• Transactions on Electrical and Electronic Materials
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• 제13권5호
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.70-70
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• 2017

TSV(through silicon via)는 긴 종횡비를 갖는 패턴에 Cu, Ta, Ti을 높은 conformality를 갖도록 증착하는 공정이다. Magnetron cathode의 자석 배열 설계는 target 물질 종류에 따라서 multitrack, water drop type등이 있으며 target과 substrate 사이의 공간에 플라즈마를 형성시켜서 기판에 이온 입사량을 늘린 후 기판 바이어스를 이용하여 이온 충돌, re-sputtering을 통한 재증착 과정을 통해 치밀한 금속 박막을 연속적으로 형성할 수 있도록 하는 것이 목적이다. 또한 sputter가 사용되고 있는 분야에 효율을 증대시키고, 증착되는 막의 품질향상을 위해 UBMS를 사용하고 있으며, 산업에 사용되어 지는 300 mm wafer용 시스템은 제작비가 약 10억 원 정도 소요되며 다양한 테스트를 진행하기 위해선 많은 비용이 소요된다. 따라서 비용과 소요시간을 줄여 다양한 테스트를 위해 소규모 플라즈마 시스템을 설계하게 되었다. 61 l/sec 터보 분자 펌프와 다이아프램 펌프를 기초로한 TMP station에 2.75 인치 CF flange가 장착된 6 way cross를 main 챔버로 활용하고, 작은 size의 unbalanced magnetron cathode를 제작, 장착한 다음 6 way cross 주변에 전자석을 적절히 배치하여 300 mm wafer system에서와 동일한 물리적 현상을 테스트 할 수 있도록 하였다. Fig1. (a) UBMS system의 사진을 나타내었고, (b)에는 6 way cross 내부에 발생된 플라즈마의 형상을 나타내었다. 전원 장치는 Advanced Energy사의 MDX-1.5K DC power supply를 사용하였고, 방전 전압 - 전류 관계의 가스 압력에 따른 plasma 현상과 magnetron 배율에 따른 plasma 현상 그리고 전자석에 의한 영향을 주로 관찰 하였다.

• 열처리공학회지
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• 제5권2호
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• pp.85-94
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• 1992

Microstructural evolution of wrought Inconel 718 superalloy with different heat treatment conditions was studied. Heat treatment was performed via conventional(CHT), modified(MHT), Merrick(MeHT) and modified Merrick (MMeHT) methods. The size of ${\gamma}^{\prime}$ and ${\gamma}^{\prime\prime}$ precipitates which are principal strengthening phases in Inconel 718 superalloy increase in order of CHT, MHT, MeHT. For the case of MMeHT, a coexistence of fine ${\gamma}^{\prime\prime}$ precipitate and very coarse particles due to exess growth of ${\gamma}^{\prime\prime}$, which is called bimodal distribution, was observed. CHT gave the finest grain size. (Ti, Nb)C carbide and needle-like ${\delta}$ phase were formed together at grain boundaries for CHT, and were formed both inside and at boundaries of grains for MHT, MeHT and MMeHT. Morphology of partially serrated grain boundaries was developed in all heat treatment conditions except CHT.

• 한국분말재료학회지
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• 제6권1호
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• pp.88-95
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• 1999

The purpose of this study is to investigate the manufacturing feasibility of WC-Co milling inserts via Powder Injection Molding (PIM) process. WC-Co is used in a wide variety of cutting tools due to its high hardness, stiffness, compressive strength and wear resistance properties. WC-Co parts for a high stress application were conventionally produced by the press and sinter method, which were Iimited to 2 dimensional shapes. Manufacturing WC-Co parts for a high stress application by PIM implies that tool efficiency can be highly improved due to increased freedom is design. P30 grade WC powder (WC-Co-TiC-TaC system) was mixed with RIST-5B133 binder and injection molded into milling inserts (Taegu Tech. Model WCMX 06T 308). The mean grain size of the powder was about 0.8$\mu$m. Injection molded specimens were debound by solvent extraction and thermal degradation method at various conditions. The specimens were sintered at 140$0^{\circ}C$ for 1 hr in vacuum. Carbon content, weight loss, dimensional change, and macro defects of the specimen were carefully monitored at each stage of the PIM process. PIMed WC-Co milling inserts reached 100% full density after sinteing. Its mechanical properties and micro-structures were comparable with the press and sintered milling insert. Carbon content of the sintered WC-Co insert was mainly determained by the atmosphere of thermal debinding. By controlling powder loading and injection molding condition, dimensional accuracy could be obtained within 0.4%. We confirm that PIM can not only be an alternative manufacturing method for WC-Co parts economically but also provide a design freedom for more effieient cutting tools.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 A
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• pp.232-234
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• 1999

A 30kVA superconducting generator (S.G.) has been designed, developed and successfully tested in KERI before the end of last year. The design is based on 2-dimensional electromagnetic field analysis of cylindrical coordinate. The field winding of rotor has been wound with superconducting wire of Nb-Ti alloy and tested after assembled with other rotor components. The stator has air-gap type armature windings which allow higher terminal voltage and more sinusoidal voltage waveform than conventional iron cored machines. Steady-state open & short-circuit test and lamp load test have been conducted also. The results of tests are given in this paper and compared with design quantities. Moreover the cooling scheme and characteristics of test system is included.

• 한국초전도ㆍ저온공학회논문지
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• 제19권3호
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• pp.13-17
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• 2017

We investigated the effect of self-assembled BSO nano-defects as pinning centers in BSO-added GdBCO films when the thicknesses of films were varied. 3.5 vol. % BSO-added GdBCO films with varying thicknesses from 200 nm to 1000 nm were deposited on $SrTiO_3$ (STO) substrate by using pulsed laser deposition (PLD) process. For the films with thicknesses of 400 nm and 600 nm, 'anomaly shoulders' in $J_c-H$ characteristic curves were observed near the matching field. The anomaly shoulders appeared in the field dependence of $J_c$ may be attributed to the existence of double pinning mechanisms in thin films. The fit to the pinning force density as a function of reduced field h ($H/H_{irr}$) using the Dew-Hughes' scaling law shows that both the 400 nm- and the 600 nm-thick films have double pinning mechanisms while the other films have a single pinning mechanism. These results indicate that the self-assembled property of BSO result in different role as pinning centers with different thickness.

• 한국재료학회지
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• 제28권11호
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• pp.611-614
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• 2018

Laminate composites composed of $0.95Pb(Zr_{0.52}Ti_{0.48})O_3-0.05Pb(Mn_{1/3}Sb_{2/3})O_3$ piezoelectric ceramic and Fe-Si-B based magnetostrictive amorphous alloy are fabricated, and the effect of control of the areal dimensions and the thickness of the piezoelectric layer on the magnetoelectric(ME) properties of the laminate composites is studied. As the aspect ratio of the piezoelectric layer and the magnetostrictive layer increases, the maximum value of the ME voltage coefficient(${\alpha}_{ME}$) increases and the intensity of the DC magnetic field at which the maximum ${\alpha}_{ME}$ value appears decreases. Moreover, as the thickness of the piezoelectric layer decreases, ${\alpha}_{ME}$ tends to increase. The ME composites exhibit ${\alpha}_{ME}$ values higher than $1Vcm^{-1}Oe^{-1}$ even at the non-resonance frequency of 1 kHz. This study shows that, apart from the inherent characteristics of the piezoelectric composition, small thicknesses and high aspect ratios of the piezoelectric layer are important dimensional determinants for achieving high ME performance of the piezoelectric-magnetostrictive laminate composite.

• 대한금속재료학회지
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• 제47권3호
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• pp.195-201
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• 2009

This paper is concerned with effects of Mn and heat-input on the mechanical properties of EGW welds. Four different kinds of welding consumables were fabricated by varying Mn contents such as 1.3, 1.5, 1.7, 2.0%Mn and each consumable was welded for EGW on four heat-input conditions between 190 and 340 KJ/Cm. Mn contents were decreased as heat-input increases and alloy elements (C, Si, Ti, B, Al) to deoxidize easily also revealed similar tendency to Mn. Their microstructure, Charpy impact property and strength were investigated, and it is found that Charpy impact property and strength exhibit a strong dependence on change of microstructure by Mn contents and heat-input. The increase of Mn contents or the decrease of heat-input made the microstructure fine and increase volume fraction of acicular ferrite, thereby leading to the great improvement of Charpy impact property and strength. In case of single EGW, optimum Mn contents are over 1.7% for the toughness and strength.

• International Journal of Korean Welding Society
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• 제3권1호
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• pp.39-44
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• 2003

The welded specimens were made by butt welding of the 2 wires of 50mm length using the pulsed YAG laser. The laser welded wires were tested for investigating the shape memory effect and the ability of super elasticity. The fatigue properties of the welded wires were investigated using the rotary bending fatigue tester specially designed for wires. Moreover, the effect of defocusing distance during laser welding on the static and fatigue properties was Investigated. The shape memory effect and super elasticity of the laser welded wires were approximately identical with that of base metal at the test temperature below 353K. However, the welded wires were broken within elastic limit at the test temperature above 353k. Under the cyclic bending loading conditions, the welded wires could be useful only below the elastic limit, while the base metal had sufficient fatigue life even the stress induced M-phase region. The fatigue strength of the welded wires was about half of that of the base metal. The deterioration of the static and fatigue properties in the welded wires was proven to be from the large difference of the transformation behavior between the base metal and welded part that is caused by vaporization of Ni-content at the welded part during the welding process. The defocusing distance below 3mm acted more largely on lowering the strength of the welded wires than that of 6mm or 8mm.

• 대한치과교정학회지
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• 제29권5호
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• pp.551-562
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• 1999

본 연구는 치아를 실험적으로 이동시킬 때, 교정력의 크기와 적용방법에 따른 치아이동 양상의 차이가 존재하는 지의 여부와 치근흡수와의 관련 여부에 대하여 평가하고자 하였다. 300g전후의 건강한 수컷 흰쥐 24마리를 세 군으로 나누고 상악 제 1대구치와 상악중절치 사이에 NiTi closed coil spring을 장착하여, 각 군당 50g(A군), 100g(B군), 25g(C군)을 적용하였고 C군의 경우에는 교정력을 적용한지 4일째 50g으로 힘을 증가하였다. 15일간 교정력을 적용하는 동안 매일 ehter로 흡입 마취를 시행하고 치아이동거리를 digital caliper로 측정하고 15일간의 실험기간 종료 후 상악 제1대구치 치근부의 조직표본을 제작하여 광학 현미경으로 관찰한 바 다음과 같은 결과를 얻었다. 1. 각 군별 15일간 총 치아이동거리는 B군에서 가장 컸고, 그 다음 C군, A군의 순이었으나 통계학적으로 유의성있는 차이는 없었다. 2. A, B, C군 모두 전형적인 치아의 이동양상을 보여주었으며 치아이동 지체기가 끝난 날은 C, B, A군의 순서로 각각 7, 8, 9일째 끝났으나 통계학적으로 유의성있는 차이는 없었다. 3. A, B, C군 모두에서 치근의 흡수양상을 관찰할 수 있었고, 특히 B군에서 가장 심한 치근흡수양상을 보여주었고, C군에서 치근흡수의 양상이 가장 적었다. 이상을 종합해볼 때, 교정력이 크다고 하여 더 빠른 치아이동이 일어난다고 볼 수 없으며 교정력이 클수록 초자양변성대가 광범위하게 형성되어 오히려 치근의 흡수도 증가하므로 교정력을 적용할 때 초기 교정력을 보다 적게 적용하여 초자양변성대 형성범위를 줄인 뒤 교정력을 증가시키는 방법이 치근흡수를 최소화하면서 효과적인 치아이동을 얻을 수 있을 것으로 생각된다.