• Title/Summary/Keyword: Ti films

Search Result 2,491, Processing Time 0.027 seconds

Physical and Electrical Properties of Nanocrystalline Carbon Films Prepared with Ti Concentration for Contact Strip Application of Electric Railway (전기철도 집전판 응용을 위한 Ti 나노금속 함량에 따른 나노결정 탄소박막의 물리적, 전기적 특성)

  • Park, Yong-Seob;Jung, Ho-Sung;Park, Chul-Min
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.61 no.10
    • /
    • pp.1561-1564
    • /
    • 2012
  • In this work, we have fabricated the nanocrystalline carbon films by using unbalanced magnetron sputtering method with graphite and Ti targets for contact strip application of electrical railway. The power density of graphite target was fixed and the power density was increased for the increase of Ti concentration in TiC films. We investigated the hardness, surface roughness, contact angle, resistivity, HRTEM and XPS of TiC films with Ti concentration. The hardness and resistivity were improved with increasing Ti concentration. These results indicate that the improvement of hardness and resistivity is related to the increase of sp2 clusters in TiC films.

Characterization of Surface Oxides in Gold Thin Films with V- and Ti- underlays by AES and XPS (AES/XPS를 이용한 Au/V, Au/Ti 박막의 표면산화물 분석)

  • Kim, Jin -Young
    • Journal of the Korean Vacuum Society
    • /
    • v.1 no.1
    • /
    • pp.100-105
    • /
    • 1992
  • Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) analyses have been performed on double-structured Au/V and Au/Ti thin films after heat treatment at 500$^{\circ}$C in air. V- and Tiunderlays sandwiched between gold thin films and SiOz substrates form oxides on the free surface of gold films during the heat treatment. The chemical compositions of the oxides were identified as V205 and TiOz in Au/V and Au/Ti thin films, respectively.

  • PDF

Characteristics of $TiO_2-$SnO_2$ Thin Films Fabricated Using Sol-Gel Method (솔-젤법에 의해 제작된 $TiO_2-$SnO_2$ 박막의 특성)

  • You, Do-Hyun;Yuk, Jae-Ho;Lim, Kyung-Bum
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.51 no.11
    • /
    • pp.511-516
    • /
    • 2002
  • $TiO_2-SnO_2$ thin films are fabricated using sol-gel method. In case the amount of water required hydrolysis smaller than that for stoichiometry, Ti sol forms clear sol which has normal chain structure. On the contrary, in case the amount of water required hydrolysis larger than that for stoichiometry, Ti sol forms suspended sol which has cluster structure. The thickness of thin films increase about $0.03{\sim}0.04{\mu}m$ every a dipping. The permittivity and dissipation factor of $TiO_2-SnO_2$ thin films decrease with increasing frequency. Thin films show semiconductive characteristics above $400^{\cric}C$.

A Study on Wear Resistance of TiN Films Prepared by Arc Vapor Ion Deposition Process (Arc Vapor Ion Deposition 법으로 제조된 TiN 피막의 내마모성에 관한 연구)

  • 신현식;한전건;장현구;고광진
    • Journal of the Korean institute of surface engineering
    • /
    • v.27 no.1
    • /
    • pp.36-44
    • /
    • 1994
  • The TiN films were deposited on the stainless substrates using arc vapor ion deposition process to in-vestigated the wear resistance. Pin-on-disc tests were performed to measure the volume wear loss of TiN films. The substrate bias voltages and nitrogen flow rates were selected as the deposition parameters of TiN films. It was found that the wear resistance of TiN films was enhanced with increasing bias voltages(0~-300 V) and nitrogen flow rates(220~380 SCCM). The volume wear loss TiN films were about 9.5~2.1$\times$$10^{-3}mm^3$ and 3.5~2.2$\times$$10^{-3}mm^3$ with bias voltages and nitrogen flow rates, respectively.

  • PDF

The Deodorization and Antibacterial Activities of PLA Films Embedded with TiO2 Nanoparticles (TiO2 나노입자를 함유한 PLA 필름의 탈취성과 항균성)

  • Koo, Gwang-Hoe;Jang, Jin-Ho
    • Textile Coloration and Finishing
    • /
    • v.20 no.6
    • /
    • pp.1-7
    • /
    • 2008
  • The effects of $TiO_2$ contents and UV irradiation treatment on the surface properties of PLA films embedded with $TiO_2$ nanoparticle were investigated. Whereas UV irradiation decreased reflectance of the treated PLA films proportionally with increasing UV energy, the reflectance of PLA/$TiO_2$ films increased with increasing UV energy. The UV irradiation treatment caused PLA/$TiO_2$ blend films more polar as indicated in the generation of new carbonyl group and decrease in zeta potentials, which was more pronounced with the introduction of $TiO_2$. Upon UV irradiation, $TiO_2$ particles appeared on the film surface as observed in SEM images. The PLA/$TiO_2$ blend films showed photocatalytic properties such as photobleaching of methylene blue, deodorization of ammonia and antimicrobial activity in comparison with pure PLA films.

Microsstructure of Sputter-Deposited and Annealed Cu-Cr, Cu-Ti Alloy Films on Polyimide Substrate and Their Adhesion Property (폴리이미드에 스퍼터 증착한 Cu-Cr, Cu-Ti 합금박막의 열처리 전후의 접착력과 미세구조)

  • 서환석;김기범
    • Journal of the Korean institute of surface engineering
    • /
    • v.27 no.5
    • /
    • pp.261-272
    • /
    • 1994
  • Both Cu-Cr and Cu-Ti alloy films with different composition were prepared by dc magnetron sputtering onto polyimide substrate and their adhesion and microstructure were observed. In addition, the effect of heat treatment at $400^{\circ}C$ for 2 hours on the variation of adhesion properties and on the changess of microstructure were investigated. Cu-Cr alloy films have crystalline structure of either for or bcc phase depending on the composition of the film. However, the Cu-Ti alloy film forms fcc phase at low Ti concentration while it forms an amorphous phase as the Ti concentration in the films is increased to more than 25at.%. TEM analysis reveal that the microstructure of Cu-Cr and Cu-Ti films forms an open structure with vacant spaces. The adhesion between Cu-Cr, Cu-Ti alloy films and polyimide substrate is relatively good before the heat treatment, but is noticeably reduced after the heat treatment. In particular, the adhesion strength is significantly reduced in the Cu-Ti alloy films after the heat treatment. The reduction of adhesion strength after the heat treatment is identified to relate with the formation of oxide phases at the metal/polyimide interface by AES(Auger Electron Spectroscopy).

  • PDF

Influence of Temperature and pH on Adsorption of Ru(II) Dye from Aqueous Solution onto $TiO_2$ Films ($TiO_2$ 전극과 Ru(II) 염료와의 흡착에 있어서 온도 및 pH의 영향)

  • Hwang, Kyungjun;Yoo, Seungjoon;Shim, Wanggeum;Lee, Jaewook
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 2010.11a
    • /
    • pp.60.2-60.2
    • /
    • 2010
  • A $TiO_2$ films in dye-sensitized solar cells was fabricated using $TiO_2$ colloidal sol prepared from titanium iso-propoxide used as a starting material by applying the sol-gel method. It was characterized by particle size analyzer, XRD, FE-SEM, and BET analysis. The adsorption isotherms of dye molecule on $TiO_2$ films were obtained at three different temperatures (30, 45, $60^{\circ}C$) and at three different pH (3, 5, 7). The adsorption kinetics of dye molecule on $TiO_2$ films were obtained at three different temperatures (30, 45, $60^{\circ}C$. The adsorption experimental data were correlated with Langmuir isotherm model and pseudo-second-order model. Also the isosteric enthalpies of dye adsorption were calculated by the Clausius-Clapeyron equation. In addition, the adsorption energy distribution functions which describe heterogeneous characteristics of nanocrystalline $TiO_2$ film surface were calculated by using the generalized nonlinear regularization method. We found that efficient adsorption of N719 dye from aqueous solution onto $TiO_2$ films can be successfully achieved by dye adsorption conditions and morphology of $TiO_2$ films.

  • PDF

A Study on the Phase Transformations of (TiAl)N Films Deposited by TFT Sputtering System (TFT(Two-Facing-Targets) 스퍼터장치에 의해 증착된 (TiAl)N 박막의 상변태에 관한 연구)

  • Han, Chang-Suk
    • Journal of the Korean Society for Heat Treatment
    • /
    • v.18 no.5
    • /
    • pp.281-287
    • /
    • 2005
  • Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures of 573 to 773 K by using a two-facing-targets type DC sputtering system in a mixture Ar and $N_2$ gases. Atomic compositions of the binary Ti-Al alloy target is Al-rich (25Ti-75Al (atm%)). Process parameters such as precursor volume %, substrate temperature and Ar/$N_2$ gas ratio were optimized. The crystallization processes and phase transformations of (TiAl)N thin films were investigated by X-ray diffraction, field-emission scanning electron microscopy. The microhardness of (TiAl)N thin films were measured by a dynamic hardness tester. The films obtained with Ar/$N_2$ gas ratio of 1:3 and at 673 K substrate temperature showed the highest microhardness of $H_v$ 810. The crystallized and phase transformations of (TiAl)N thin films were $Ti_2AlN+AlN{\rightarrow}TiN+AlN$ for Ar/$N_2$ gas ratio of 1:3, $Ti_2AlN+AlN{\rightarrow}TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 1:1 and $TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN{\rightarrow}Ti_2AlN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 3:1. The above results are discussed in terms of crystallized phases and microhardness.

Characteristics of TiO2 and Ag/TiO2 optical thin film by Co-sputtering method (동시 스퍼터링법에 이용하여 제작한 TiO2와 Ag/TiO2 광학 박막의 특성)

  • Kim, Sang-Cheol;Hahn, Sung-Hong;Kim, Eui-Jung;Lee, Chung-Woo;Joo, Jong-Hyun;Kim, Goo-Cheol
    • Korean Journal of Optics and Photonics
    • /
    • v.16 no.2
    • /
    • pp.168-173
    • /
    • 2005
  • Ag-doped $TiO_2$ thin films were prepared by RF magnetron co-sputtering method, and their physical and chemical properties were examined as a function of calcination temperature. XRD results showed that the crystallite size of Ag-doped films was smaller than that of the $TiO_2$ thin films. SEM results showed that the particle size of $Ag/TiO_2$ film was smaller and more uniform than pure $TiO_2$ film. The films had high transparency in the visible range. The films calcined at $600^{\circ}C$ were the anatase phase, and the films calcined at $900^{\circ}C$ were a mixture of anatase and rutile phases. The absorption edge of films calcined at $900^{\circ}C$ was red-shifted. This is due to the augmented absorption resulting from the phase transformation from anatase to rutile phase. And the transmittance of films decreased by the light scattering and absorption in the films. Photocatalytic activity of $Ag/TiO_2$ thin films was higher than that of the pure $TiO_2$ thin films.

Microstructural and Mechanical Characterization of Nanocomposite Ti-Al-Si-N Films Prepared by a Hybrid Deposition System (하이브리드 증착 시스템에 의해 합성된 나노복합체 Ti-Al-Si-N 박막의 미세구조와 기계적 특성)

  • 박인욱;최성룡;김광호
    • Journal of the Korean institute of surface engineering
    • /
    • v.36 no.2
    • /
    • pp.109-115
    • /
    • 2003
  • Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti, Al, Si)N crystallites and amorphous Si3N4 by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film haying the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of nc-(Ti,Al,Si) N/a$-Si_3$$N_4$.