• Title/Summary/Keyword: TiN-M

Search Result 692, Processing Time 0.032 seconds

Pressure Sensing Properties of AlN Thin Films Sputtered at Room Temperature

  • Seok, Hye-Won;Kim, Sei-Ki;Kang, Yang-Koo;Lee, Youn-Jin;Hong, Yeon-Woo;Ju, Byeong-Kwon
    • Journal of Sensor Science and Technology
    • /
    • v.23 no.2
    • /
    • pp.94-98
    • /
    • 2014
  • Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% $N_2$ /Ar. The characterization of film properties were performed using surface profiler, X-ray diffraction, X-ray photoelectron spectroscopy(XPS), and pressure-voltage measurement system. The deposition rates of AlN films were decreased with increasing the $N_2$ concentration owing to lower mass of nitrogen ions than Ar. The as-deposited AlN films showed crystalline phase, and with increasing the $N_2$ concentration, the peak of AlN(100) plane and the crystallinity became weak. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. But in the case of 50% $N_2$ /Ar condition, the peak of (002) plane, which is determinant in pressure sensing properties, appeared. XPS depth profiling of AlN/TiN/SUS430 revealed Al/N ratio was close to stoichiometric value (45:47) when deposited under 50% $N_2/Ar$ atmosphere at room temperature. The output signal voltage of AlN sensor showed a linear behavior between 26~85 mV, and the pressure-sensing sensitivity was calculated as 7 mV/MPa.

Dependence of Poling Field on Pyroelectric Property of $Pb_{0.9}La_{0.1}TiO_3$ Ceramics

  • D. J. You;B. S. Kang;Park, S. K.
    • The Korean Journal of Ceramics
    • /
    • v.6 no.3
    • /
    • pp.291-295
    • /
    • 2000
  • The pyroelectric property of $Pb_{0.9}La$_{0.1}TiO_3$ceramics in a range of 1.3-4.1$\mu\textrm{m}$, fabricated by conventional solid sintering, was investigated as a function of poling field. The pyroelectric of the 4.1$\mu\textrm{m}$ of $Pb_{0.9}La$_{0.1}TiO_3$ceramics is higher than that of the 1.3$\mu\textrm{m}$ and 1.7$\mu\textrm{m}$ of $Pb_{0.9}La$_{0.1}TiO_3$ceramics at a low poling field and the pyroelectric coefficient is 25nC/$\textrm{cm}^2$K at a 4kV/mm poling field in every grain size. In order to explain this phenomenon, the intrinsic and extrinsic effects in view of the definition of the pyroelectric coefficient are introduced. The intrinsic and extrinsic effects on the pyroelectric property were investigated by measuring the tetragonal ratio and the $I_{002}$ with temperature with high temperature X-ray diffractometer. The change of spontaneous polarization and the $90^{\circ}$domain wall motion with temperature in the 1.3$\mu\textrm{m}$ and 4.2$\mu\textrm{m}$ of $Pb_{0.9}La$_{0.1}TiO_3$ceramics have no effects on the pyroelectric coefficient. In our study, it can be seen that the pyroelectric coefficient is related to the quantity of $180^{\circ}$domain switching after poling treatment.

  • PDF

Preparation of graphene-$TiO_2$ composite by aerosol process and it's characterization for dye-sensitized solar cell (에어로졸 공정에 의한 Graphene-$TiO_2$ 복합체 제조 및 염료감응 태양전지 특성평가)

  • Jo, Eun Hee;Kim, Sun Kyung;Jang, Hee Dong;Chang, Hankwon;Roh, Ki-Min;Kim, Tae-Oh
    • Particle and aerosol research
    • /
    • v.9 no.2
    • /
    • pp.51-57
    • /
    • 2013
  • A graphene(GR)-$TiO_2$ composite was synthesized from colloidal mixture of graphene oxide(GO) nanosheets and $TiO_2$ nanoparticles by an aerosol assisted self-assembly. The morphology, specific surface area and pore size of asprepared GR-$TiO_2$ composite were characterized by FE-SEM, BET, and BJH respectively. The shape of GR-$TiO_2$ composite was spherical. The average particle size was 0.5-1 ${\mu}m$ in diameter and the pore diameter ranged 20-50 nm. Photovoltaic characteristics of a mixture of the GR-$TiO_2$ and $TiO_2$ nanoparticles were measured by a solar simulator under simulated solar light. The highest photoelectric conversion efficiency of the mixture photoanode was 5.1%, which was higher than that of $TiO_2$ photoanode.

Photocatalytic degradation of organic compounds by 2-ethylimidazole-treated titania under visible light illumination

  • Seo, Jiwon;Jeong, Junyoung;Lee, Changha
    • Membrane and Water Treatment
    • /
    • v.10 no.3
    • /
    • pp.223-229
    • /
    • 2019
  • Titania modified by 2-ethylimidazole (2-EI) (denoted as $2-EI-TiO_2$) demonstrated visible light photocatalytic activity for the degradation of organic compounds. $2-EI-TiO_2$ was a bright brown powder that exhibited similar crystallinity and morphology with the control $TiO_2$. A diffuse reflectance spectrum indicated that $2-EI-TiO_2$ absorbs visible light of all wavelengths. X-ray photoelectron spectroscopy (XPS) confirmed the cationic state of nitrogen species (e.g. Ti-O-N) on the surface of $2-EI-TiO_2$. Visible light-illuminated $2-EI-TiO_2$ degraded $10{\mu}M$ 4-chlorophenol (4-CP) by approximately 85% in 4 h. The photochemical activity of $2-EI-TiO_2$ was selective in targeting the organic compound. The repeated use of $2-EI-TiO_2$ decreased the photocatalytic activity for the 4-CP degradation. Experiments using radical scavengers and oxidant probes revealed that the oxidation by photogenerated holes is responsible for the degradation of organic compounds by illuminated $2-EI-TiO_2$ and the role of $^{\bullet}OH$ is negligible.

A Study on the Interfacial Bonding in AlN Ceramics/Metals Joints: I. Residual Stress Analysis of AlN/Cu and AlN/W Joints Produced by Active-Metal Brazing (AlN 세라믹스와 금속간 계면접합에 관한 연구 : I. AlN/Cu 및 AlN/W 활성금속브레이징 접합체의 잔류응력 해석)

  • Park, Sung-Gye;Lee, Seung-Hae;Kim, Ji-Soon;You, Hee;Yum, Young-Jin
    • Korean Journal of Materials Research
    • /
    • v.9 no.10
    • /
    • pp.962-969
    • /
    • 1999
  • Elastic and elasto-plastic stress analyses of AlN/Cu and AlN/W pints produced by active-metal brazing method using Ag-Cu-Ti insert-metal were performed with use of Finite-Element-Method(FEM). The results of stress analyses were compared with those from the pint strength tests and the observations of fracture behaviors. It was shown that a remarkably larger maximum principal stress is built in the AlN/Cu pint compared to the A1N/ W joint. Especially, the stress concentration with tensile component was confirmed at the free surface close to the bonded interface of AlN/Cu. The elasto-plastic analysis under consideration of stress relaxation effect of Ag-Cu-Ti insert possessing a so-called 'soft-metal effect' showed that the insert leads to a lowering of maximum principal stress in AlNiCu pint, even though an increase of the insert thickness above 100$\mu\textrm{m}$ could not bring its further decrease. The maximum pint strengths measured by shear test were 52 and 108 MPa for AlNiCu and AlN/W pints. respectively. Typical fractures of AlN/Cu pints occurred in a form of 'dome' which initiated from the free surface of AlN close to the bonded interface and proceeded towards the AlN inside forming a large angle. AlN/W pints were usually fractured at AlN side along the interface of AlN/insert-metal.

  • PDF

Room-Temperature Fabrication of Barium Titanate Thin Films by Aerosol Deposition Method (에어로졸데포지션법을 이용한 $BaTiO_3$ 박막의 상온 코팅)

  • Oh, Jong-Min;Nam, Song-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.11a
    • /
    • pp.31-31
    • /
    • 2008
  • 고주파 잡음 발생과 고집적화 문제 해결을 위해 고용량 디커플링 캐패시터를 기판에 내장하는 연구가 활발히 진행되고 있다. 본 연구에서는 초고주파 환경에서 고용량 기판 내장형 디커플링 캐패시터로의 응용을 위해 $BaTiO_3$박막을 에어로졸 데포지션 법을 이용하여 12~0.2 ${\mu}m$의 두께로 제조하였고 그 유전특성을 조사하였다. 그결과, 1 MHz에서 permittivity가 70, loss tangent은 3% 이하였으며, capacitance density는 $1{\mu}m$의 두께에서 59 nF/$cm^2$이었다. 하지만, 박막의 두께가 $1{\mu}m$ 이하에서는 XRD를 통해 결정성이 확인 되었음에도 큰 누설전류로 인해 유전특성을 확인할 수 없었다. 이 누설전류의 발생 원인을 조사하기 위해 $BaTiO_3$박막의 표면의 미세구조를 SEM으로 관찰한 결과 여러 결함들이 확인되었으며, 또한 전극 직경의 크기를 1.5 mm에서 0.33 mm로 작게 변화시킴으로서 그 유전특성을 조사하여 박막의 불균일성과 박막화의 가능성을 확인하였다.

  • PDF

Voltammetric Determination of Droxidopa in the Presence of Tryptophan Using a Nanostructured Base Electrochemical Sensor

  • Yaghoubian, Halimeh;Jahani, Shohreh;Beitollahi, Hadi;tajik, Somayeh;Hosseinzadeh, Rahman;Biparva, Pouria
    • Journal of Electrochemical Science and Technology
    • /
    • v.9 no.2
    • /
    • pp.109-117
    • /
    • 2018
  • A novel carbon paste electrode modified with $Cu-TiO_2$ nanocomposite, 2-(ferrocenylethynyl)fluoren-9-one (2FF) and ionic liquid (IL) (2FF/$Cu-TiO_2$/IL/CPE) was fabricated and employed to study the electrocatalytic oxidation of droxidopa, using cyclic voltammetry (CV), chronoamperometry (CHA) and differential pulse voltammetry (DPV) as diagnostic techniques. It has been found that the oxidation of droxidopa at the surface of modified electrode occurs at a potential of about 295 mV less positive than that of an unmodified CPE. DPV exhibits a linear dynamic range from $5.0{\times}10^{-8}$ to $4.0{\times}10^{-4}M$ and a detection limit of 30.0 nM for droxidopa. Finally this modified electrode was used for simultaneous determination of droxidopa and tryptophan. Also the 2FF/$Cu-TiO_2$/IL/CPE shows excellent ability to determination of droxidopa and tryptophan in real samples.

The Effect of Alloy Elements on the Damping Capacity and Plasma Ion Nitriding Characteristic of Fe-Cr-Mn-X Alloys. [II Plasma Ion Nitriding Characteristic] (Fe-Cr-Mn-X계 합금의 감쇠능 및 플라즈마 이온 질화특성에 미치는 합금원소의 영향 [II플라즈마 이온 질화특성])

  • Son, D.U.;Lee, H.H.;Seong, J.H.;Park, K.S.;Kim, C.K.;Kang, C.Y.
    • Journal of Power System Engineering
    • /
    • v.9 no.1
    • /
    • pp.76-81
    • /
    • 2005
  • The effect of micro-pulse plasma nitriding temperature and time on the case thickness, hardness and nitride formation in the surface of Fe-12Cr-22Mn-X alloy with 3% Co and 1% Ti alloys elements investigated. External compound layer and internal diffusion layer was constituted in plasma nitride case of Fe-12Cr-22Mn-X alloys and formed nitride phase such as ${\gamma}'-Fe4N\;and\;{\varepsilon}-Fe2-3N$. Case depth increased with increasing the plasma nitriding temperature and time. Surface hardness of nitrided Fe-12Cr-22Mn-X alloys obtained the above value of Hv 1,600 and case depth obtained the above value of $45{\mu}m$ in Fe-12Cr-22Mn-3Co alloy and $60{\mu}m$ in Fe-12Cr-22Mn-1Ti alloy. Wear-resistance increased with increasing plasma nitriding time and showing the higher value in Fe-12Cr-22Mn-1Ti alloy than Fe-12Cr-22Mn-3Co alloy.

  • PDF

A Study on the Electrical Properties of $xPb(R_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$(R=Al,Y) Ceramics ($xPb(R_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$(R=Al, Y) 세라믹스의 전기적 특성에 관한 연구)

  • Kang, Do-Won;Park, Tae-Gone
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.05c
    • /
    • pp.157-160
    • /
    • 2001
  • We have investigated the Dielectric and Piezoelectric properties of $xPb(R_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$ (R=Al,Y) solid solutions in which R ions are substituted for Al and Y ions. The maximum value of electromechanical coupling factor kp of 55% and 51% were obtained at the composition of 5mol% PAT and 5mol% PYT. However mechanical quality factor$(Q_m)$ had a minimum value of 44 and 69 at the composition of 5mol% PAT and 5mol% PYT. Also, the maximum value of piezoelectctric constant of $d_{33}(329[pC/N])$ and $d_{33}(310[pC/N])$ were obtained at the composition of 5mol% PAT and 5mol% PYT.

  • PDF

A Study on the Dielectric and Piezoelectric Properties of xPb($Y_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$Ceramics (xPb($Y_{1/2}Ta_{1/2})O_3-(1-x)Pb(Zr_{0.52}Ti_{0.48})O_3$ 세라믹스의 유전 및 압전 특성에 관한 연구)

  • 강도원;김태열;김범진;김명호;박태곤
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 1999.11a
    • /
    • pp.294-296
    • /
    • 1999
  • Solid solution ceramics having various ratios between xPb( $Y_{1}$2/T $a_{1}$2/) $O_3$ and Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_3$were synthesized by a conventional solid state reaction for well sintered specimens, dielectric and piezoelectric prperties were studied as a function of composition. The dielectric constant of PYT-PZT ceramics of 4 mol% PYT was 1,424 at room temperature. The maximum value of electromechanical couping facotr $k_{p}$ of 51% $k_{t}$ of 30% were obtained at the composition of 4 mol% PYT, howerver mechanical quality factor( $Q_{m}$) had a minimum value of 69 at 4 mol% PYT. Also the maximum value of piezoelectric constant of $D_{33}$(310[pC/N]) and $d_{31}$(-131[pC/N]) were obtained at the composition of 4 mol% PYT content.ntent.t.t.t.

  • PDF