• Title/Summary/Keyword: Ti-Cr-Si-N

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Improvement of Corrosion Resistance and Nano-hardness of Ti-Al-N Deposit Formed by Arc Ion Plating (아크 이온 증착된 TiAlN 도포층의 내식성과 나노 경도 개선)

  • Gang, Bo-Gyeong;Choe, Yong;Gwon, Sik-Cheol;Zang, Shi-Hong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.213-213
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    • 2014
  • $300^{\circ}C$$500^{\circ}C$에서 아크 이온 증착된 도포층의 조성은 각각 Fe : Al : Ti : Si : N = 1.31 : 36.52 : 31.31 : 0.48 : 30.38 [wt.%]와 Fe : Cr : Al : Ti : Si : N = 1.24 : 0.56 : 36.82 : 32.72 : 0.59 : 28.07 [wt.%] 이었다. 0.1N $H_2SO_4$ 수용액과 인공해수 (ASTM D1141-98) 분위기에서 $300^{\circ}C$, $500^{\circ}C$에서 증착된 도포층의 부식전압과 부식속도는 각각 $-0.2787V_{SHE}$, $0.002A/cm^2$, $-2.764V_{SHE}$, $0.002A/cm^2$$-0.2799V_{SHE}$, $0.002A/cm^2$, $-0.0394V_{SHE}$, $0.002A/cm^2$이었다. 나노 경도값은 각각 23.6, 25.8 GPa 이었다. 이는 각각 2208.2, $2434.2H_V$에 해당되었다.

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Study on the characteristics of transition metals for TSSG process of SiC single crystal (SiC 단결정의 TSSG 공정을 위한 전이금속 특성 연구)

  • Lee, Seung-June;Yoo, Yong-Jae;Jeong, Seong-Min;Bae, Si-Young;Lee, Won-Jae;Shin, Yun-Ji
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.2
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    • pp.55-60
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    • 2022
  • In this study, a heat treatment experiment was conducted to select a new melt composition that can easily control the unintentionally doped nitrogen (N-UID) without degrading the SiC single crystal quality during TSSG process. The experiment was carried out for about 2 hours at a temperature of 1900℃ under Ar atmosphere. The used melt composition is based on either Si-Ti 10 at% or Si-Cr 30 at%, and also Co or Sc transition metals, which are effective for carbon solubility, were added at 3 at%, respectively. After the experiment, the crucible was cross-sectionally cut, and evaluated the Si-C reaction layer on the crucible-melt interface. As a result, with Sc addition, Si-C reaction layers uniformly occurred with a Si-infiltrated layer (~550 ㎛) and a SiC interlayer (~23 ㎛). This result represented that the addition of Sc is an effective transition metal with high carbon solubility and can feed carbon sources into the melt homogeneously. In addition, Sc is well known to have low reactivity energy with nitrogen compared to other transition metals. Therefore, we expect that both growth rate and Nitrogen UID can be controlled by Si-Sc based melt in the TSSG process.

Fabrication process of embedded passive components in MCM-D (MCM-D 기판 내장형 수동소자 제조공정)

  • 주철원;이영민;이상복;현석봉;박성수;송민규
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.4
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    • pp.1-7
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    • 1999
  • We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

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Characteristic of PECVD-$WN_x$ Thin Films Deposited on $Si_3N_4$ Substrate ($Si_3N_4$ 기판 위에 PECVD 법으로 형성한 Tungsten Nitride 박막의 특성)

  • Bae, Seong-Chan;Park, Byung-Nam;Son, Seung-Hyun;Lee, Jong-Hyun;Choi, Sie-Young
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.7
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    • pp.17-25
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    • 1999
  • Tungsten nitride($WN_x$) films were deposited by PECVD method on silicon nitride($WSi_3N_4$) substrate. The characteristics of $WN_x$ film were investigated with changing various processing parameters ; substrate temperature, gas flow rate, rf power, and different nitrogen sources. The nitrogen composition in $WN_x$ film varied from 0 to 45% according to the $NH_3$ and $N_2$ flow rate. The highest deposition rate of 160 nm/min was obtained for the $NH_3$ gas and relatively low deposition rate of $WN_x$ films were formed by $N_2$ gas. $WN_x$ films deposited on $WSi_3N_4$ substrate had higher deposition rate than that of TiN and Si substrates. The purity of $WN_x$ film were analyzed by AES and higher purity $WN_x$ films were deposited using $NH_3$ gas. The XRD analysis indicates a phase transition from polycrystalline tungsten(W) to amorphous tungsten nitride($WN_x$), showing improved etching profile of $WN_x$ films Thick $WN_x$ films were deposited on various substrates such as Tin, NiCr and Al and maximum thickness of $1.6 {\mu}m$ was obtained on the Al adhesion layer.

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A Study on the Improvement of Tool's Life by Applying DLC Sacrificial Layer on Nitride Hard Coated Drill Tools (드릴공구의 이종질화막상 DLC 희생층 적용을 통한 공구 수명 개선 연구)

  • Kang, Yong-Jin;Kim, Do Hyun;Jang, Young-Jun;Kim, Jongkuk
    • Journal of the Korean institute of surface engineering
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    • v.53 no.6
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    • pp.271-279
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    • 2020
  • Non-ferrous metals, widely used in the mechanical industry, are difficult to machine, particularly by drilling and tapping. Since non-ferrous metals have a strong tendency to adhere to the cutting tool, the tool life is greatly deteriorated. Diamond-like carbon (DLC) is one of the promising candidates to improve the performance and life of cutting tool due to their low frictional property. In this study, a sacrificial DLC layer is applied on the hard nitride coated drill tool to improve the durability. The DLC coatings are fabricated by controlling the acceleration voltage of the linear ion source in the range of 0.6~1.8 kV. As a result, the optimized hardness(20 GPa) and wear resistance(1.4 x 10-8 ㎣/N·m) were obtained at the 1.4 kV. Then, the optimized DLC coating is applied as an sacrificial layer on the hard nitride coating to evaluate the performance and life of cutting tool. The Vickers hardness of the composite coatings were similar to those of the nitride coatings (AlCrN, AlTiSiN), but the friction coefficients were significantly reduced to 0.13 compared to 0.63 of nitride coatings. The drilling test were performed on S55C plate using a drilling machine at rotation speed of 2,500 rpm and penetration rate of 0.25 m/rev. The result showed that the wear width of the composite coated drills were 200 % lower than those of the AlCrN, AlTiSiN coated drills. In addition, the cutting forces of the composite coated drills were 13 and 15 % lower than that of AlCrN, AlTiSiN coated drills, respectively, as it reduced the aluminum clogging. Finally, the application of the DLC sacrificial layer prevents initial chipping through its low friction property and improves drilling quality with efficient chip removal.

고효율 자외선/광촉매 시스템을 이용한 고농도 유기성 폐수처리

  • Jeong, Hyo-Gi;Kim, Jung-Gon;Kim, Si-Uk
    • 한국생물공학회:학술대회논문집
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    • 2005.04a
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    • pp.272-276
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    • 2005
  • Food wastewater derived from three-stages methane fermentation system showed high concentrations of sCOD, T-N and $NH_{3}-N$. To treat the organic wastewater, the optimal operating conditions for high efficiency $UV/TiO_{2}$ photocotalytic system have been investigated. In the first process, wastewater was pre-treated with $FeCl_{3}. The optimum pH and concentration for coagulation were 4.0 and 2000 mg/L, respectively. Through this process, 52.6% of $COD_{cr}$ was removed. The second process was $UV/TiO_{2}$ photocatalytic reaction. The optimum conditions for the operation of $UV/TiO_{2}$ photocatalytic system developed in this lab have been studied. In this process, CODcr was removed from 2890 to 184 mg/L and T-N was removed from 2496 to 914 for 24 hours, respectively.

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Ni계/Ag계 금속필러와 c-BN의 브레이징 접합부에서 Ti의 영향

  • Lee, Jang-Hun;Lee, Yeong-Seop;Im, Cheol-Ho;Lee, Ji-Hwan;Song, Min-Seok
    • Proceedings of the KWS Conference
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    • 2006.10a
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    • pp.196-198
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    • 2006
  • 이 연구는 CBN을 건전한 브레이징을 하기 위해서, CBN과 금속필러메탈 접합계면에서의 금속성분과 산화물, 탄화물의 거동을 분석하는데 있다. 진공 인덕션 브레이징으로 온도는 $950{\sim}1100^{\circ}C$에서 브레이징 유지시간은 $5{\sim}30$분로 실시하였다. 금속필러로는 Ni-7Cr-3Fe-3B-4Si(wt.%)와 Ag-25Cu-5Ti(wt.%)을 사용하여 브레이징된 CBN은 $950{\sim}1000$도, 유지시간 10분 사이에서 각각 건전한 계면과 표면을 얻을 수 있었으며, 계면에서 Ti-rich상과 화합물이 확인되었다. 이상의 결과로 부터 화합물의 생성과 건전한 접합공정은 브레이징 온도와 시간이 좌우하며, N과 B, Ti의 함유량이 CBN의 브레이징 접합 특성의 중요변수로 생각되어진다. CBN과 Ni계/Ag계 브레이징 필러의 계면에서의 미세조직 및 화학반응의 메커니즘은 SEM, EPMA, XRD를 이용하여 분석하였다.

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ta-C 후막코팅을 이용한 비철금속가공용 절삭 공구류의 수명향상에 관한 연구

  • Jang, Yeong-Jun;Gang, Yong-Jin;Kim, Dong-Sik;Lee, Ui-Yeong;Kim, Jong-Guk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.132-132
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    • 2016
  • 기계 가공품의 정밀화, 경량화 요구로 난색재로 분류되는 비철분야 및 복합재 가공용 공구개발에 대한 수요가 급증하고 있으나, 기존 난삭재 가공 시 절삭공구의 마모가 빠르고, 상대재의 융착 불량 등이 공구 수명 감소의 주요 영향으로 보고된다. 상기문제를 해결하기 위해 절삭가공 공정 중 과다한 절삭유의 사용에 따른 가공비용, 에너지소모 증가, 환경오염 등으로 절삭유의 최소화 또는 절삭유를 사용하지 않는 표면처리기술등의 친환경 가공기술의 개발이 필요하다. 내융착 및 내마모 특성 향상을 위한 표면코팅 방법으로 수소가 포함되지 않은 고경도 비정질 카본 (ta-C)이 있으나, ta-C 코팅 막은 경도 30 - 80 GPa, 잔류응력 3 - 10 GPa 범위로 일반 경질 코팅 막 (AlTiN, TiSiCrN : 평균 3 GPa)에 비해 높고 산업적 활용이 가능한 0.5 - 1.5 um 두께 수준의 후막화가 힘들어 매우 우수한 절삭공구용 코팅 막 특성에도 불구하고 적용사례가 매우 적다. 따라서, 본 연구에서는 아크플라즈마 방식 (Filtered Cathode Vacuum Arc Plasma, FCVA)을 활용한 고경도/무수소 카본 코팅 막을 후막형태로 증착하여 비철금속가공용 절삭 공구류의 수명향상 기법을 제시하고자 한다. ta-C 코팅 막의 기초 공정개발 단계에서는 바이어스 전압, 공정시간을 달리하여 ta-C 코팅 막의 기계적 물성(경도: $50{\pm}3GPa$, 잔류응력: $6{\pm}1GPa$, 밀착력: 30N 이상 및 트라이볼로지 특성: 마찰계수 0.1 이하, 마멸량: $1.85{\times}10-14mm^3$)을 확보하여 절삭공구로의 공정실용화 적용검토를 실시하였다. ta-C 코팅 막은 (1) WC 공구 및 기존 상용품인 (2) TiAlN/TiN/WC 구조에 대해 증착을 실시하였으며 코팅 막의 두께 변화에 따른 실제 절삭환경에서의 내수명 관측을 진행하였다. 시험결과, ta-C/WC의 단일막 구조인 절삭공구의 경우, 실제 절삭환경에서 쉽게 박리가 발생하여 코팅 막으로서의 효과를 나타내지 못하였다. 이는, 기초 공정개발 단계에서의 밀착력 기준이 실제 환경과 부합하지 않는 것을 의미하며 추후 공정개선을 통해 극복하고자 한다. 반면에, 상용품인 (2) TiAlN/TiN/WC 구조의 절삭공구 대비 ta-C/TiAlN/TiN/WC 구조에서 내수명 증가는 약 2.5배 (기존 300회, 코팅 후 800회)로 증가하였으며 ta-C 코팅 막의 두께가 $0.6-0.8{\mu}m$일 때 최대치를 취한 후 감소하였다. 이를 통해, 절삭공구로의 ta-C 코팅 막 효과는 최외각 층의 두께 범위와 모재 강도보강을 할 수 있는 적절한 중간층 막 (TiN/TiAlN 층)이 혼합되어 나타난 것으로 사료되며 현재 산업계로의 적용을 위한 대량생산용 코팅장비의 개발 및 비용절감을 위한 공정개발이 진행 중이다.

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Seasonal Variation and Statistical Analysis of Particulate Pollutants in Urban Air (도시대기립자상물질중 오염성분의 계절적 변동 및 통계적 해석)

  • 이승일
    • Journal of environmental and Sanitary engineering
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    • v.9 no.2
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    • pp.8-23
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    • 1994
  • During the period from Mar., 1991 to Feb., 1992 66 tSP samples were collected by Hi volume air sampler at 1 sampling site in Seoul and the amount of concentration of 21 components(SO$_{4}$$^{2-}$, NO$_{3}$$^{-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Al, Ba, Ca, Cd, Cr, Cu, Fe, It Mg, Mn, Na, Ni, Pt Si, Ti, Zn, Zr ) were measured. And monthly and seasonal variation were surveyed and the principal component analysis( PCA ) were carried out with respect to these amount of pollutants, minimum of visibility and radiation on a horizontal surface. The total amount of soluble ion in water was high in order o(SO$_{4}$$^{2-}$> NO$_{3}$$^{-}$> N%'>Cl$^{-}$ and metal ion was high in order of Na> Ca>Si> Fe> Al> K> Mg> Zn> Pb> Cu>Ti> Mn > Ba> Cr> Zr> Ni> Cd. There was Seasonal variation in concentration for SO$_{4}$$^{2-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Na, Al, Ca, Bt Mg, Fe and Si. It was assumed that the components of the highest concentration on April were depend on yellow sand and the frequency of wind velocity and direction. As the results of PCA, the amount of pollution components was able to characterized with two principal components(Z$_{1}$, Z$_{2}$ ). The first principal components Z$_{1}$ was considered to be a factor indicating the pollutants originated from natural generation and The second principal components Z$_{2}$ was considered to be a factor indicating the pollutants originated from human work. The monthly concentration of pollutants in ISP, minimum of visibility and radiation on a horizontal surface was possible to evaluate by the use of these two principal components Z$_{1}$ and Z$_{2}$ .

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A Study on Dancheong Pigments of Old Wooden Building in Gwangju and Jeonnam, Korea (광주.전남지역 목조 고건축물에 사용된 단청안료에 대한 연구)

  • Jang, Seong-Wook;Park, Young-Seog;Park, Dae-Woo;Kim, Jong-Kyun
    • Economic and Environmental Geology
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    • v.43 no.3
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    • pp.269-278
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    • 2010
  • We investigated characteristics of the coloring material of Dancheong pigments and hope that this study contributes the revival of traditional Dancheong pigments color. For this purpose, we collected Dancheong fragment samples that fell off naturally from old wooden buildings in Gwangju and Jeonnam and analyzed the natural coloring material by XRD and EDS-SEM analysis method. In white pigments of Dancheong fragments, it is confirmed that gypsum$(CaSO_{4}{\cdot}2H_{2}O)$, quartz$(SiO_{2})$, white lead$(PbCO_{3})$ and calcite$(CaCO_{3})$ which have been used for white pigments since ancient times and $TiO_{2}$ which is common used in modern times. In red pigments of Dancheong fragments, it is confirmed that hematite$(Fe_{2}O_{3})$ and red lead$(Pb_{3}O_{4})$, which have been used for red pigments since ancient times and C.I. pigment orange $13(C_{32}H_{24}C_{12}N_{8}O_{2})$ but there is no cinnabar(HgS) which has been used since B.C. 3000 in China. In yellow pigments of Dancheong fragments, it is confirmed that crocoite$(PbCrO_{4})$ and massicot(PbO). In blue pigments of Dancheong fragments, it is confirmed that sodalite$(Na_{4}BeAlSi_{4}O_{12}Cl)$ and nosean $(Na_{8}Al_{6}Si_{6}O_{24}SO_{4})$ as coloring material of blue pigment and C.I. pigments blue $29(Na_{7}Al_{6}Si_{6}O_{24}S_{3})$ which is used in modern times. In green pigments of Dancheong fragments, it is confirmed that calumetite$(Cu(OHCI)_{2}{\cdot}2H_{2}O)$, escolaite(Cr2O3), dichromium trioxide$(Cr_{2}O_{3})$, emerald green$(C_{2}H_{3}As_{3}Cu_{2}O_{8})$, and C.I. pigments green$(C_{32}H_{16}-XCl_{x}Cu_{8})$ which is used in modern time. In black pigments of Dancheong fragments, Chiness ink(carbon black) is confirmed.