Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 1 Issue 1
- /
- Pages.100-105
- /
- 1992
- /
- 1225-8822(pISSN)
Characterization of Surface Oxides in Gold Thin Films with V- and Ti- underlays by AES and XPS
AES/XPS를 이용한 Au/V, Au/Ti 박막의 표면산화물 분석
Abstract
Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) analyses have been performed on double-structured Au/V and Au/Ti thin films after heat treatment at 500
Au/V, Au/Ti의 이중구조 박막을 대기 중에서
Keywords