Effects of native oxide on Si substrates-As ion implanted on the formation of Ti-Silicides grown by RTP method (As Ion 주입된 Si 기판위의 native oxide가 RTP법으로 성장시킨 Ti-Silicides의 형성에 미치는 영향)
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- Proceedings of the KIEE Conference
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- 1988.07a
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- pp.319-323
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- 1988