• Title/Summary/Keyword: TiC Addition

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Characteristic of Copper Films on Molybdenum Substrate by Addition of Titanium in an Advanced Metallization Process (Mo 하지층의 첨가원소(Ti) 농도에 따른 Cu 박막의 특성)

  • Hong, Tae-Ki;Lee, Jea-Gab
    • Korean Journal of Materials Research
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    • v.17 no.9
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    • pp.484-488
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    • 2007
  • Mo(Ti) alloy and pure Cu thin films were subsequently deposited on $SiO_2-coated$ Si wafers, resulting in $Cu/Mo(Ti)/SiO_2$ structures. The multi-structures have been annealed in vacuum at $100-600^{\circ}C$ for 30 min to investigate the outdiffusion of Ti to Cu surface. Annealing at high temperature allowed the outdiffusion of Ti from the Mo(Ti) alloy underlayer to the Cu surface and then forming $TiO_2$ on the surface, which protected the Cu surface against $SiH_4+NH_3$ plasma during the deposition of $Si_3N_4$ on Cu. The formation of $TiO_2$ layer on the Cu surface was a strong function of annealing temperature and Ti concentration in Mo(Ti) underlayer. Significant outdiffusion of Ti started to occur at $400^{\circ}C$ when the Ti concentration in Mo(Ti) alloy was higher than 60 at.%. This resulted in the formation of $TiO_2/Cu/Mo(Ti)\;alloy/SiO_2$ structures. We have employed the as-deposited Cu/Mo(Ti) alloy and the $500^{\circ}C-annealed$ Cu/Mo(Ti) alloy as gate electrodes to fabricate TFT devices, and then measured the electrical characteristics. The $500^{\circ}C$ annealed Cu/Mo($Ti{\geq}60at.%$) gate electrode TFT showed the excellent electrical characteristics ($mobility\;=\;0.488\;-\;0.505\;cm^2/Vs$, on/off $ratio\;=\;2{\times}10^5-1.85{\times}10^6$, subthreshold = 0.733.1.13 V/decade), indicating that the use of Ti-rich($Ti{\geq}60at.%$) alloy underlayer effectively passivated the Cu surface as a result of the formation of $TiO_2$ on the Cu grain boundaries.

Liquid Phase Sintered SiC-30 wt% TiC Composites by Spark Plasma Sintering (스파크 플라즈마 소결에 의한 액상소결 SiC-30 wt% TiC 복합체)

  • 조경식;이광순;송진호;김진영;송규호
    • Journal of the Korean Ceramic Society
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    • v.40 no.8
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    • pp.751-757
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    • 2003
  • Rapid densification of a SiC-30 wt% TiC powder with additive 10 wt% A1$_2$O$_3$-Y$_2$O$_3$-CaO was conducted by Spark Plasma Sintering(SPS). The fully-densified materials can be obtain through the SPS process with very fast heating rate and short holding time. In the present work, the heating rate and applied pressure were kept to be $100^{\circ}C$/min and 40 MPa, while sintering temperature varied from $1600^{\circ}C$ to $1800^{\circ}C$ for 10 min. The full densification of SiC-30 wt% TiC composites with the addition of $Al_2$O$_3$, $Y_2$O$_3$ and CaO was achieved at the temperature above $1700^{\circ}C$ by spark plasma sintering. The XRD found that 3C-SiC and TiC were maintained the entire SPS process temperature, without phase transformation of SiC and formation of YAG phase to $1800^{\circ}C$. The microstructures of the rapidly densified SiC-30 wt% TiC composites consisted of smaller equiaxed SiC grains and larger TiC grains. The biaxial strength of 635.2 MPa and fracture toughness of 6.12 MPaㆍ$m^{1/2}$ were found for the specimen prepared at $1750^{\circ}C$.

Effects of Hafnium Addition on the Pitting Corrosion Behavior of Ti Alloys in Electrolyte Containing Chloride Ion (염소이온 함유된 용액에서 Ti합금의 부식특성에 미치는 Hafnium함량의 영향)

  • Kim, Sung-Hwan;Choe, Han-Cheol
    • Corrosion Science and Technology
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    • v.11 no.5
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    • pp.191-195
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    • 2012
  • The aim of this study was to investigate effects of hafnium content on the corrosion behavior of Ti alloys in electrolyte containing chloride ion. For this study, Ti-Hf binary alloys contained 10 wt%, 20 wt% and 30 wt% Hf were manufactured in a vacuum arc-melting furnace and subjected to heat treatment for 12h at $1000^{\circ}C$ in an argon atmosphere. The pitting corrosion behavior of the specimens was examined through potentiodynamic and potentiostatic tests in 0.9 wt% NaCl electrolyte at $36.5{\pm}1^{\circ}C$. The corrosion morphology of Ti-xHf alloys was investigated using optical microscopy (OM) and X-ray diffractometer (XRD). From the optical microstructures and XRD results, needle-like martensite ($\alpha$') phases of the Ti-xHf alloys increased with an increase of Hf addition. Corrosion current density $(I_{corr})$ and current density $(I_{300mV})$ in passive region decreased, whereas, corrosion potential increased with Hf content. At the constant potential ($300mV_{SCE}$), current density decreased as time increased.

The stuctural and dielectric properties of the $BaTiO_{3}+xNb_{2}O_{5}$ ceramics ($BaTiO_{3}+xNb_{2}O_{5}$ 세라믹스의 구조 및 유전특성)

  • Lee, Sang-Chul;Ryu, Ki-Won;Lee, Sung-Gap;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.426-429
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    • 2001
  • The $BaTiO_{3}+xNb_{2}O_{5}$[x=6, 8, 10wt%] ceramics were prepared by conventional mixed oxide method. The structural properties of the $BaTiO_{3}+xNb_{2}O_{5}$ ceramics with the sintering temperature and addition of $Nb_{2}O_{5}$ were investigated by XRD and SEM. Increasing the sintering temperature, the $2{\Theta}$ value of BT (110) peak was shifted to the lower degree and intensity of the BN (310) peak was increased. Increasing the addition of $Nb_{2}O_{5}$, the intensity of BN (100) peak was decreased and BN (310), (110) peaks were increased. The grain size of the $BaTiO_{3}+xNb_{2}O_{5}$ ceramics sintered at $1350^{\circ}C$ were almost uniform. In the $BaTiO_{3}+xNb_{2}O_{5}$ ceramics sintered at $1350^{\circ}C$, the dielectric constant and dielectric loss were 5424, 0.02 respectively.

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The structural and dielectric properties of the $BaTiO_{3}+xNb_{2}O_{5}$ ceramics ($BaTiO_{3}+xNb_{2}O_{5}$ 세라믹스의 구조 및 유전특성)

  • 이상철;류기원;이성갑;이영희
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.426-429
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    • 2001
  • The BaTiO$_3$+xNb$_2$O$_{5}$[x=6,8 , 10wt%] ceramics were prepared by conventional mixed oxide method. The structural properties of the BaTiO$_3$+xNb$_2$O$_{5}$ ceramics with the sintering temperature and addition of Nb$_2$O$_{5}$ were investigated by XRD and SEM. Increasing the sintering temperature, the 2$\theta$ value of BT (110) peak was shifted to the lower degree and intensity of the BN (310) peak was increased. Increasing the addition of Nb$_2$O$_{5}$, the intensity of BN (100) Peak was decreased and BN (310), (110) peaks were increased. The grain size of the BaTiO$_3$+Nb$_2$O$_{5}$ ceramics sintered at 135$0^{\circ}C$ were almost uniform. In the BaTiO$_3$+Nb$_2$O$_{5}$ ceramics sintered at 135$0^{\circ}C$, the dielectric constant and dielectric loss were 5424, 0.02 respectively.espectively.

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Effect of Mo, Ti, Nb on the hot salt corrosion behavior of ferritic stainless steels for automotive exhaust system (자동차배기관용 페라이트계 스테인레스강의 고온염부식에 미치는 Mo, Ti, Nb 원소의 영향)

  • 김수정;안용식
    • Journal of Ocean Engineering and Technology
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    • v.11 no.3
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    • pp.48-55
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    • 1997
  • The steel for automotive exhaust system needs a good corrosion resistance at the atmosphere of high temperature NaCl. Effect of the alloying elements Me, Ti, Nb on the NaCl induced hot corrosion behavior was investigated at the temperatures between 55$0^{\circ}C$ and 75$0^{\circ}C$ for 18Cr ferritic stainless steels. The weight loss by corrosion has increased linearly with corrosion cycle time, and the corrosion rate has accelerated at higher temperature. The alloying of Mo significantly improved corrosion resistance of the steel and the effect was more pronounced at higher temperature. The addition of alloying elements Ti, Nb have also shown improved corrosion resistance by formation of Ti(C,N) or Nb(C, N) precipitates.

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Microwave Dielectric Properties of (1-x)CaTiO3-xYAIO3 and its Low Temperature Densification by CaB2O4 Addition ((1-x)CaTiO3-xYAIO3계의 마이크로파 유전특성과 CaB2O4첨가제의 영향)

  • 강보경;김경용;김범수;김주선;김병호
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.81-86
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    • 2003
  • Microwave dielectric properties have been investigated in the$(1-x)CaTiO_3-xYAlO_3$ (x=0.1~1.0) solid solution system. The mixtures of $CaTiO_3$ and $YalO_3$using solid state method were sintered at various temperatures. Their dielectric constants and related temperature coefficients were strongly depend on the composition of the solid solution. The optimum properties were recorded as for ${\varepsilon}_r=47,$ $Q{\times}f_0$=35000 and ${\tau}_f=+11ppm/^{\circ}C$ without sintering agent. Even at $1200^{\circ}C$ full densification has been achieved with addition of $CaB_2O_4$ in the $0.75CaTiO_3-0.25YalO_3$ composition. The sample of $0.3 wt%-CaB_2O_4$ added $ 0.75CaTiO_3-0.25YalO_3$ sintered at $1300^{\circ}C$ for 3 h showed optimum microwave dielectric properties of ${\varepsilon}_r=47$, $Q{\time}f_0=37000$ and ${\tau}_f=+17ppm/^{\circ}C$, which demonstrates the promising candidates for microwave dielectric materials covering 5~7 GHz range.

Study of Diffraction Efficiency Values for Photopolymer Films Added TiO2 Nanoparticles (TiO2 나노 입자를 첨가한 광고분자 필름의 회절효율 값에 대한 연구)

  • Her, Ki-Young;Kim, Dae-Heum
    • Korean Journal of Optics and Photonics
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    • v.20 no.2
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    • pp.123-127
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    • 2009
  • In order to improve the diffraction efficiency of the photopolymer, we prepared a $TiO_2$ added photopolymer and investigated the optical properties. Prepared photopolymer films are based on polyvinyl alcohol (PVA) as a polymer binder, acryl amide (AA) as a photo-polymerizable monomer, triethanolamine (TEOA) as an initiator, and eosin Y as a sensitizer at 532 nm. To prepare the photopolymer films with the uniform thickness, the constant amount (2.5 ml) of the photopolymer solution was dropped on the glass and spread using a spin coater. Then films were dried for 72 hrs in a darkroom ($20^{\circ}C$, 40% RH) prior to the optical measurement. Then, the diffraction efficiencies of both the photopolymer films containing $TiO_2$ and non-contained films were measured with the various incident angles ($20{\sim}70^{\circ}$). Therefore, $TiO_2$ added photopolymer showed 5% higher diffraction efficiency than neat photopolymer without $TiO_2$ addition. The addition of $TiO_2$ into the photopolymer showed the high diffraction efficiency (over 70%) at broad range ($20{\sim}70^{\circ}C$) of the incident angle.

Microstructural Properties of (Pb)(La,Ce)$TiO_3$ ceramics as a function of $MnO_2$ addition ($MnO_2$ 첨가에 따른 (Pb)(La,Ce)$TiO_3$ 세라믹스의 미세구조특성)

  • Oh, D.U.;Min, S.K.;Yoon, K.H.;Yoo, J.H.;Park, C.Y.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.442-445
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    • 2001
  • In this study, microstructural and dielectric properties of $Pb_{0.83}(La_{0.2}Ce_{0.8})_{0.08}TiO_3$(PCT) ceramics as a function of $MnO_2$ addition were investigated for 30MHz ceramic resonator application. Grain size was gradually increased according to the increase of $MnO_2$ addition amount and showed the highest value of $1.502{\mu}m$ at the 0.9wt% $MnO_2$. Moreover, density showed the highest value of $7.582 g/cm^3$ at the 0.7wt% $MnO_2$.All the composition ceramics,curie temperature was nearly constant around $330^{\circ}C$

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Microstructural Properties of (Pb)(LaCe)$TiO_3$ ceramics as a function of $MnO_2$ addition ($MnO_2$첨가에 따른 (Pb)(La,Ce)$TiO_3$세라믹스의 미세구조특성)

  • 오동언;민석규;윤광희;류주현;박창엽
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.442-445
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    • 2001
  • In this study, microstructural and dielectric properties of P $b_{0.83}$(L $a_{0.2}$C $e_{0.8}$)$_{0.08}$Ti $O_3$PCT ceramics as a function of Mn $O_2$ addition were investigated for 30MHz ceramic resonator application. Grain size was gradually increased according to the increase of Mn $O_2$ addition amount and showed the highest value of 1.502${\mu}{\textrm}{m}$ at the 0.9wt% Mn $O_2$. Moreover, density showed the highest value of 7.582 g/$\textrm{cm}^2$ at the 0.7wt% Mn $O_2$. All the composition ceramics, curie temperature was nearly constant around 33$0^{\circ}C$.EX>.>.>.

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