate. In case of Si substrate the diameter of pore and distance between pores was 50 and 100 nm, respectively. In case of sapphire substrate, the diameter of pore and distance between pores was 40 and 80 nm, respectively

Fabrication and Characterization of Dye-sensitized Solar Cells based on Anodic Titanium Oxide Nanotube Arrays Sensitized with Heteroleptic Ruthenium Dyes

  • Shen, Chien-Hung;Chang, Yu-Cheng;Wu, Po-Ting;Diau, Eric Wei-Guang
    • Rapid Communication in Photoscience
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    • v.3 no.1
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    • pp.16-19
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    • 2014
  • Anodic self-organized titania nanotube (TNT) arrays have a great potential as efficient electron-transport materials for dye-sensitized solar cells (DSSC). Herewith we report the photovoltaic and kinetic investigations for a series of heteroleptic ruthenium complexes (RD16-RD18) sensitized on TNT films for DSSC applications. We found that the RD16 device had an enhanced short-circuit current density ($J_{SC}/mAcm^{-2}=15.0$) and an efficiency of power conversion (${\eta}=7.2%$) greater than that of a N719 device (${\eta}=7.1%$) due to the increasing light-harvesting and the broadened spectral features with thiophene-based ligands. However, the device made of RD17 (adding one more hexyl chain) showed smaller $J_{SC}(14.1mAcm^{-2})$ and poorer ${\eta}(6.8%)$ compare to those of RD16 due to smaller amount of dye-loading and less efficient electron injection for the RD17 device than for the RD16 device. For the RD18 dye (adding one more thiophene unit and one more hexyl chain), we found that the device showed even lower $J_{SC}(13.2mAcm^{-2}) $ that led to a poorest device performance (${\eta}=6.2%$) for the RD18 device. These results are against to those obtained from the same dyes sensitized on $TiO_2$ nanoparticle films and they can be rationalized according to the electron transport kinetics measured using the methods of charge extraction and transient photovoltage decays.

Amorphous Vanadium Titanates as a Negative Electrode for Lithium-ion Batteries

  • Lee, Jeong Beom;Chae, Oh. B.;Chae, Seulki;Ryu, Ji Heon;Oh, Seung M.
    • Journal of Electrochemical Science and Technology
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    • v.7 no.4
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    • pp.306-315
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    • 2016
  • Amorphous vanadium titanates (aVTOs) are examined for use as a negative electrode in lithium-ion batteries. These amorphous mixed oxides are synthesized in nanosized particles (<100 nm) and flocculated to form secondary particles. The $V^{5+}$ ions in aVTO are found to occupy tetrahedral sites, whereas the $Ti^{4+}$ ions show fivefold coordination. Both are uniformly dispersed at the atomic scale in the amorphous oxide matrix, which has abundant structural defects. The first reversible capacity of an aVTO electrode ($295mAhg^{-1}$) is larger than that observed for a physically mixed electrode (1:2 $aV_2O_5$ | $aTiO_2$, $245mAhg^{-1}$). The discrepancy seems to be due to the unique four-coordinated $V^{5+}$ ions in aVTO, which either are more electron-accepting or generate more structural defects that serve as $Li^+$ storage sites. Coin-type Li/aVTO cells show a large irreversible capacity in the first cycle. When they are prepared under nitrogen (aVTO-N), the population of surface hydroxyl groups is greatly reduced. These groups irreversibly produce highly resistive inorganic compounds (LiOH and $Li_2O$), leading to increased irreversible capacity and electrode resistance. As a result, the material prepared under nitrogen shows higher Coulombic efficiency and rate capability.

Intracavity frequency doubling of a tunable Ti:Sapphire laser using a lithium triborate$(LiB_3O_5, LBO)$ crystal (Lithium Triborate$(LiB_3O_5, LBO)$ 결정을 이용한 파장가변 티타늄 사파이어 레이저의 내부공진기 진동수 배가)

  • 추한태;박차곤;김규욱
    • Korean Journal of Optics and Photonics
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    • v.12 no.2
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    • pp.143-149
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    • 2001
  • We performed the intracavity frequency-doubling of a tunable continuous-wave Ti:sapphire laser using a lithium triborate $(LiB_3O_5, LBO)$ crystal. For an efficient intracavity frequency-doubling, we measured the spectral and the angular bandwidth about the $\theta$-direction of LBO crystal. The measured values at a fundamental wavelength of 800 nm were 1.54 nm.cm and 3.8 mrad.cm, respectively. As a result of an intracavity frequency-doubling, we obtained the second-harmonic generation output power of 5.3 mW at 400 nm with the full width at half maximum(FWHM) of 0.089 nm from the fundamental output power of 185 mW at 800 nm. The frequency-doubled output was tuned from 397 nm to 403 nm.403 nm.

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Contact Resistance and Leakage Current of GaN Devices with Annealed Ti/Al/Mo/Au Ohmic Contacts

  • Ha, Min-Woo;Choi, Kangmin;Jo, Yoo Jin;Jin, Hyun Soo;Park, Tae Joo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.2
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    • pp.179-184
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    • 2016
  • In recent years, the on-resistance, power loss and cell density of Si power devices have not exhibited significant improvements, and performance is approaching the material limits. GaN is considered an attractive material for future high-power applications because of the wide band-gap, large breakdown field, high electron mobility, high switching speed and low on-resistance. Here we report on the Ohmic contact resistance and reverse-bias characteristics of AlGaN/GaN Schottky barrier diodes with and without annealing. Annealing in oxygen at $500^{\circ}C$ resulted in an increase in the breakdown voltage from 641 to 1,172 V for devices with an anode-cathode separation of $20{\mu}m$. However, these annealing conditions also resulted in an increase in the contact resistance of $0.183{\Omega}-mm$, which is attributed to oxidation of the metal contacts. Auger electron spectroscopy revealed diffusion of oxygen and Au into the AlGaN and GaN layers following annealing. The improved reverse-bias characteristics following annealing in oxygen are attributed to passivation of dangling bonds and plasma damage due to interactions between oxygen and GaN/AlGaN. Thermal annealing is therefore useful during the fabrication of high-voltage GaN devices, but the effects on the Ohmic contact resistance should be considered.

The Fabrication of Ferroelectric PZT thin films by Sol-Gel Processing (졸-겔법에 의한 강유전성 PZT 박막의 제작)

  • Lee, B.S.;Chung, M.Y.;You, D.H.;Kim, Y.U.;Lee, S.H.;Lee, N.H.;Ji, S.H.;Park, S.H.;Lee, D.C.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.93-96
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    • 2002
  • In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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Piezoelectric and Dielectric Properties of Low Temperature Sintering Pb(Zn1/2W1/2)O3-Pb(Mn1/3Nb2/3)O3-Pb(Zr,Ti)O3 Ceramics

  • Yoo, Ju-Hyun;Lee, Kab-Soo;Lee, Su-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.3
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    • pp.91-95
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    • 2008
  • In this study, in order to develop the composition ceramics for low loss multilayer piezoelectric actuator application, $Pb(Zn_{1/2}W_{1/2})O_3-Pb(Mn_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3$ (abbreviated as PZW-PMN-PZT)ceramics according to the amount of $MnO_2$ addition were fabricated using two-stage calcinations method. And also, their dielectric and piezoelectric properties were investigated. At the 0.2 wt% $MnO_2$ added PZW-PMN-PZT ceramics sintered at $930^{\circ}C$, density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$, piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ showed the optimum value of $7.84g/cm^3$, 0.543, 1,392, 318.7 pC/N, 1,536, respectively for low loss multilayer ceramics actuator application.

HTS Josephson Junctions with Deionized Water Treated Interface (증류수 계면처리를 이용한 고온초전도체 죠셉슨 접합 제작)

  • Moon, S.H.;Park, W.K.;Kye, J.I.;Park, J.D.;Oh, B.
    • Progress in Superconductivity
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    • v.2 no.2
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    • pp.76-80
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    • 2001
  • We have fabricated YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) ramp-edge Josephson junctions by modifying ramp edges of the base electrodes without depositing any artificial barrier layer. YBa$_2$Cu$_3$O/7-x//SrTiO$_3$ (YBCO/STO) films were deposited on SrTiO$_3$(100) by on-axis KrF laser deposition. After patterning the bottom YBCO/STO layer, the ramp edge was cleaned by ion-beam and then reacted with deionized water under various conditions prior to the deposition of counter-electrode layers. The top YBCO/STO layer was deposited and patterned by photolithography and ion milling. We measured current-voltage (I-V) characteristics, magnetic field modulation of the critical current at 77 K. Some showed resistively shunted junction (RSJ)-type I-V characteristics, while others exhibited flux-flow behaviors, depending on the dipping time of the ramp edge in deionized water. Junctions fabricated using optimized conditions showed fairly uniform distribution of junction parameters such as I$_{c}$R$_{n}$ values, which were about 0.16 mV at 77 K with 1$\sigma$~ 24%. We made a dc SQUID with the same deionized water treated junctions, and it showed the sinusoidal modulation under applied magnetic field at 77 K. 77 K.

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Piezoelectric and Electro-induced Strain Properties of $(Pb_{1-2x/3}Bi_x)[(Ni_{1/3}Nb_{2/3})_{0.4}(Ti_{0.6}Zr_{0.4})_{0.6}]O_3$Ceramics with the Substitution of $Bi_2O_3$ ($Bi_2O_3$치환에 따른 $(Pb_{1-2x/3}Bi_x)[(Ni_{1/3}Nb_{2/3})_{0.4}(Ti_{0.6}Zr_{0.4})_{0.6}]O_3$ 세라믹스의 압전 및 전계유기 왜형 특성)

  • 윤현상;정회승;임인호;윤광희;김준한;박창엽
    • Electrical & Electronic Materials
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    • v.10 no.5
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    • pp.434-439
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    • 1997
  • It this paper, the piezoelectric and electro-induced strain properties of (P $b_{1-}$2x/3/B $i_{x}$ )[N $i_{1}$3/N $b_{2}$3/)$_{0.4}$( $Ti_{0.6}$Z $r_{0.4}$)$_{0.6}$] $O_3$ceramics (x=0, 0.005, 0.02) were investigated with the substitution of B $i^{3+}$, and the feasibility of the application for bimorph actuator was evaluated by measuring the dynamic properties of the piezoelectric bimorph fabricated with above ceramics. Dielectric constant was enhanced with the increase of B $i^{3+}$ substitution, and appeared the maximum value of 5032 at x=0.01 composition. Increasing the substitution of B $i^{3+}$, the electromechanical coefficient( $k_{p}$ , $k_{31}$ ) was increased up to the substitution of 0.5 mol% B $i^{3+}$, showed the value of 0.656, 0.439, respectively. The piezoelectric constant( $d_{33}$ $d_{31}$ ) had the highest value of 344, 825 with the substitution of 0.5 mol% B $i^{3+}$. The strain, generated by 60 Hz AC electric field, had the largest value of 1200($\times$10$^{-6}$ $\Delta$1/1) in the composition with the substitution of 0.5 mol% B $i^{3+}$. The dynamic properties of the bimorph actuator, fabricated with the composition substitution of 0.5 mol% B $i^{3+}$, showed the largest value of 325 $\mu$m at $\pm$150 V square pulse. square pulse.are pulse..

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Charge-Discharge Characteristics of Lithium Metal Polymer Battery Adopting PVdF-HFP/(SiO2, TiO2) Polymer Electrolytes Prepared by Phase Inversion Technique (상반전 기법으로 제조한 PVdF-HFP/(SiO2, TiO2) 고분자 전해질을 채용한 리튬금속 고분자 2차전지의 충방전 특성)

  • Kim, Jin-Chul;Kim, Kwang-Man
    • Korean Chemical Engineering Research
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    • v.46 no.1
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    • pp.131-136
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    • 2008
  • Silica- or titania-filled poly (vinylidene fluoride-co-hexafluoropropylene)-based polymer electrolytes were prepared by phase inversion technique using N-methyl-2-pyrrolidone and dimethyl acetamide as solvent and water as non-solvent. The polymer electrolytes were adopted to the lithium metal polymer battery using high-capacity cathode $Li[Ni_{0.15}Co_{0.10}Li_{0.20}Mn_{0.55}]O_2$ and lithium metal anode. After the repeated charge-discharge test for the cell, it was proved that the cell adopting the polymer electrolyte based on the phase-inversion membrane containing 40~50 wt% silica showed the highest discharge capacity (180 mAh/g) until 80th cycle and then abrupt capacity fade was just followed. The capacity fade might be due to the deposition of lithium dendrite on the polymer electrolyte, in which the capacity retention was no longer sustainable.